JP2943236B2 - Total reflection absorption spectrum measurement device - Google Patents
Total reflection absorption spectrum measurement deviceInfo
- Publication number
- JP2943236B2 JP2943236B2 JP12229290A JP12229290A JP2943236B2 JP 2943236 B2 JP2943236 B2 JP 2943236B2 JP 12229290 A JP12229290 A JP 12229290A JP 12229290 A JP12229290 A JP 12229290A JP 2943236 B2 JP2943236 B2 JP 2943236B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- total reflection
- mirror
- prism
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、赤外顕微鏡システムを利用した全反射吸収
スペクトル測定装置に関する。Description: TECHNICAL FIELD The present invention relates to an apparatus for measuring a total reflection absorption spectrum using an infrared microscope system.
（従来の技術） 赤外分光分析法の持つ高い物質同定能力を、より微細
な試料の測定に利用するために顕微鏡システムに赤外分
光光度計を組込んだ赤外分光分析装置が実用化されてい
る。(Prior art) An infrared spectrometer that incorporates an infrared spectrophotometer into a microscope system has been put into practical use in order to utilize the high substance identification capability of infrared spectroscopy for measuring finer samples. ing.
このような装置によれば、赤外顕微鏡システムにおけ
る小さなビームを利用して試料の微少部分についての分
析が可能になる。According to such an apparatus, it is possible to analyze a small portion of the sample using a small beam in the infrared microscope system.
一方、赤外分光分析法の一つである全反射吸収スペク
トル測定法は、試料の表面の性状を測定するには極めて
有用な手法であるが、これは全反射を利用する関係上、
並行平板プリズムや、三角プリズムに試料を密着させ、
臨界角以上で平行な赤外光を試料面に入射させることが
必要である。On the other hand, the total reflection absorption spectrum measurement method, which is one of the infrared spectroscopy methods, is an extremely useful method for measuring the properties of the surface of a sample, but this method is based on the use of total reflection.
The sample is brought into close contact with a parallel plate prism or triangular prism,
It is necessary to make parallel infrared light having a critical angle or more incident on the sample surface.
（発明が解決しようとする課題） しかしながら、赤外顕微鏡は、対物光学系にカセグレ
ンミラーを使用するとともに、顕微鏡システムを構成す
る接眼レンズ系と赤外分析システムの赤外検出系とに試
料からの反射光を分割するように構成されている。(Problems to be Solved by the Invention) However, the infrared microscope uses a Cassegrain mirror as an objective optical system, and also uses an eyepiece system that constitutes a microscope system and an infrared detection system of an infrared analysis system. It is configured to split the reflected light.
このため、平行平板プリズムや三角プリズムを利用す
る従来の全反射吸光分析法では、試料表面に対して臨界
角以上で赤外線を入射させることができず、赤外顕微鏡
システムを利用した全反射スペクトル測定が不可能であ
った。For this reason, in the conventional total reflection absorption analysis using a parallel plate prism or a triangular prism, infrared rays cannot be incident on the sample surface at a critical angle or more, and the total reflection spectrum measurement using an infrared microscope system is performed. Was impossible.
本発明はこのような問題に鑑みてなされたものであっ
て、その目的とするところは赤外顕微鏡システムを利用
して全反射吸収スペクトルの測定を行なうことができ、
しかも極めて微少な領域についての測定結果を得ること
ができる新規な全反射吸収スペクトル測定装置を提供す
ることある。The present invention has been made in view of such a problem, and a purpose thereof is to measure a total reflection absorption spectrum using an infrared microscope system,
Moreover, there is a need to provide a novel total reflection absorption spectrum measuring apparatus capable of obtaining a measurement result in an extremely small area.
（課題を解決するための手段） このような問題を解消するために本発明においては、
顕微鏡の対物レンズ系を構成するカセグレンミラーと、
該カセグレンミラーと試料に形成された平面部の間に配
置され、前記カセグレンミラー、及び試料に対向する２
つの面が並行で、かつ周囲が球面の一部をなすプリズム
と、前記プリズムの周囲から臨界角以上で試料に赤外光
を照射する光源と、前記カセグレンミラーからの反射光
を受ける赤外受光手段を備えるようにした。(Means for Solving the Problems) In order to solve such a problem, in the present invention,
Cassegrain mirror constituting the objective lens system of the microscope,
The Cassegrain mirror is disposed between the Cassegrain mirror and the flat portion formed on the sample, and faces the Cassegrain mirror and the sample.
A prism whose two surfaces are parallel and the periphery of which forms a part of a spherical surface, a light source that irradiates the sample with infrared light from the periphery of the prism at a critical angle or more, and an infrared light receiving device that receives reflected light from the Cassegrain mirror Means were provided.
