JPS6371824A - Pulse width expanding device provided with pulse delaying mechanism using optical glass with high refraction factor applied to pulsed laser beam - Google Patents
Pulse width expanding device provided with pulse delaying mechanism using optical glass with high refraction factor applied to pulsed laser beamInfo
- Publication number
- JPS6371824A JPS6371824A JP21770586A JP21770586A JPS6371824A JP S6371824 A JPS6371824 A JP S6371824A JP 21770586 A JP21770586 A JP 21770586A JP 21770586 A JP21770586 A JP 21770586A JP S6371824 A JPS6371824 A JP S6371824A
- Authority
- JP
- Japan
- Prior art keywords
- pulse
- pulse width
- optical glass
- high refraction
- refraction factor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 10
- 239000005304 optical glass Substances 0.000 title claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 239000005308 flint glass Substances 0.000 claims 1
- 238000005215 recombination Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、屈折率が高（、比重の小さい光学ガラスを使
用した、小型、軽量なパルス遅延８！構を有するパルス
幅拡大装置に関するものである。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a compact and lightweight pulse width expansion device having a pulse delay 8! structure using optical glass with a high refractive index (and low specific gravity). It is.
（発明が解決しようとする問題点）
これまでパルスレーザ−のパルス幅を広げるためには、
複数のビームスプリッタ−と複数の再結合ミラーより構
成されるいわゆる多重ビームスプリッタ−が使用されて
きた。この方法は、本発明と同様に分割したパルスを光
路長を利用して遅延させこれを再度結合するとによりパ
ルス幅を広げることを目的としたものである。しかしこ
れまでの方法は、空気中でパルスの遅延を行うため元の
パルス幅より広いパルスを作るためには、非常に艮い光
路長を使用するか、あるいは複数回パルスを分割して再
度結合することが必要となる。この結果、遅延８！構そ
のものが大型化するとともに、多数回のビームの結合に
より最終的なパルス強度が大幅に低下する。(Problem to be solved by the invention) Until now, in order to widen the pulse width of a pulsed laser,
So-called multiple beam splitters consisting of multiple beam splitters and multiple recombination mirrors have been used. Similar to the present invention, this method aims to widen the pulse width by delaying the divided pulses using the optical path length and recombining them. However, in order to delay the pulse in air, conventional methods either use a very long optical path length or split the pulse multiple times and recombine it to create a pulse wider than the original pulse width. It is necessary to do so. As a result, the delay is 8! As the structure itself increases in size, the final pulse intensity decreases significantly due to multiple beam combinations.
（問題点を解決するための手段）
詳細に述べると、本発明はビームスプリッタ−で分割し
たパルスレーザ−尤の一方の光を屈折率が高く光吸収率
の低い光学ガラス中で多重反射させることにより、他方
に比べて時間的な差をつけ、これを再度結合することに
よりパルス幅の広いパルスレーザ−光を作ることを目的
としたものである。ビームスプリッタ−の分割比を調整
し、複数のパルス遅延機構を使用することにより、より
パルス幅の広いレーザーパルスを作ることが可能である
。(Means for Solving the Problems) Specifically, the present invention involves multiple reflection of one of the pulsed laser beams split by a beam splitter in an optical glass having a high refractive index and low light absorption. The purpose of this is to create a pulsed laser beam with a wide pulse width by creating a time difference compared to the other and recombining them. By adjusting the splitting ratio of the beam splitter and using multiple pulse delay mechanisms, it is possible to create a laser pulse with a wider pulse width.
（発明の効果）
本発明では、高い屈折率の光学がラスをパルスの伝播媒
質として使用するため、実行光路長は最大空気の約２倍
となり、装置の小型化が計られる。(Effects of the Invention) In the present invention, since high refractive index optics use a lath as a pulse propagation medium, the maximum effective optical path length is approximately twice that of air, and the apparatus can be miniaturized.
また光学ガラスの中で多重反射を行うために遅延８！構
は極めて小型化される。さらに、比重の小さい光学ガラ
スを使用するために遅延機構の軽量化が什われる。Also, there is a delay of 8! due to multiple reflections inside the optical glass! The structure is extremely compact. Furthermore, the weight of the delay mechanism can be reduced by using optical glass with low specific gravity.
