JPS6264922A - Minute area light analyser - Google Patents
Minute area light analyserInfo
- Publication number
- JPS6264922A JPS6264922A JP20440185A JP20440185A JPS6264922A JP S6264922 A JPS6264922 A JP S6264922A JP 20440185 A JP20440185 A JP 20440185A JP 20440185 A JP20440185 A JP 20440185A JP S6264922 A JPS6264922 A JP S6264922A
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- slit
- concave mirror
- spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims abstract description 32
- 238000003384 imaging method Methods 0.000 claims abstract description 7
- 230000031700 light absorption Effects 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000004458 analytical method Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 230000004907 flux Effects 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract 1
- 230000004304 visual acuity Effects 0.000 abstract 1
- 230000004075 alteration Effects 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000004885 white matter Anatomy 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の技術分野〕 本発明は微小領域光線分析計に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a micro area optical spectrometer.
赤外線などの光吸収を利用し、半導体部品をはじめ、金
属材料やセラミックス材料あるいは有機材料など広範な
部品、および材料を分析する装置が開発されている。そ
れらは、いずれも反射鏡あるいはレンズによって絞り込
んだ一次線で被検物質表面を走査し、透過又は反射した
物質の吸収光を分光装置で分光分析する、いわゆる走査
型分析手法を採っている。その−例を第２図に示す。BACKGROUND ART Devices have been developed that utilize light absorption such as infrared rays to analyze a wide range of components and materials, including semiconductor components, metal materials, ceramic materials, and organic materials. All of these methods employ a so-called scanning analysis method in which the surface of a test substance is scanned with a primary line narrowed down by a reflecting mirror or lens, and the transmitted or reflected light absorbed by the substance is spectrally analyzed using a spectrometer. An example is shown in FIG.
この方法では、光源（１）から発せられた光を凹面鏡（
２）によって−次光線の光路を変え、被検物質（３）上
に集光する。透過又は反射した被検物質の吸収光を凹面
鏡（４）及び（５）により分光装置（６）に導き、分光
分析する。ここで、被検物質の分析する微小領域を変え
るには光源（１）又は凹面鏡（２）を駆動することによ
り、光源（１）から発せられた光を水平又は垂直方向に
走査すればよい。なお図中（７）は試料台を、（８）は
スリットをそれぞれ示す。In this method, light emitted from a light source (1) is converted into a concave mirror (
2) changes the optical path of the -order light beam and focuses it on the test substance (3). The transmitted or reflected absorbed light of the test substance is guided by concave mirrors (4) and (5) to a spectrometer (6) for spectroscopic analysis. Here, in order to change the microscopic region of the test substance to be analyzed, the light emitted from the light source (1) may be scanned in the horizontal or vertical direction by driving the light source (1) or the concave mirror (2). Note that (7) in the figure indicates a sample stage, and (8) indicates a slit.
しかしながら第２図の如き従来の分析計では、原理的あ
るいはハード機構上以下のような問題点がある。However, the conventional analyzer as shown in FIG. 2 has the following problems in terms of principle or hardware mechanism.
（１）−次光線を立体的な被検物質上に集光する際に、
非点収差あるいは色収差を生じやすく、このため光吸収
像の空間分解能が低下する。(1) When condensing a -dimensional light beam onto a three-dimensional test substance,
Astigmatism or chromatic aberration is likely to occur, which reduces the spatial resolution of the light absorption image.
（２）光吸収像を観察するには、光源、反射伊あるいは
試料を機械的に駆動しなければならず、全体像を瞬時に
観察できない。(2) To observe a light absorption image, the light source, reflector, or sample must be mechanically driven, and the entire image cannot be observed instantly.
１３）−次元線を集光する方式であるため、−次光線の
径を最小に保持する必要があり、分析領域が制限される
。13) Since it is a method of condensing -dimensional rays, it is necessary to keep the diameter of the -dimensional rays to a minimum, which limits the analysis area.
本発明は以上のような問題点を考慮し、なされｔもので
従来装置とは異なる原理を採用すること１てより、光吸
収像の全体像を瞬時に観察でき、しかも窩い空間分解能
を有する微小領域光線分析計を提供することを目的とす
る。The present invention has been devised in consideration of the above-mentioned problems, and employs a principle different from that of conventional devices.1 By this, the entire image of the light absorption image can be observed instantaneously, and moreover, it has a narrow spatial resolution. The purpose of this invention is to provide a micro-area optical spectrometer.
