JPH0524203Y2 - - Google Patents
Info
- Publication number
- JPH0524203Y2 JPH0524203Y2 JP17503086U JP17503086U JPH0524203Y2 JP H0524203 Y2 JPH0524203 Y2 JP H0524203Y2 JP 17503086 U JP17503086 U JP 17503086U JP 17503086 U JP17503086 U JP 17503086U JP H0524203 Y2 JPH0524203 Y2 JP H0524203Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- slit plate
- visible light
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000004458 analytical method Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 6
- 238000001634 microspectroscopy Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000004566 IR spectroscopy Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Description
【考案の詳細な説明】
［産業上の利用分野］
本考案は、試料の微細部分に赤外光等を照射
し、該微細部分の赤外吸収スペクトル等を得るよ
うにした顕微分光装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a microspectroscopy apparatus that irradiates a minute portion of a sample with infrared light or the like to obtain an infrared absorption spectrum or the like of the minute portion.
［従来の技術］
例えば、顕微赤外分光計においては、試料に細
く絞つた赤外光を照射し、試料の微細部分を透過
あるいは反射した赤外光を検出し、該微細部分の
赤外スペクトルを得るようにしている。この場
合、単に赤外光を細く絞るだけではなく、微細部
分からの赤外光を検出器に導くため、スリツト板
で赤外光を制限している。[Prior art] For example, in a microinfrared spectrometer, a sample is irradiated with narrowly focused infrared light, the infrared light transmitted or reflected by a minute part of the sample is detected, and the infrared spectrum of the minute part is detected. I'm trying to get it. In this case, the infrared light is not only narrowed down, but is also restricted by a slit plate in order to guide the infrared light from minute parts to the detector.
［考案が解決しようとする問題点］
顕微赤外分光計は、試料上の微細分析部分を選
択するため、試料上に可視光を照射し、試料の顕
微鏡像を観察するようにしている。しかしなが
ら、試料からの可視光は上記したスリツト板によ
つて遮蔽されてしまい、試料の全体像を見ながら
分析位置の選択を行うことができない。[Problems to be solved by the invention] A microinfrared spectrometer irradiates visible light onto the sample and observes a microscopic image of the sample in order to select a fine analysis area on the sample. However, visible light from the sample is blocked by the slit plate, making it impossible to select an analysis position while viewing the entire sample.
本考案は、上述した点に鑑みてなされたもの
で、試料の観察を充分に行うことができる顕微分
光装置を提供することを目的としている。 The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a microspectroscopy apparatus that can sufficiently observe a sample.
［問題点を解決するための手段］
本考案に基づく顕微分光装置は、移動ステージ
上の試料に可視光以外の波長領域の光L1を照射
する光学系と、該試料を透過あるいは反射した光
L1を検出する検出器と、該検出器に向う光L1を
制限するスリツト板と、該試料に可視光L2を照
射するための光源と、該試料から放射され前記ス
リツト板を介して取り出された可視光L2が導入
される観察系とを備え、前記スリツト板により選
択された試料上の微細分析部分からの光L1のみ
が前記検出器へ導入されるようにした顕微分光装
置において、該スリツト板を該可視光以外の波長
領域の光L1を遮蔽し、可視光L2を透過する材料
によつて形成したことを特徴としている。[Means for solving the problem] A microspectroscopy device based on the present invention includes an optical system that irradiates a sample on a moving stage with light L1 in a wavelength range other than visible light, and a light that is transmitted or reflected by the sample.
a detector for detecting light L 1 ; a slit plate for restricting the light L 1 directed toward the detector; a light source for irradiating the sample with visible light L 2 ; and an observation system into which the extracted visible light L 2 is introduced, and the microspectroscopy apparatus is configured such that only the light L 1 from the fine analysis part on the sample selected by the slit plate is introduced into the detector. The slit plate is characterized in that it is formed of a material that blocks light L1 in a wavelength range other than the visible light and transmits visible light L2 .
［実施例］
以下本考案一実施例を添附図面に基づいて詳述
する。[Embodiment] An embodiment of the present invention will be described below in detail with reference to the accompanying drawings.
