JPH03119420U - - Google Patents
Info
- Publication number
- JPH03119420U JPH03119420U JP2693290U JP2693290U JPH03119420U JP H03119420 U JPH03119420 U JP H03119420U JP 2693290 U JP2693290 U JP 2693290U JP 2693290 U JP2693290 U JP 2693290U JP H03119420 U JPH03119420 U JP H03119420U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- chemical solution
- processing tank
- main filter
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 238000011045 prefiltration Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Description
第１図は、実施例の構成図、第２図は、従来例
の構成図である。
１……薬液循環ろ過装置、２……処理槽、４…
…プレフイルタ、５……ポンプ、６……メインフ
イルタ、２１，２２，２３，２４……配管、４０
……薬液。
FIG. 1 is a block diagram of an embodiment, and FIG. 2 is a block diagram of a conventional example. 1... Chemical solution circulation filtration device, 2... Processing tank, 4...
... Prefilter, 5 ... Pump, 6 ... Main filter, 21, 22, 23, 24 ... Piping, 40
...Medicinal liquid.
Claims (1)
るための処理槽と、 薬液をろ過するためのプレフイルタと、 薬液をさらにろ過するためのメインフイルタと
、 前記処理槽と前記プレフイルタと前記メインフ
イルタと前記処理槽とを順に連通した配管と、 前記配管において前記プレフイルタと前記メイ
ンフイルタとの間に設けられたポンプとにより構
成され、 前記プレフイルタのポアサイズは、前記メイン
フイルタのポアサイズより大きいことを特徴とす
る薬液循環ろ過装置。[Scope of Claim for Utility Model Registration] A processing tank for storing a chemical solution and treating an object to be treated with the chemical solution, a pre-filter for filtering the chemical solution, a main filter for further filtering the chemical solution, and the processing tank. It is composed of a pipe that sequentially communicates the pre-filter, the main filter, and the processing tank, and a pump provided between the pre-filter and the main filter in the pipe, and the pore size of the pre-filter is equal to that of the main filter. A chemical liquid circulation filtration device characterized by being larger than the pore size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2693290U JPH03119420U (en) | 1990-03-16 | 1990-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2693290U JPH03119420U (en) | 1990-03-16 | 1990-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03119420U true JPH03119420U (en) | 1991-12-10 |
Family
ID=31529808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2693290U Pending JPH03119420U (en) | 1990-03-16 | 1990-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03119420U (en) |
-
1990
- 1990-03-16 JP JP2693290U patent/JPH03119420U/ja active Pending