″に、源と、光源から発せられた光を平行光束に変碕る
第１の光学手段と、該平行光束が照射する被検物質を設
置した試料台と、被検物質の透過光を結像せしめる第２
の光学手段と、前記結像を映像化せしめ、かつ開閉自在
に設けられたスクリーン又は光検出器と、前記透過光か
らなる光吸収像の特定部を選択するためのスリットと、
前記スリットの透過光を分析する分光装置とを具備した
ことを特徴とする微小領域光線分析計である。'', a source, a first optical means for converting the light emitted from the light source into a parallel light beam, a sample stage on which a test substance to be irradiated with the parallel light flux is installed, and a sample stage that combines the transmitted light of the test substance. The second image
an optical means, a screen or a photodetector that visualizes the image and is provided so as to be freely openable and closable, and a slit for selecting a specific part of the light absorption image made of the transmitted light;
The present invention is a micro-area light ray analyzer characterized by comprising a spectroscopic device that analyzes the light transmitted through the slit.
また、本発明は前記光検出器として赤外線検出器を２次
元的に配電し、肢赤外線検出器で得た赤外線強度を映像
装置により赤外線吸収像として映像化することにより、
物質の全赤外線吸収像を把握し任意の微小部分を選択し
その部分の赤外線吸収分光分析を行ｉうことかできるも
のである。Further, the present invention provides two-dimensional power distribution of an infrared detector as the photodetector, and visualizes the infrared intensity obtained by the limb infrared detector as an infrared absorption image using a video device.
It is possible to grasp the total infrared absorption image of a substance, select any minute portion, and perform infrared absorption spectroscopic analysis of that portion.
すなわち１本発明に係る微小領域光線分析計は結像され
た被検物質の全党吸収像から被検物質の全体像を観察す
る事が容易となり、かつ任意の微小部分を選択しその部
分の光吸収分光分析を行なうことができるものである。In other words, the micro-area light beam spectrometer according to the present invention makes it easy to observe the entire image of the test substance from the formed all-party absorption image of the test substance, and also to select an arbitrary minute part and analyze that part. It is capable of performing optical absorption spectroscopic analysis.
本発明の実施例を第１図にて説明する。第１図は本発明
を実施する構成例でおる。第２図において、（１）は光
源であり、赤外線光源、白色光源等、寺に限定されるも
のではなく、目的に応じ適宜選択すればよい。（２）は
光源（１）から発せられた光を平吋束にかえて被検物質
（３）に照射する第１の光学手：ぐとしての凹面鏡であ
る。α１は平行光束の径をかえ。るスリットであり、こ
れにより試料台（７）に設置された被検物質（３）の分
析領域を任意にかえることヱ・；′ごきこのスリットは
必要に応じ適宜設ける事がて゛きる。被検物ｆｆ （３
）を透過した光は、第２の光学１１段としての凹面鏡（
４）及びスリット（８）により被検白質の透過光を結像
きせる事ができる。αυは、前；１１ Ａ通光からなる
光吸収像を拡大して映像化させ乙ためのスクリーン又は
イメージセンサ−などの光検出器であり、開閉自在に設
けられている。α２は結像した像を映写するＴＶ等の映
像装置であり、赤外線等の可視領域を越える光に対して
有効である。このスクリーン又は映像装置に現われた被
検物質の光吸収像の拡大像により、被検物質の形態又構
造等の全体的な観察ができる。０は前記スクリーン、光
検出器を開いた際に、光吸収像の特定部を選択透過きせ
るスリットであり、このスリット０３を通過した光は、
必要に応じ凹面鏡（５）を介して光吸収分析を行うため
の分光装置（６）に導かれる。An embodiment of the present invention will be explained with reference to FIG. FIG. 1 shows an example of a configuration for implementing the present invention. In FIG. 2, (1) is a light source, which may be an infrared light source, a white light source, etc., but is not limited to temples, and may be appropriately selected depending on the purpose. (2) is a concave mirror as a first optical device that converts the light emitted from the light source (1) into a flat beam and irradiates it onto the test substance (3). α1 changes the diameter of the parallel beam. This slit allows the analysis area of the test substance (3) placed on the sample stage (7) to be changed arbitrarily.' This slit can be provided as appropriate as required. Test object ff (3
), the light passes through the concave mirror (
4) and the slit (8), the transmitted light of the white matter to be examined can be imaged. αυ is a photodetector such as a screen or an image sensor for enlarging and visualizing the light absorption image formed by passing 11 A light, and is provided so as to be openable and closable. α2 is a video device such as a TV that projects a formed image, and is effective against light that exceeds the visible range, such as infrared rays. The enlarged light absorption image of the test substance appearing on this screen or imaging device allows the overall observation of the form, structure, etc. of the test substance. 0 is a slit that selectively transmits a specific part of the light absorption image when the screen or photodetector is opened, and the light passing through this slit 03 is
If necessary, it is guided to a spectroscopic device (6) for performing light absorption analysis via a concave mirror (5).