第１図は顕微赤外分光計の光学系を示してお
り、１は分光器、２，３は凹面鏡、４，５，６は
反射鏡、７は分析試料、８は試料ステージ、９は
ステージ移動機構、１０は可視光源、１１，１２
は半透明鏡、１３はスリツト板、１４は検出器、
１５は観察光学系である。 Figure 1 shows the optical system of a microinfrared spectrometer. 1 is a spectrometer, 2 and 3 are concave mirrors, 4, 5, and 6 are reflecting mirrors, 7 is an analysis sample, 8 is a sample stage, and 9 is a stage. Moving mechanism, 10 is a visible light source, 11, 12
13 is a semi-transparent mirror, 13 is a slit plate, 14 is a detector,
15 is an observation optical system.
上述した構成において、分光器１において分光
された特定波長の赤外光L1は、反射鏡４，凹面
鏡２，反射鏡５によつて反射集光され、試料７の
微細部分に照射される。該試料７を透過した赤外
光L1は、反射鏡６，凹面鏡３によつて反射され、
半透明鏡１１を透過し、半透明鏡１２によつて反
射された後、検出器１４によつて検出される。こ
こで、該分光器１において分光波長を変化させれ
ば、次々と異なつた波長の赤外光を試料に照射す
ることができ、特定波長範囲の試料の赤外吸収ス
ペクトルを得ることができる。該半透明鏡１１と
１２との間には、スリツト板１３が配置されてい
るが、第１図において試料上の１点から放射され
た光がスリツト板１３の位置で収束していること
から分るように、スリツト板１３は試料像結像位
置に配置され、これにより試料上の微細分析部分
を選択することができる。該スリツト板１３は、
２段構成となつており、第２図にその平面図を示
すように、４枚のスリツト板１３ａ，１３ｂ，１
３c.１３ｄより成つている。スリツト板１３ａと
１３ｂとの間隔、および、スリツト板１３ｃと１
３ｄとの間隔は調整可能となつており、その結
果、図中斜線を施した４枚のスリツト板で囲まれ
た範囲Ｓのみ赤外光が該スリツトを透過し、検出
器１４によつて検出されることになる。該スリツ
ト板を調整し、該範囲Ｓを狭くすれば、試料７の
より微細な部分からの赤外光のみを検出器に導く
ことができ、該微細部分の赤外分光を行うことが
でき、逆に、該範囲Ｓを比較的広くすれば、比較
的広い試料部分の赤外分光を行うことができる。 In the above-described configuration, infrared light L 1 of a specific wavelength separated by the spectroscope 1 is reflected and focused by the reflecting mirror 4 , concave mirror 2 , and reflecting mirror 5 , and is irradiated onto a minute portion of the sample 7 . The infrared light L1 transmitted through the sample 7 is reflected by the reflecting mirror 6 and the concave mirror 3,
After passing through the semi-transparent mirror 11 and being reflected by the semi-transparent mirror 12, it is detected by the detector 14. Here, by changing the spectral wavelength in the spectrometer 1, the sample can be irradiated with infrared light of different wavelengths one after another, and an infrared absorption spectrum of the sample in a specific wavelength range can be obtained. A slit plate 13 is placed between the semi-transparent mirrors 11 and 12, and since the light emitted from one point on the sample is converged at the position of the slit plate 13 in FIG. As can be seen, the slit plate 13 is placed at the specimen imaging position, thereby making it possible to select a fine analysis portion on the specimen. The slit plate 13 is
It has a two-stage configuration, and as shown in the plan view in FIG. 2, four slit plates 13a, 13b, 1
It consists of 3c.13d. The distance between the slit plates 13a and 13b, and the distance between the slit plates 13c and 1
3d can be adjusted, and as a result, infrared light passes through the slits only in the area S surrounded by the four slit plates marked with diagonal lines in the figure, and is detected by the detector 14. will be done. By adjusting the slit plate and narrowing the range S, it is possible to guide only the infrared light from a finer part of the sample 7 to the detector, and perform infrared spectroscopy of the finer part. Conversely, if the range S is made relatively wide, infrared spectroscopy can be performed on a relatively wide sample portion.