（作用） カセグレンミラーからの光をプリズムの周面により臨
界角以上で試料に入射させる一方、試料からの反射光を
並行な２面によりカセグレンミラーにより収束させて受
光手段に反射させる。(Operation) While the light from the Cassegrain mirror is made to enter the sample at a critical angle or more by the peripheral surface of the prism, the reflected light from the sample is converged by the Cassegrain mirror by two parallel surfaces and reflected by the light receiving means.
この時、試料に照射される赤外光はカセグレンミラー
により絞り込まれているため、極めて微小となっている
から、試料の微小な面積についての全反射吸光情報を得
ることができる。At this time, since the infrared light applied to the sample is narrowed down by the Cassegrain mirror, it is extremely small, so that it is possible to obtain total reflection absorption information for a small area of the sample.
（実施例） そこで以下に本発明の詳細を図示した実施例に基づい
て説明する。(Embodiment) Therefore, the details of the present invention will be described below based on an illustrated embodiment.
第１図は本発明の一実施例を示すものであって、図中
符号１は、顕微鏡システムの対物光学系を構成するカセ
グレンミラーで、凹面鏡２と凸面鏡３により構成され、
凹面鏡２に形成されたアパーチャ４に対向して配置され
たハーフミラー５を介して試料からの反射光を分析系の
赤外検出器６と、顕微鏡の接眼光学系７の二つの光路に
分割する一方、赤外光源８からの光をアパーチャ４を介
して試料に照射するように構成されている。FIG. 1 shows an embodiment of the present invention, in which reference numeral 1 denotes a Cassegrain mirror constituting an objective optical system of a microscope system, which comprises a concave mirror 2 and a convex mirror 3,
The reflected light from the sample is split into two optical paths of an infrared detector 6 of an analysis system and an eyepiece optical system 7 of a microscope via a half mirror 5 disposed opposite to an aperture 4 formed on the concave mirror 2. On the other hand, the sample is configured to irradiate the sample from the infrared light source 8 through the aperture 4.
９は、本発明が特徴とする全反射吸光システムを構成
するプリズムであって、第２、３図に示したように試料
Ｓとカセグレンミラー１に対向する面は互いに並行な平
面10、11が、また周囲をカセグレンミラー光学系からの
光が試料平面に対して臨界角θ以上、例えば40度以上と
なるような球面12が構成されている。なお、図中符号13
は分光器を示す。Reference numeral 9 denotes a prism constituting a total reflection absorption system characterized by the present invention. As shown in FIGS. 2 and 3, surfaces facing the sample S and the Cassegrain mirror 1 are planes 10 and 11 parallel to each other. Further, a spherical surface 12 is formed around which the light from the Cassegrain mirror optical system has a critical angle θ or more, for example, 40 degrees or more with respect to the sample plane. In the figure, reference numeral 13
Indicates a spectroscope.
この実施例において、試料の全反射吸光を測定すべ
く、試料Ｓの表面に接してプリズム９を配置し、赤外光
源８からの赤外光を照射すると、赤外光は、ハーフミラ
ー５によりカセグレンミラーの方向に反射される。カセ
グレンミラー１のアパーチャ４から入射した赤外光L1
は、凸面鏡３により凹面鏡２側に反射され（L2）、凹面
鏡２に収束されて（L3）プリズム９の周面から臨界角以
上の角度でもって試料に入射する（L4）。In this embodiment, in order to measure the total reflection and absorption of the sample, a prism 9 is arranged in contact with the surface of the sample S, and the infrared light from the infrared light source 8 is irradiated. It is reflected in the direction of the Cassegrain mirror. Infrared light L1 incident from the aperture 4 of the Cassegrain mirror 1
Is reflected by the convex mirror 3 toward the concave mirror 2 (L2), converged by the concave mirror 2 (L3), and is incident on the sample from the peripheral surface of the prism 9 at an angle greater than the critical angle (L4).
試料Ｓに到達した赤外光は、試料Ｓの成分等により吸
収を受けた後、反射されてプリズム９に入射し、平面1
1、10からカセグレミラー１の凹面鏡２に入射する（L
5）。凹面鏡２で反射された赤外光は凸面鏡３により反
射されて（L6）アパーチャ４からハーフミラー５を介し
て分光器13に入射し、赤外検出器６によりスペクトル解
析が行なわれる。これにより試料の性質により決る吸光
スペクトルが測定されることになる。The infrared light that has reached the sample S is absorbed by the components of the sample S and the like, is reflected and enters the prism 9, and is incident on the flat surface 1.
The light enters the concave mirror 2 of the Cassegrain mirror 1 from 1 and 10 (L
Five). The infrared light reflected by the concave mirror 2 is reflected by the convex mirror 3 (L6), enters the spectroscope 13 from the aperture 4 via the half mirror 5, and is subjected to spectral analysis by the infrared detector 6. As a result, an absorption spectrum determined by the properties of the sample is measured.