α着は分光装Ｒｔ６）及び試料駆動装置（１つと連結す
ることにより、特定波長の吸収像を映像させるためのＴ
Ｖ等の映像装置である０％定波長の吸収像は物質の組成
あるいは化学結合状態を表わすので、分析しようとする
物質の組成成分あるいは結合子の分布像を知ることがで
きる。By connecting with the spectroscope Rt6) and the sample drive device (one), the α
Since a 0% constant wavelength absorption image obtained by an imaging device such as V indicates the composition or chemical bonding state of a substance, it is possible to know the distribution image of the compositional components or bonds of the substance to be analyzed.
以下、上記構成からなる本発明実施例の動作について説
明する。The operation of the embodiment of the present invention having the above configuration will be described below.
光源（１）から発せられた光は第１の光学手段としての
凹面鏡（２）で反射され、平行光束となる。この平行光
束は必要に応じスリン）（１（ＩＫより径がかえられ、
被検物質（３）に照射される。被検物質（３）を透過し
た光は凹面鏡（４）で集光され、スリット（８）を通っ
てスクリーンαυに拡大されて結像される。スクリーン
０υ又は映像装置α２に現われだ物質の光吸収像の拡大
像により、物質の形態又は構造等の全体的な観察ができ
る。スクリーンαυは上下あるいは左右にスライド等の
開閉する構造とする。これによりスクリーンαυの直後
に置かれたスリット０上に透過光が結像する。スリット
０を通つ−た光は、凹面鏡（５）により分光装置（６）
のスリット上に結像し分光装置（６）により光吸収分析
される。凹面鏡（２）又は（４）あるいは試料駆動装置
αつの走査と分光装置（６）で分光された特定の波長の
光の強度測定値を同期させることにより、映像装置＊ａ
’ａで特定波長の吸収像を映像させることができる。さ
らに、凹面鏡（２）又は（４）あるいは被検物質（３）
を垂直・水平方向にずらすことによりスクリーン（１１
）上の吸収像の位置をかえ、被検物質の任意の微小部分
の光吸収分析をすることができる。スリットα口の口径
は任意に可変できる構造とし、スリット翰と併せて被検
物質の分析領域を任意にかえることができる。凹面鏡（
２） 、 （４） 、 ＋５＋を走査する方法としては
パルスモータが一般的であるが、電磁気を利用する方法
等も可能である。Light emitted from a light source (1) is reflected by a concave mirror (2) serving as a first optical means, and becomes a parallel beam of light. This parallel light beam can be changed in diameter from 1 (IK) as necessary.
The test substance (3) is irradiated. The light transmitted through the test substance (3) is collected by a concave mirror (4), passes through a slit (8), and is magnified and imaged onto a screen αυ. The enlarged light absorption image of the substance appearing on the screen 0υ or the imaging device α2 allows the overall observation of the form or structure of the substance. The screen αυ has a structure that can be opened and closed by sliding vertically or horizontally. As a result, the transmitted light forms an image on the slit 0 placed immediately after the screen αυ. The light passing through slit 0 is transferred to a spectrometer (6) by a concave mirror (5).