さて、試料７上の分析位置を選択するために、
本実施例においては、光源１０からの可視光L2
が半透明鏡１１によつて反射され、反射鏡６，凹
面鏡３によつて反射され試料７の表面に導かれ、
該可視光によつて試料表面の照明を行つている。 Now, in order to select the analysis position on sample 7,
In this embodiment, visible light L 2 from the light source 10
is reflected by the semi-transparent mirror 11, reflected by the reflecting mirror 6 and concave mirror 3, and guided to the surface of the sample 7,
The surface of the sample is illuminated by the visible light.
該試料表面からの可視光L2は、赤外光L1と同
じ経路を通りスリツト板１３及び半透明鏡１２を
介して観察光学系１５に導かれる。該観察光学系
１５は顕微鏡の接眼レンズ系、あるいは、テレビ
カメラであり、該光学系１５によつて試料像を観
察することができる。ここで、試料７と該観察光
学系との間に配置されたスリツト板１３の材料
は、赤外光は遮断するものの可視光は透過する特
性の材料、例えば、KDPやガラス等によつて形
成されている。従つて、試料表面からの可視光
は、スリツト板１３に影響されず、観察光学系１
５に導かれることから、試料の幅広い範囲の光学
像を観察することができる。この光学像は、スリ
ツト板１３を構成するスリツト板１３ａ〜１３ｄ
により若干の減衰を受けた暗い周辺領域と、スリ
ツト板１３の開口部に相当する減衰を受けない明
るい中央領域とから構成される。この明るい中央
領域が試料上の微細分析領域に相当することは言
うまでもない。従つて、オペレータは、該試料の
広い範囲の光学像を観察しながら、分析箇所を選
択することができ、選択した分析箇所が画面の中
央に配置されるようにステージ移動機構９を操作
してステージを移動させれば、所望微細部分の分
析を行うことができる。 The visible light L 2 from the sample surface passes through the same path as the infrared light L 1 and is guided to the observation optical system 15 via the slit plate 13 and the semi-transparent mirror 12 . The observation optical system 15 is an eyepiece system of a microscope or a television camera, and the sample image can be observed through the optical system 15. Here, the material of the slit plate 13 placed between the sample 7 and the observation optical system is a material that blocks infrared light but transmits visible light, such as KDP or glass. has been done. Therefore, visible light from the sample surface is not affected by the slit plate 13 and is transmitted through the observation optical system 1.
5, it is possible to observe a wide range of optical images of the sample. This optical image shows the slit plates 13a to 13d that constitute the slit plate 13.
It consists of a dark peripheral area that has been slightly attenuated by the slit plate 13, and a bright central area that has not been attenuated and corresponds to the opening of the slit plate 13. It goes without saying that this bright central area corresponds to the fine analysis area on the sample. Therefore, the operator can select an analysis point while observing a wide optical image of the sample, and operate the stage moving mechanism 9 so that the selected analysis point is placed in the center of the screen. By moving the stage, a desired minute portion can be analyzed.
以上本考案の一実施例を詳述したが、本考案は
この実施例に限定されず幾多の変形が可能であ
る。例えば、赤外分光計を例に説明したが、紫外
分光度計にも本考案を適用し得る。又、試料に分
光された赤外光を照射したが、赤外干渉光を照射
し、検出信号をフーリエ変換して赤外スペクトル
を得るようにした分光装置にも本考案を適用する
ことができる。更に、試料を透過した光を検出す
るようにしたが、試料に赤外光を照射し、該試料
から反射した光を検出するように構成しても良
い。更に又、スリツト板の挿入位置は第１図の光
学系に限定されない。 Although one embodiment of the present invention has been described above in detail, the present invention is not limited to this embodiment and can be modified in many ways. For example, although an infrared spectrometer has been described as an example, the present invention can also be applied to an ultraviolet spectrometer. In addition, the present invention can be applied to a spectroscopic device in which a sample is irradiated with spectroscopic infrared light, but infrared interference light is irradiated and the detected signal is Fourier transformed to obtain an infrared spectrum. . Furthermore, although the light transmitted through the sample is detected, the sample may be irradiated with infrared light and the light reflected from the sample may be detected. Furthermore, the insertion position of the slit plate is not limited to the optical system shown in FIG.
