JPS6375936U - - Google Patents
Info
- Publication number
- JPS6375936U JPS6375936U JP16907686U JP16907686U JPS6375936U JP S6375936 U JPS6375936 U JP S6375936U JP 16907686 U JP16907686 U JP 16907686U JP 16907686 U JP16907686 U JP 16907686U JP S6375936 U JPS6375936 U JP S6375936U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma chamber
- ion source
- main insulator
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (cs) | 1986-11-05 | 1986-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (cs) | 1986-11-05 | 1986-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375936U true JPS6375936U (cs) | 1988-05-20 |
Family
ID=31102552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16907686U Pending JPS6375936U (cs) | 1986-11-05 | 1986-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375936U (cs) |
-
1986
- 1986-11-05 JP JP16907686U patent/JPS6375936U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6375936U (cs) | ||
| GB1082819A (en) | Improved mass spectrometer | |
| JP2603722B2 (ja) | 高周波誘導結合プラズマ質量分析装置 | |
| JPS6361748U (cs) | ||
| JPH0324249U (cs) | ||
| JPS5974659U (ja) | イオン注入装置のイオン発生装置 | |
| JPS6240756U (cs) | ||
| JPS62193660U (cs) | ||
| JPH01158640U (cs) | ||
| JPS58117053U (ja) | 電界電離型イオン源 | |
| JPS62193661U (cs) | ||
| JPH0521246Y2 (cs) | ||
| JPH0732851U (ja) | イオン源装置 | |
| JPS61206257U (cs) | ||
| JPS61116055U (cs) | ||
| JPS62193659U (cs) | ||
| JPS5929326Y2 (ja) | 分割型アノ−ドボタンを有する陰極線管 | |
| JPS6258900U (cs) | ||
| JPH0379153U (cs) | ||
| JPS6375937U (cs) | ||
| JPS6418568U (cs) | ||
| JPS58154554U (ja) | 高周波イオン源 | |
| JPS60126966U (ja) | ウイ−ンフイルタ装置 | |
| GB1507087A (en) | Extractor ion source | |
| JPH01104638U (cs) |