An image is formed on the slit of the light beam, and the light absorption is analyzed by a spectrometer (6). The imaging device*a
It is possible to image an absorption image of a specific wavelength using 'a'. Furthermore, concave mirror (2) or (4) or test substance (3)
By shifting the screen vertically and horizontally (11
) By changing the position of the absorption image above, it is possible to perform optical absorption analysis of any minute part of the test substance. The diameter of the slit α can be arbitrarily changed, and together with the slit holder, the analysis area of the test substance can be changed arbitrarily. concave mirror(
2), (4), +5+ Although a pulse motor is generally used as a method for scanning, a method using electromagnetism is also possible.
本発明に係る微小領域光線分析計は、原理・機能上下記
利点を有している。The micro area light spectrometer according to the present invention has the following advantages in terms of principle and function.
（１）被検物質上で結像する方式ではないので１色収差
等の収差が少なく空間分解能が向上する。(1) Since the method does not form an image on the test substance, there are few aberrations such as monochromatic aberration, and the spatial resolution is improved.
（２）光吸収像を瞬時に観察でき、被検物質の形態又は
構造の観察が極めて容易にできる。(2) A light absorption image can be observed instantaneously, and the morphology or structure of the test substance can be observed extremely easily.
３１１１図は本発明実施例の構成説明図、第２図は従来
例の構成説明図である。
１・・・光源、２，４．５・・・凹面鏡、３・・・被検
物質、１０．８．１３・・・スリット、６・・・分光装
置、７・・・試料台、１１・・・スクリーン、１２．１
３・・・映像装置。
代理人 弁理士 則 近 憲 梧
同 竹 花 喜久男
第１図
第２図FIG. 3111 is an explanatory diagram of the configuration of the embodiment of the present invention, and FIG. 2 is an explanatory diagram of the configuration of the conventional example. DESCRIPTION OF SYMBOLS 1... Light source, 2, 4.5... Concave mirror, 3... Test substance, 10.8.13... Slit, 6... Spectrometer, 7... Sample stand, 11... ...Screen, 12.1
3...Video device. Agent Patent Attorney Ken Nori Chika Kikuo Takehana Figure 1 Figure 2
Claims (2)
る第１の光学手段と、該平光束が照射する被検物質を設
置した試料台と、被検物質の透過光を結像せしめる第２
の光学手段と、前記結像を映像化せしめ、かつ開閉自在
に設けられたスクリーン又は光検出器と、前記透過光か
らなる光吸収像の特定部を選択するためのスリットと前
記スリットの透過光を分析する分光装置とを具備したこ
とを特徴とする微小領域光線分析計(1) A light source, a first optical means that converts the light emitted from the light source into a parallel beam of light, a sample stage on which a test substance to be irradiated with the flat light beam is installed, and the light transmitted through the test substance is formed into an image. Second
an optical means for visualizing the image, a screen or a photodetector provided to be openable and closable, a slit for selecting a specific portion of the light absorption image made of the transmitted light, and the transmitted light of the slit. A micro-area light beam analyzer characterized by comprising a spectrometer for analyzing
置し、該赤外線検出器で得た赤外線強度を映像装置によ
り赤外線吸収像として映像することを特徴とする特許請
求の範囲第１項記載の微小領域光線分析計(2) An infrared detector is arranged two-dimensionally as the photodetector, and the infrared intensity obtained by the infrared detector is imaged as an infrared absorption image by an imaging device. Micro area light spectrometer described
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20440185A JPS6264922A (en) | 1985-09-18 | 1985-09-18 | Minute area light analyser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20440185A JPS6264922A (en) | 1985-09-18 | 1985-09-18 | Minute area light analyser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6264922A true JPS6264922A (en) | 1987-03-24 |
Family
ID=16489933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20440185A Pending JPS6264922A (en) | 1985-09-18 | 1985-09-18 | Minute area light analyser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6264922A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02226027A (en) * | 1989-02-27 | 1990-09-07 | Hamamatsu Photonics Kk | Spectroscopic analyser |
| JPH02226028A (en) * | 1989-02-27 | 1990-09-07 | Hamamatsu Photonics Kk | Spectroscopic operation apparatus |
-
1985
- 1985-09-18 JP JP20440185A patent/JPS6264922A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02226027A (en) * | 1989-02-27 | 1990-09-07 | Hamamatsu Photonics Kk | Spectroscopic analyser |
| JPH02226028A (en) * | 1989-02-27 | 1990-09-07 | Hamamatsu Photonics Kk | Spectroscopic operation apparatus |
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