［効果］
本考案では、分析光を制限するスリツト板の材
料として、可視光は透過するが、該分析光は遮蔽
する特性を有した材料を用いたので、分析箇所の
選択を極めて容易に行うことができる。[Effect] In the present invention, as the material of the slit plate that restricts the analysis light, a material that transmits visible light but has the property of blocking the analysis light is used, making it extremely easy to select the analysis location. be able to.
第１図は本考案の一実施例である顕微赤外分光
計を示す光学図、第２図は第１図の装置に使用さ
れたスリツト板の平面図である。
１……分光器、２，３……凹面鏡、４，５，６
……反射鏡、７……分析試料、８……試料ステー
ジ、９……ステージ移動機構、１０……可視光
源、１１，１２……半透明鏡、１３……スリツト
板、１４……検出器、１５……観察光学系。
FIG. 1 is an optical diagram showing a microinfrared spectrometer which is an embodiment of the present invention, and FIG. 2 is a plan view of a slit plate used in the apparatus shown in FIG. 1... Spectrometer, 2, 3... Concave mirror, 4, 5, 6
... Reflection mirror, 7 ... Analysis sample, 8 ... Sample stage, 9 ... Stage movement mechanism, 10 ... Visible light source, 11, 12 ... Semi-transparent mirror, 13 ... Slit plate, 14 ... Detector , 15... Observation optical system.
Claims (1)
の光L1を照射する光学系と、該試料を透過ある
いは反射した光L1を検出する検出器と、該検出
器に向う光L1を制限するスリツト板と、該試料
に可視光L2を照射するための光源と、該試料か
ら放射され前記スリツト板を介して取り出された
可視光L2が導入される観察系とを備え、前記ス
リツト板により選択された試料上の微細分析部分
からの光L1のみが前記検出器へ導入されるよう
にした顕微分光装置において、該スリツト板を該
可視光以外の波長領域の光L1を遮蔽し、可視光
L2を透過する材料によつて形成したことを特徴
とする顕微分光装置。 An optical system that irradiates a sample on a moving stage with light L1 in a wavelength range other than visible light, a detector that detects light L1 transmitted or reflected by the sample, and a limiter for the light L1 directed toward the detector. a slit plate, a light source for irradiating the sample with visible light L 2 , and an observation system into which visible light L 2 emitted from the sample and taken out via the slit plate is introduced; In a microspectroscopy device in which only light L 1 from a fine analysis area on a sample selected by a plate is introduced to the detector, the slit plate is used to block light L 1 in a wavelength range other than visible light. and visible light
A microspectroscopy device characterized in that it is made of a material that transmits L2 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17503086U JPH0524203Y2 (en) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17503086U JPH0524203Y2 (en) | 1986-11-14 | 1986-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381245U JPS6381245U (en) | 1988-05-28 |
| JPH0524203Y2 true JPH0524203Y2 (en) | 1993-06-21 |
Family
ID=31113974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17503086U Expired - Lifetime JPH0524203Y2 (en) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0524203Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4642178B2 (en) * | 2000-01-18 | 2011-03-02 | オリンパス株式会社 | Infrared microscope and observation tube used therefor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2572767Y2 (en) * | 1991-01-25 | 1998-05-25 | 日本分光株式会社 | Microscopic infrared spectrum measurement device |
| JP2575981B2 (en) * | 1991-12-28 | 1997-01-29 | 株式会社島津製作所 | Infrared microscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4894449A (en) * | 1972-03-15 | 1973-12-05 | ||
| JPS5144942A (en) * | 1974-10-16 | 1976-04-16 | Nippon Kogaku Kk | KEIKOSOTSUKOKENBIKYO |
| JPS5256067U (en) * | 1975-10-21 | 1977-04-22 |
-
1986
- 1986-11-14 JP JP17503086U patent/JPH0524203Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4894449A (en) * | 1972-03-15 | 1973-12-05 | ||
| JPS5144942A (en) * | 1974-10-16 | 1976-04-16 | Nippon Kogaku Kk | KEIKOSOTSUKOKENBIKYO |
| JPS5256067U (en) * | 1975-10-21 | 1977-04-22 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4642178B2 (en) * | 2000-01-18 | 2011-03-02 | オリンパス株式会社 | Infrared microscope and observation tube used therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6381245U (en) | 1988-05-28 |
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