JPS637324B2 - - Google Patents
Info
- Publication number
- JPS637324B2 JPS637324B2 JP7983480A JP7983480A JPS637324B2 JP S637324 B2 JPS637324 B2 JP S637324B2 JP 7983480 A JP7983480 A JP 7983480A JP 7983480 A JP7983480 A JP 7983480A JP S637324 B2 JPS637324 B2 JP S637324B2
- Authority
- JP
- Japan
- Prior art keywords
- boundary
- count value
- detection
- array
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 70
- 230000007547 defect Effects 0.000 claims description 32
- 238000007689 inspection Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 5
- 238000007789 sealing Methods 0.000 description 14
- 230000002950 deficient Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7983480A JPS576306A (en) | 1980-06-13 | 1980-06-13 | Method and apparatus for inspection of edge boundary part of circular member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7983480A JPS576306A (en) | 1980-06-13 | 1980-06-13 | Method and apparatus for inspection of edge boundary part of circular member |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS576306A JPS576306A (en) | 1982-01-13 |
JPS637324B2 true JPS637324B2 (enrdf_load_stackoverflow) | 1988-02-16 |
Family
ID=13701233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7983480A Granted JPS576306A (en) | 1980-06-13 | 1980-06-13 | Method and apparatus for inspection of edge boundary part of circular member |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS576306A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0370570B1 (en) * | 1988-11-21 | 1993-08-11 | Heuft-Qualiplus B.V. | A method and an apparatus for inspecting the edge of a lid |
-
1980
- 1980-06-13 JP JP7983480A patent/JPS576306A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS576306A (en) | 1982-01-13 |
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