JPS6375937U - - Google Patents

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Publication number
JPS6375937U
JPS6375937U JP17092386U JP17092386U JPS6375937U JP S6375937 U JPS6375937 U JP S6375937U JP 17092386 U JP17092386 U JP 17092386U JP 17092386 U JP17092386 U JP 17092386U JP S6375937 U JPS6375937 U JP S6375937U
Authority
JP
Japan
Prior art keywords
plasma
electrodes
container
charged particle
flange portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17092386U
Other languages
English (en)
Other versions
JPH0722850Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170923U priority Critical patent/JPH0722850Y2/ja
Publication of JPS6375937U publication Critical patent/JPS6375937U/ja
Application granted granted Critical
Publication of JPH0722850Y2 publication Critical patent/JPH0722850Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例に係る荷電粒子
源を示す概略断面図である。第２図は、従来の荷
電粒子源の一例を示す概略断面図である。 ４……アークチヤンバー、６，２０……フラン
ジ、１８……引出し電極、２２……荷電粒子、２
４……角リング。

Claims (1)

    【実用新案登録請求の範囲】
  1. プラズマ生成用の容器とその中のプラズマから
    荷電粒子を引き出すための１枚以上の電極を有す
    る荷電粒子源において、前記容器のフランジ部と
    前記電極の内の最プラズマ側の電極のフランジ部
    との間を、絶縁材料から成る断面角形のシール用
    パツキンで電気絶縁および真空シールしているこ
    とを特徴とする荷電粒子源。
JP1986170923U 1986-11-06 1986-11-06 荷電粒子源 Expired - Lifetime JPH0722850Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170923U JPH0722850Y2 (ja) 1986-11-06 1986-11-06 荷電粒子源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170923U JPH0722850Y2 (ja) 1986-11-06 1986-11-06 荷電粒子源

Publications (2)

Publication Number Publication Date
JPS6375937U true JPS6375937U (ja) 1988-05-20
JPH0722850Y2 JPH0722850Y2 (ja) 1995-05-24

Family

ID=31106084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170923U Expired - Lifetime JPH0722850Y2 (ja) 1986-11-06 1986-11-06 荷電粒子源

Country Status (1)

Country Link
JP (1) JPH0722850Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60843U (ja) * 1983-06-17 1985-01-07 株式会社東芝 イオン源

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60843B2 (ja) * 1979-04-05 1985-01-10 ワイケイケイ株式会社 ベルベツト式フアスナ−用テ−プ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60843U (ja) * 1983-06-17 1985-01-07 株式会社東芝 イオン源

Also Published As

Publication number Publication date
JPH0722850Y2 (ja) 1995-05-24

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