JPS6373364U - - Google Patents
Info
- Publication number
- JPS6373364U JPS6373364U JP16725586U JP16725586U JPS6373364U JP S6373364 U JPS6373364 U JP S6373364U JP 16725586 U JP16725586 U JP 16725586U JP 16725586 U JP16725586 U JP 16725586U JP S6373364 U JPS6373364 U JP S6373364U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- treatment tank
- pump
- overflow
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図はこの考案の一実施例の薬液処理装置の
概略構成図である。第２図は従来の薬液処理装置
の概略構成図である。
１０…処理槽、１１…オーバーフロー槽、１２
…薬液、１３…主配管、１４…ポンプ、１５…フ
イルタ、１６…補助配管。
FIG. 1 is a schematic diagram of a chemical liquid processing apparatus according to an embodiment of this invention. FIG. 2 is a schematic configuration diagram of a conventional chemical liquid processing apparatus. 10...processing tank, 11...overflow tank, 12
...Medical solution, 13...Main piping, 14...Pump, 15...Filter, 16...Auxiliary piping.
Claims (1)
容された薬液と、オーバーフロー槽からポンプお
よびフイルタを介して処理槽の底部中央に接続さ
れた配管とを備えてなる薬液処理装置において、 前記処理槽の底部隅部とポンプの入力側との間
に補助配管を設けたことを特徴とする薬液処理装
置。[Scope of Claim for Utility Model Registration] Comprised of a treatment tank, an overflow tank, a chemical solution contained in the treatment tank, and piping connected from the overflow tank to the center of the bottom of the treatment tank via a pump and a filter. A chemical liquid processing apparatus, characterized in that an auxiliary pipe is provided between a bottom corner of the processing tank and an input side of a pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (en) | 1986-10-30 | 1986-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (en) | 1986-10-30 | 1986-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373364U true JPS6373364U (en) | 1988-05-16 |
| JPH0354138Y2 JPH0354138Y2 (en) | 1991-11-28 |
Family
ID=31099016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16725586U Expired JPH0354138Y2 (en) | 1986-10-30 | 1986-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354138Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276229A (en) * | 1988-09-12 | 1990-03-15 | Nec Corp | Device for manufacturing semiconductor device |
| JPH05121392A (en) * | 1991-10-28 | 1993-05-18 | Sharp Corp | Treating tank for etching and the like |
-
1986
- 1986-10-30 JP JP16725586U patent/JPH0354138Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276229A (en) * | 1988-09-12 | 1990-03-15 | Nec Corp | Device for manufacturing semiconductor device |
| JPH05121392A (en) * | 1991-10-28 | 1993-05-18 | Sharp Corp | Treating tank for etching and the like |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0354138Y2 (en) | 1991-11-28 |
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