JPS637680B2 - - Google Patents
Info
- Publication number
- JPS637680B2 JPS637680B2 JP57054971A JP5497182A JPS637680B2 JP S637680 B2 JPS637680 B2 JP S637680B2 JP 57054971 A JP57054971 A JP 57054971A JP 5497182 A JP5497182 A JP 5497182A JP S637680 B2 JPS637680 B2 JP S637680B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electromagnet
- arc
- anode
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 230000004907 flux Effects 0.000 claims 4
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 132
- 239000002245 particle Substances 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 10
- 238000000576 coating method Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054971A JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054971A JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58178999A JPS58178999A (ja) | 1983-10-20 |
| JPS637680B2 true JPS637680B2 (zh) | 1988-02-17 |
Family
ID=12985536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57054971A Granted JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58178999A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7498587B2 (en) * | 2006-05-01 | 2009-03-03 | Vapor Technologies, Inc. | Bi-directional filtered arc plasma source |
| UA97584C2 (ru) * | 2010-11-08 | 2012-02-27 | Национальный Научный Центр "Харьковский Физико-Технический Институт" | СПОСОБ ТРАНСПОРТИРОВКИ Вакуумно-дуговой Катодной ПЛАЗМЫ С фильтрованием От макрочастиц И УСТРОЙСТВО ДЛЯ ЕГО ОСУЩЕСТВЛЕНИЯ |
-
1982
- 1982-04-02 JP JP57054971A patent/JPS58178999A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58178999A (ja) | 1983-10-20 |
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| JPS637680B2 (zh) | ||
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