ところで、プリズム９に入射する段階での赤外光は、
カセグレンミラーにより収束されているためにビーム径
が極めて小さくし、たがってプリズム９はサイズが極め
て小さいもので十分に機能するばかりでなく、全反射吸
光測定の対象領域も極めて小さく絞られることになる。By the way, the infrared light at the stage of entering the prism 9 is:
Since the beam diameter is extremely small because it is converged by the Cassegrain mirror, not only the prism 9 is extremely small in size but functions well, but the target area of the total reflection absorption measurement is also extremely small. .
（発明の効果） 以上説明したように本発明においては、顕微鏡の対物
レンズ系を構成するカセグレンミラーと、カセグレンミ
ラーと試料に形成された平面部の間に配置され、カセグ
レンミラー、及び試料に対向する２つの面が相互に並行
でかつ、光透過な領域として形成され、また周囲の球面
の一部として形成されたすプリズムと、プリズムの周囲
から臨界角以上で試料に赤外光を照射する光源と、カセ
グレンミラーからの反射光を受ける赤外受光手段を備え
たので、赤外顕微鏡システムを利用して全反射吸光分析
を実現することができ、また測定領域がカセグレンミラ
ーにより規制されて極めて小さいため、試料の極く狭い
領域についての分析が可能となり、カセグレンミラー光
学系に対して試料を相対的に移動させることにより２次
元的な測定結果を得ることができるばかりでなく、試料
の表面に極く小さな平坦部が存在すれば測定が可能とな
る。(Effects of the Invention) As described above, in the present invention, a Cassegrain mirror constituting an objective lens system of a microscope, and a Cassegrain mirror disposed between the Cassegrain mirror and a flat portion formed on the sample, face the Cassegrain mirror and the sample. A prism formed as a light-transmitting region in which the two surfaces are parallel to each other and formed as a part of the surrounding spherical surface, and irradiating the sample with infrared light from the periphery of the prism at a critical angle or more Since it has a light source and infrared light receiving means for receiving the reflected light from the Cassegrain mirror, total reflection absorption analysis can be realized using an infrared microscope system, and the measurement area is extremely restricted by the Cassegrain mirror. Because it is small, it is possible to analyze a very small area of the sample, and by moving the sample relatively to the Cassegrain mirror optical system, it is possible to perform two-dimensional analysis. Not only can a good measurement result be obtained, but also a measurement can be made if a very small flat portion exists on the surface of the sample.
第１図は本発明の一実施例を示す装置の構成図、第２図
は同上装置の要部の光学系を示す図、第３図は（イ）
（ロ）は、それぞれ同上装置のプリズムを示す側面図と
上面図ある。 １……カセグレンミラー、２……凹面鏡 ３……凸面鏡、４……アパーチャ ５……ハーフミラー、６……赤外検出器 ７……接眼光学系、８……赤外光源FIG. 1 is a block diagram of an apparatus showing one embodiment of the present invention, FIG. 2 is a view showing an optical system of a main part of the apparatus, and FIG.
(B) is a side view and a top view, respectively, showing a prism of the above device. DESCRIPTION OF SYMBOLS 1 ... Cassegrain mirror 2 ... Concave mirror 3 ... Convex mirror 4 ... Aperture 5 ... Half mirror 6 ... Infrared detector 7 ... Eyepiece optical system 8 ... Infrared light source
Claims (1)
ンミラーと、該カセグレンミラーと試料に形成された平
面部の間に配置され、前記カセグレンミラー、及び試料
に対向する２つの面が相互に並行でかつ光透過な領域と
して形成され、また周囲が球面の一部として形成された
プリズムと、前記プリズムの周囲から臨界角以上で試料
に赤外光を照射する光源と、前記カセグレンミラーから
の反射光を受ける赤外受光手段を備えてなる全反射吸収
スペクトル測定装置。1. A Cassegrain mirror constituting an objective lens system of a microscope, and a surface disposed between the Cassegrain mirror and a plane formed on a sample, wherein the two surfaces facing the Cassegrain mirror and the sample are parallel to each other. A prism that is formed as a light-transmitting region, and whose periphery is formed as a part of a spherical surface; a light source that irradiates the sample with infrared light at a critical angle or more from the periphery of the prism; A total reflection absorption spectrum measuring device comprising an infrared light receiving means for receiving light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12229290A JP2943236B2 (en) | 1990-05-11 | 1990-05-11 | Total reflection absorption spectrum measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12229290A JP2943236B2 (en) | 1990-05-11 | 1990-05-11 | Total reflection absorption spectrum measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0416748A JPH0416748A (en) | 1992-01-21 |
| JP2943236B2 true JP2943236B2 (en) | 1999-08-30 |
Family
ID=14832347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12229290A Expired - Fee Related JP2943236B2 (en) | 1990-05-11 | 1990-05-11 | Total reflection absorption spectrum measurement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2943236B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4165450B2 (en) | 2004-05-14 | 2008-10-15 | ブラザー工業株式会社 | Paper feeding device and program |
-
1990
- 1990-05-11 JP JP12229290A patent/JP2943236B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416748A (en) | 1992-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |