JPS6375642A - Infrared absorption spectrum reflecting and measuring apparatus - Google Patents
Infrared absorption spectrum reflecting and measuring apparatusInfo
- Publication number
- JPS6375642A JPS6375642A JP61219598A JP21959886A JPS6375642A JP S6375642 A JPS6375642 A JP S6375642A JP 61219598 A JP61219598 A JP 61219598A JP 21959886 A JP21959886 A JP 21959886A JP S6375642 A JPS6375642 A JP S6375642A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- infrared
- infrared rays
- infrared light
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000862 absorption spectrum Methods 0.000 title abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000010931 gold Substances 0.000 claims abstract description 10
- 229910052737 gold Inorganic materials 0.000 claims abstract description 10
- 238000002329 infrared spectrum Methods 0.000 claims abstract description 4
- 238000001028 reflection method Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N21/474—Details of optical heads therefor, e.g. using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は反射法により赤外吸収スペクトルを測定する装
置に係り、特に高輝度赤外光が要求される微小点赤外反
射分光装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for measuring an infrared absorption spectrum by a reflection method, and particularly to a minute point infrared reflection spectrometer that requires high-intensity infrared light.
一般に、赤外分光光度計は公知のものであり、赤外光源
、赤外光の各波長ごとの測定信号を得るためのモノクロ
メータまたは複光束干渉計、および検知器等から構成さ
れている。標準的な赤外分光光度計では、試料保持部上
の試料の測定位置に赤外光の収束させ、試料中を透過せ
しめて測定するように形成されている。従って、赤外光
に透明な試料はかかる方法で測定出来るが、赤外光に不
透明な物質はその表面で、反射、拡散する反射光を測定
することが必要である。このための装置は特開昭５８−
１１７４３８号公報の記載にある第２図に示した様なも
ので、２つの対向する偏向平面反射鏡９．１０の一つ９
から出射する発散赤外光を平行化するコリメータ反射鏡
１１およびこの平行光を試料の測定部へ収束入射させ、
さらに測定部からの反射光を受ける放物面反射鏡１３及
びコリメータ反射鏡１２、さらにこの光を検出器へ変向
させる平面反射鏡１０からなる。In general, infrared spectrophotometers are well known and are comprised of an infrared light source, a monochromator or double beam interferometer for obtaining measurement signals for each wavelength of infrared light, a detector, and the like. A standard infrared spectrophotometer is configured so that infrared light is focused on a measurement position of a sample on a sample holder and is transmitted through the sample for measurement. Therefore, although a sample that is transparent to infrared light can be measured using this method, it is necessary to measure the reflected light that is reflected and diffused on the surface of a substance that is opaque to infrared light. The device for this purpose was published in Japanese Patent Application Laid-open No. 58-
117438, as shown in FIG.
A collimator reflecting mirror 11 that collimates the divergent infrared light emitted from the collimator, and the collimated light is convergently incident on the measurement part of the sample.
It further includes a parabolic reflector 13 and a collimator reflector 12 that receive reflected light from the measuring section, and a flat reflector 10 that deflects this light toward a detector.
この装置は測定部を放物面反射鏡の焦点の位置に置く必
要が有り、放物面反射鏡の大きさで試料の大きさに制限
される欠点がある。また２つのコリメータ反射鏡のそれ
ぞれの焦点は赤外分光光度計の焦点第２図のｆｌ＋ｆ！
に一致させる必要があるが、この調整はかなり困難な作
業である。両者の焦点が一致してないと、コリメータ反
射鏡１１から出た赤外光は平行化出来ず散乱してしまう
ため、赤外光の放物面反射鏡による収束が悪く、測定部
に広がって当るため、微小試料では有効に赤外光が当ら
なくなる。また放物面反射鏡１３を出た赤外光も、コリ
メータ反射鏡１２の焦点が赤外分光光度計の焦点ｆ、と
台ないため、検出器に入る赤外光の強度が弱くなり、Ｓ
／Ｎの悪いスペクトルしか得らｎないなどの問題があっ
た。This device requires the measurement unit to be placed at the focal point of the parabolic reflector, and has the drawback that the size of the parabolic reflector is limited by the size of the sample. Also, the respective focal points of the two collimator reflecting mirrors are the focal points of the infrared spectrophotometer fl+f! in Figure 2!
However, this adjustment is quite difficult. If the two focal points do not match, the infrared light emitted from the collimator reflector 11 cannot be collimated and is scattered, so the infrared light is poorly converged by the parabolic reflector and spread to the measuring section. Therefore, the infrared light will not effectively hit the micro sample. In addition, the infrared light that exits the parabolic reflector 13 is not focused on the focal point f of the infrared spectrophotometer, so the intensity of the infrared light that enters the detector is weakened, and S
There were problems such as only a bad spectrum of /N being obtained.
本発明の目的は、上記問題点を解決するためになされた
ものである。An object of the present invention is to solve the above problems.
赤外光が有効に微小試料に当るために、赤外光が散乱し
ない様に赤外光光源から出た赤外光を試料まで導く必要
がある。赤外光の散乱のない光路をガスクロマトグラフ
−フーリエ変換赤外分光光度計の検出部に用いられてい
る金製の細管（ライトパイプ）を用いる事にした。この
ライトパイプの外径は２〜３Ｍφ程度であるので、赤外
光の入射角度大きくとっても試料が邪魔にならない。赤
外光の散乱を小さくするためにライトパイプの先端は試
料に近くする必要がある。このためライトパイプの径が
大きい場合、赤外光の入射角を大きくとると試料に当る
ため試料を小さくする必要がある。また有効にライトパ
イプに赤外光を入ｉＬるために、集光鏡または集光レン
ズを用いる墨にした。またライトパイプから出た赤外光
を集光鏡または集光レンズを用いる事にした。In order for the infrared light to effectively hit the microsample, it is necessary to guide the infrared light emitted from the infrared light source to the sample so that the infrared light is not scattered. We decided to use a thin gold tube (light pipe) used in the detection section of a gas chromatograph-Fourier transform infrared spectrophotometer to create an optical path that does not scatter infrared light. Since the outer diameter of this light pipe is about 2 to 3 Mφ, the sample does not get in the way even if the incident angle of the infrared light is large. The tip of the light pipe needs to be close to the sample to reduce scattering of infrared light. For this reason, if the diameter of the light pipe is large, if the incident angle of the infrared light is large, the infrared light will hit the sample, so it is necessary to make the sample small. In addition, in order to effectively enter infrared light into the light pipe, a condensing mirror or condensing lens was used. We also decided to use a condenser mirror or condenser lens to capture the infrared light emitted from the light pipe.
金製の細管（ライトパイプ）は赤外光源から出た赤外光
を散乱させる事なく、光源から試料まで赤外光を導く光
の通路である。集光鏡または集光レンズは赤外光源の赤
外光を有効にライトパイプに導くためのもので、またラ
イトパイプから出た赤外光を有効に微小試料に当てるも
のである。A thin gold tube (light pipe) is a light path that guides infrared light from the light source to the sample without scattering the infrared light emitted from the infrared light source. A condensing mirror or a condensing lens is used to effectively guide infrared light from an infrared light source to a light pipe, and also to effectively direct infrared light emitted from the light pipe onto a microscopic sample.
以下本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図において、１は赤外光光源からの赤外光２を通過
させて試料３に照射する金製の内径１ｆｌφ外径２關φ
、長さ５０１ｍの金製のライトパイプ（細管）、４は試
料の反射光を集光して検出器５へ送り込む集光系をなす
軸外し型だ円面反射鏡である。In Fig. 1, reference numeral 1 indicates a gold metal inner diameter 1flφouter diameter 2φ through which infrared light 2 from an infrared light source passes and irradiates the sample 3.
, a gold light pipe (tube) with a length of 501 m, and 4 an off-axis ellipsoidal reflector forming a condensing system that condenses the reflected light from the sample and sends it to the detector 5.
６はライトパイプを赤外光を有効に導入するためのＫＢ
ｒｆｆの集光レンズ、７はライトパイプから出た赤外光
を有効に試料の微小部に邑てるための１０３ｒ製の集光
レンズである。８は試料の一部だけを測定するためのア
パチュア−である。この構成で、赤外光光源からの赤外
光２はライトパイプ１内を通過して、分析試料４の極微
小部に当る。この時の入射角度は４５度とする。この分
析試料４の測定部は反射光の集光系をなす軸外し型だ円
面反射鏡４のほぼ一つの焦点位置にあって、分析試料４
からの反射光はこの軸外し型だ円面反射鏡により集光さ
れ他の焦点位置に置れた検出器５に集光される。また試
料３の微小部だけを測定するために、他の不要部の赤外
光を８のアパチュアによって除くが可能である。6 is a KB for effectively introducing infrared light into the light pipe.
The rff condensing lens 7 is a condensing lens made of 103r for effectively directing the infrared light emitted from the light pipe into a minute part of the sample. 8 is an aperture for measuring only a part of the sample. With this configuration, the infrared light 2 from the infrared light source passes through the light pipe 1 and hits a very small portion of the analysis sample 4. The angle of incidence at this time is 45 degrees. The measurement part of the analysis sample 4 is located at almost one focal point of the off-axis ellipsoidal reflector 4 that forms the condensing system for the reflected light.
The reflected light is focused by this off-axis ellipsoidal reflector and focused on a detector 5 placed at another focal position. Further, in order to measure only a minute portion of the sample 3, it is possible to remove infrared light from other unnecessary portions using an aperture 8.
以上のような本実施例によれば、赤外光が通過才、Ｚ、
ｎ−ｈｉりｎ ｉｔｍ （１”＋了、ぐキー了ん…Ｌ
ｓ Ｚ 虜１．ｒ ｈ ｊＱ ＝ｄ’ ＬＷ上の１０μ
ｍ径の有機物の赤外スペクトルが高感度で測定出来た。According to this embodiment as described above, the infrared light passes through the
n-hirin itm (1” + completed, ugh key completed…L
s Z prisoner 1. r h jQ = d' 10μ on LW
Infrared spectra of m-diameter organic substances could be measured with high sensitivity.
本発明によれば、赤外光光源から出た赤外光を少ない散
乱で試料の微小部に導く事が出来るため試料上微小部の
赤外スペクトルが高感度で測定出来る。According to the present invention, infrared light emitted from an infrared light source can be guided to a minute part of a sample with little scattering, so that the infrared spectrum of a minute part on a sample can be measured with high sensitivity.
第１図は本発明の一実施例を示した構成図、第２図は従
来装置の概要を示した構成図である。
１・・・金製の細管 ２・・・赤外光３・・・試
料 ４・・・軸外しだ円面反射鏡５・・・
検出器 ６，７・・・集光レンズ８・・・ア
パチュア ９ 、１０山平面反射光１１ 、１２
・・・コリメータ反射鏡
１３・・・放物面反射鏡
代理人 弁理士 小 川 勝 男
４ 隼光、しり又−
７，Ｓたし〉ス
ヌλ 図FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing an outline of a conventional device. 1... Gold thin tube 2... Infrared light 3... Sample 4... Off-axis ellipsoidal reflector 5...
Detector 6, 7...Condensing lens 8...Aperture 9, 10 peak plane reflected light 11, 12
... Collimator reflector 13 ... Parabolic reflector Agent Patent attorney Masaru Ogawa Male 4 Hayamitsu, Shirimata - 7, S Tashi> Sunu λ Figure
Claims (1)
ルを反射法で測定する装置において、赤外光源からの赤
外光を導き上記試料に照射する金または内部金めっき製
の細管と、上記試料からの反射光を集光する集光系とか
ら成る事を特徴とする赤外吸収スペクトル反射測定装置
。1. In an apparatus that measures the infrared spectrum of the sample surface using the reflection method by placing a sample on a sample stage, a thin tube made of gold or internally plated with gold is used to guide infrared light from an infrared light source and irradiate the sample. , and a condensing system that condenses the reflected light from the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219598A JPS6375642A (en) | 1986-09-19 | 1986-09-19 | Infrared absorption spectrum reflecting and measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219598A JPS6375642A (en) | 1986-09-19 | 1986-09-19 | Infrared absorption spectrum reflecting and measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375642A true JPS6375642A (en) | 1988-04-06 |
Family
ID=16738044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61219598A Pending JPS6375642A (en) | 1986-09-19 | 1986-09-19 | Infrared absorption spectrum reflecting and measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375642A (en) |
-
1986
- 1986-09-19 JP JP61219598A patent/JPS6375642A/en active Pending
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