JPS637324B2 - - Google Patents

Info

Publication number
JPS637324B2
JPS637324B2 JP7983480A JP7983480A JPS637324B2 JP S637324 B2 JPS637324 B2 JP S637324B2 JP 7983480 A JP7983480 A JP 7983480A JP 7983480 A JP7983480 A JP 7983480A JP S637324 B2 JPS637324 B2 JP S637324B2
Authority
JP
Japan
Prior art keywords
boundary
count value
detection
array
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7983480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS576306A (en
Inventor
Hiroshi Ito
Mitsuru Ezaki
Akira Kuno
Kanji Kito
Morihiro Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP7983480A priority Critical patent/JPS576306A/ja
Publication of JPS576306A publication Critical patent/JPS576306A/ja
Publication of JPS637324B2 publication Critical patent/JPS637324B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP7983480A 1980-06-13 1980-06-13 Method and apparatus for inspection of edge boundary part of circular member Granted JPS576306A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7983480A JPS576306A (en) 1980-06-13 1980-06-13 Method and apparatus for inspection of edge boundary part of circular member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7983480A JPS576306A (en) 1980-06-13 1980-06-13 Method and apparatus for inspection of edge boundary part of circular member

Publications (2)

Publication Number Publication Date
JPS576306A JPS576306A (en) 1982-01-13
JPS637324B2 true JPS637324B2 (enrdf_load_stackoverflow) 1988-02-16

Family

ID=13701233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7983480A Granted JPS576306A (en) 1980-06-13 1980-06-13 Method and apparatus for inspection of edge boundary part of circular member

Country Status (1)

Country Link
JP (1) JPS576306A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0370570B1 (en) * 1988-11-21 1993-08-11 Heuft-Qualiplus B.V. A method and an apparatus for inspecting the edge of a lid

Also Published As

Publication number Publication date
JPS576306A (en) 1982-01-13

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