JPH04155247A - Sample observation by microscopic fourier transform infrared spectroscopy - Google Patents

Abstract

PURPOSE:To improve efficiency and accuracy of measurement with easier alteration by a method wherein an overall image of a sample is synthesized and displayed on the same screen with the first image as second image after the recording of an image of a part shielded with a mask as the first image to make clear a positional relationship of a part to be measured. CONSTITUTION:Part alone shielded with shielding masks 10 and 11 is monitored with TV camera 15 as first image (a) and inputted into an image processor 16 to be displayed on a screen of a TV monitor 17. Then, an optical path is removed from the masks 10 and 11 and the image is monitored as an overall image of a sample 2 with the camera 15 again. A signal from the camera 15 is inputted into the device 16 and displayed on the screen of the monitor 17 as second image (b) to be shown as synthesized image on the same screen with the image (a). Therefore, a positional relationship of a position to be measured in the sample 2 is made clear to facilitate alteration. Thereafter, spectroscopic characteristic and intensity of the part are measured using infrared rays thereby achieving a shorter measuring time and a higher measuring accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sample observation method in microscopic Fourier transform infrared spectroscopy.

[Conventional technology]

FIG. 4 shows a conventional general microspectrometry device. When observing a sample, visible light from a 1° light source is irradiated onto the sample 2, the transmitted light is focused by an objective mirror 3, and an image plane 4 An enlarged image is formed. Further, the light from this image plane 4 is enlarged and imaged through a relay lens 5, and then the image plane 4 is observed through an eyepiece lens 6.

On the other hand, when performing spectroscopic measurements, visible light is switched to infrared light, and an optical path switching mirror 7 is interposed between the image plane 4 and the relay lens 5 to transmit the infrared light to the relay optical system 8. After that, a spectroscopic spectrum is obtained by the detector 9 and analyzed.

For example, if you want to measure the spectrum of only the measurement target site A in the sample 2 as shown in FIG. 5(a),
As shown in FIG. 4, a mask 10.11 is installed on the image plane 4 to block light beams from areas other than the area to be measured, and only the beams from the area to be measured are separated to obtain their spectra.

That is, as shown in FIG. 5(b), a shielding mask 10.11 consisting of a rectangular slit formed in a knife shape on each side on the image plane 4 and whose slit length can be changed arbitrarily.
is installed, the slit length is made variable so as to block the light flux from parts B and C other than the measurement target part A, and to obtain the maximum light flux from the measurement target part A, and the measurement is performed.

[iB to be solved by the invention] However, if the measurement target is limited by the above method, the fifth
As shown in Figure (c), only part A is observed through the shielding mask l0111, and the other parts B and C are shielded, so the positional relationship between the parts in the whole specimen 2 is not clear. It is extremely important to understand the positional relationship of the measurement target when it cannot be reconfirmed by visual observation, and the smaller the measurement target becomes, or the more complex the overall image is, such as a semiconductor chip or biological cell tissue. Despite this, it is very difficult to see through the shielding mask 10.11.

The present invention has been made with the above-mentioned considerations in mind, and its purpose is to easily confirm and move the position of the measurement site in the entire sample. The objective is to provide an observation method.

[Means to solve the problem]

In order to achieve the above object, the sample observation method in microscopic Fourier transform infrared spectroscopy according to the present invention includes a mask provided at the image point and configured to be movable with respect to the optical path. The combined image at the image point was monitored by a television camera in the state in which the mask was placed, the signal from the television camera was input to an image processing device, and the image processing device recorded only the area shielded from light by the mask as the first image. Thereafter, with the mask removed from the optical path, the combined image at the image point is monitored again by the TV camera, and the signal from the TV camera is input to the image processing device to produce a second image that is the same as the first image. The feature is that it can be observed as a composite image on the screen.

[Effect]

According to the above characteristic configuration, after recording the image of the part blocked by the mask as the first image, the entire image of the sample is recorded as the second image.
The first i as an image! Since it is synthesized and displayed on the same screen as the i-image, the positional relationship of the measurement target part in the entire sample becomes clear, and the measurement target part can be easily changed, making it a dramatic improvement compared to conventional methods. It is possible to shorten measurement time and improve measurement accuracy.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

1 to 3 show an example of a sample observation method in microscopic Fourier transform infrared spectroscopy according to the present invention,
In these figures, the same reference numerals as those shown in the fourth and fifth figures indicate the same or equivalent parts.

