JPS6373354U - - Google Patents

Info

Publication number
JPS6373354U
JPS6373354U JP16850486U JP16850486U JPS6373354U JP S6373354 U JPS6373354 U JP S6373354U JP 16850486 U JP16850486 U JP 16850486U JP 16850486 U JP16850486 U JP 16850486U JP S6373354 U JPS6373354 U JP S6373354U
Authority
JP
Japan
Prior art keywords
vacuum chamber
evaporation source
bias voltage
ion plating
source crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16850486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16850486U priority Critical patent/JPS6373354U/ja
Publication of JPS6373354U publication Critical patent/JPS6373354U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16850486U 1986-11-01 1986-11-01 Pending JPS6373354U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16850486U JPS6373354U (enrdf_load_stackoverflow) 1986-11-01 1986-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16850486U JPS6373354U (enrdf_load_stackoverflow) 1986-11-01 1986-11-01

Publications (1)

Publication Number Publication Date
JPS6373354U true JPS6373354U (enrdf_load_stackoverflow) 1988-05-16

Family

ID=31101436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16850486U Pending JPS6373354U (enrdf_load_stackoverflow) 1986-11-01 1986-11-01

Country Status (1)

Country Link
JP (1) JPS6373354U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161066A (en) * 1979-05-31 1980-12-15 Sumitomo Electric Ind Ltd Formation of covering film by ion plating
JPS5652860A (en) * 1979-10-01 1981-05-12 Mitsubishi Electric Corp Ion injection device
JPS60211066A (ja) * 1984-04-06 1985-10-23 Mitsubishi Electric Corp テ−プ蒸着装置
JPS616271A (ja) * 1984-06-20 1986-01-11 Shinku Kikai Kogyo Kk バイアスイオンプレ−テイング方法および装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161066A (en) * 1979-05-31 1980-12-15 Sumitomo Electric Ind Ltd Formation of covering film by ion plating
JPS5652860A (en) * 1979-10-01 1981-05-12 Mitsubishi Electric Corp Ion injection device
JPS60211066A (ja) * 1984-04-06 1985-10-23 Mitsubishi Electric Corp テ−プ蒸着装置
JPS616271A (ja) * 1984-06-20 1986-01-11 Shinku Kikai Kogyo Kk バイアスイオンプレ−テイング方法および装置

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