First, as shown in Figure 1, when observing a sample, the light source is 1°.
Mirror 12.13 and condenser mirror]
4 to the sample 2 placed on the sample stage 2°. Light such as fluorescence or phosphorescence excited by the light transmitted through the sample 02 or the irradiation light forms an image at an image point 4 via the objective mirror 3. At this image point 4, a shielding mask [0, ]], which blocks light from other than the measurement target area, is installed, for example, consisting of a rectangular slit with knife edges on each side and whose slit length can be changed arbitrarily. , so that only the light from the part to be measured in the sample 2 passes through the shielding masks 10 and II. Note that a circular pinhole or the like may be used as the shielding means.

Thereafter, the light passing through the image point 4 is monitored as a combined image at the image point 4 by the television camera 5, and the signal from the television camera 15 is input to the image processing device 16 and is blocked by the shielding mask Oll. Only the part that has been detected is recorded as the first image a, and displayed on the screen of the television monitor 17 (see FIG. 3).

Next, the shielding mask 10.11 is removed from the optical path so that the light from the entire sample 2 passes through the image point 4. The signal from the television camera 15 is input to the image processing device 16, and the second image is displayed as a composite image on the same screen as the first image a displayed on the west side of the television monitor 17. (See Figure C3).

Therefore, when observing this composite image, since the part other than the part shielded by the shielding mask 10.11 in the first image a is the opening for observing the measurement target part formed by the shielding mask 10.11, this opening and the entire image of sample 2 as the second image on the same screen.
The positional relationship between the measurement target parts in the sample 2 becomes clear, and by moving the sample 2, the measurement target parts can be easily changed.

After setting the measurement target site using the above method, in order to measure the spectral characteristics and intensity of the measurement target site using infrared light, as shown in the second example, the shielding mask 10. After returning to the position recorded as one image a, the mirror 12 is moved and the infrared light emitted from the light source 1 is passed through an interferometer 18 consisting of, for example, a three-beam interferometer, and energy intensity modulation is performed for each wavelength. hang, then mirror 19.20.13
The sample 2 is irradiated through the condenser mirror 14, and the transmitted light is imaged at the image point 4 through the objective mirror 3.

Since the sample 2 is set in advance at the image point 4 using visible light so as to transmit only the light beam from the region to be measured, infrared light from other than the region to be measured is blocked. Then, the mirror 21 is introduced into the optical path, and the infrared light from the measurement target site is introduced into the relay optical system 8. Since the infrared light is subjected to energy modulation with different frequencies for each wavelength by the interferometer 18, the infrared light from the measurement target site is directly detected by the detector 9, and a spectroscopic spectrum is obtained by frequency analysis.

In the above example, transmission type microscopic Fourier transform infrared spectroscopy was explained, but when measuring with reflection type,
As shown in FIG. 2, the mirror 19 may be moved in the direction of the arrow P, the sample 2 may be irradiated with light through the mirrors 22, 23, and 24, and the reflected light may be used to perform the same measurement.

〔Effect of the invention〕

As explained above, according to the present invention, after recording the image of the area covered by the mask as the first image, the entire image of the sample is combined as the second image on the same screen as the first image. This makes it clear the positional relationship of the parts to be measured in the entire sample, and the part to be measured can be easily changed, dramatically shortening measurement time and improving measurement accuracy compared to conventional methods. It became possible.

[Brief explanation of the drawing]

Figures 1 to 3 show one embodiment of the present invention, the first being an optical layout diagram for confirming the position of the measurement target part in a microscopic Fourier transform infrared spectrophotometer, and the second being an infrared light spectrometry diagram. FIG. 3 is an explanatory diagram of the operation for sample observation. 4 and 5 show conventional examples, FIG. 4 is a configuration diagram of a conventional microspectroscopic measurement device, and FIG. 5 is a plan view for explaining a method of shielding a non-measurement target region with a shielding mask. . 1, l゛ - light source, 2- sample, 4- image point, 10.11-
``Shielding mask, 15 television camera, 16-image processing bag W, a-first image, b-second M image. Applicant: Itaba Seisakusho Co., Ltd. Representative: Patent Attorney: Hideo Fujimoto Figure 4 Q171

Claims (1)

[Claims] In microscopic Fourier transform infrared spectroscopy, in which a sample is irradiated with light from a light source and the reflected or transmitted light from the sample is spectrally measured, the mask is provided at the image point and moved relative to the optical path. The combined image at the image point is monitored by a television camera with the mask provided in the optical path, the signal from the television camera is input to an image processing device, and the image processing device blocks light with a mask. After recording only the affected area as the first image,
With the mask removed from the optical path, the combined image at the image point is monitored again by the television camera, and the signal from the television camera is input to the image processing device to produce a second image on the same screen as the first image. A method for observing a sample in microscopic Fourier transform infrared spectroscopy, which is characterized in that it can be observed as a composite image.