（実施例）
本発明の一つの実施例を図に示す。ｍ１図は本発明を実
施する遅延８！構の一例を示す概念図である０図で、（
１）はビーム分割用ミラー、（２）は高屈ｔｌ？率ガツ
ガラス用する光学的遅延機構、（３）は再結合用ミラー
である。(Example) One example of the present invention is shown in the figure. The m1 diagram shows the delay 8! for implementing the present invention! In Figure 0, which is a conceptual diagram showing an example of the structure, (
1) is a beam splitting mirror, (2) is a high refraction TL? (3) is a recombination mirror.
（１）によって分割されたレーザーパルスの一方は、そ
のまま直進し再結合ミラーに達する。分割されたもう一
方のレーザーパルスは、遅延を行うための高屈折率プラ
スに比べて再結合ミラーに達する時間が遅れる。この２
つのパルスは（３）によって１個のパルスとなるが、そ
のパルス幅は遅延時にの応じて元のパルス幅より広くな
り、最大元のパルス幅の２ぽいのレーザーパルスが得ら
れる。One of the laser pulses divided by (1) continues straight and reaches the recombination mirror. The other split laser pulse is delayed in reaching the recombination mirror compared to the high refractive index plus for delay. This 2
The two pulses become one pulse according to (3), but the pulse width becomes wider than the original pulse width depending on the delay time, and a laser pulse that is at most two times the original pulse width is obtained.
第２図に遅延時間とパルス幅の関係を示した。Figure 2 shows the relationship between delay time and pulse width.
元のパルス幅の２倍以上のパルス幅が必要な場合には、
ビーム分割用ミラー、遅延機構及び再結合ミラーを付加
することにより達成が可能である。If you need a pulse width that is more than twice the original pulse width,
This can be achieved by adding a beam splitting mirror, a delay mechanism, and a recombination mirror.
第２図に４個の遅延ｇ構によって作られるパルス幅とレ
ーザー強度の関係を示した。Figure 2 shows the relationship between the pulse width produced by the four delay g structures and the laser intensity.
第１図はパルス幅拡大装置の概念図である。
（１）はビーム分割用ミラー、（２）は高屈折率ガラス
を使用する光学的遅ｌｃ代構、（３）は再結合用ミラー
である。
第２図は４個の遅ｆｆ１ｆｉ構によって作られるパルス
幅とレーザー光強度の関係を示したものである。
（外５名）
Ｌ／凹 λ２図
ムFIG. 1 is a conceptual diagram of a pulse width expansion device. (1) is a beam splitting mirror, (2) is an optical slow LC alternative using high refractive index glass, and (3) is a recombination mirror. FIG. 2 shows the relationship between the pulse width produced by the four slow ff1fi structures and the laser light intensity. (5 other people) L/concave λ2 figure
Claims (1)
を有することを特徴とするパルス幅拡大装置。 ２、実行光路長を高屈折率ガラスを使用して幾何学長よ
り延ばすことを利用するパルス遅延機構を有することを
特徴とする特許請求の範囲１項記載の装置。 ３、光学ガラス内部での多重反射を利用して光路長を延
ばすことを利用することを特徴とするパルス遅延機構を
有する特許請求の範囲第１項記載の装置。 ４、光学ガラスに比重の小さい重フリントガラスを使用
することを特徴とするパルス遅延機構を有する特許請求
の範囲第１項、第２項または第３項記載の装置。[Claims] 1. A pulse width expansion device characterized by having a pulse delay mechanism using optical glass with a high refractive index. 2. The apparatus according to claim 1, further comprising a pulse delay mechanism that utilizes extending the effective optical path length from the geometrical length using high refractive index glass. 3. The apparatus according to claim 1, which has a pulse delay mechanism that utilizes multiple reflections within an optical glass to extend the optical path length. 4. The device according to claim 1, 2 or 3, having a pulse delay mechanism characterized in that heavy flint glass with low specific gravity is used as the optical glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21770586A JPS6371824A (en) | 1986-09-16 | 1986-09-16 | Pulse width expanding device provided with pulse delaying mechanism using optical glass with high refraction factor applied to pulsed laser beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21770586A JPS6371824A (en) | 1986-09-16 | 1986-09-16 | Pulse width expanding device provided with pulse delaying mechanism using optical glass with high refraction factor applied to pulsed laser beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6371824A true JPS6371824A (en) | 1988-04-01 |
Family
ID=16708443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21770586A Pending JPS6371824A (en) | 1986-09-16 | 1986-09-16 | Pulse width expanding device provided with pulse delaying mechanism using optical glass with high refraction factor applied to pulsed laser beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6371824A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234819A (en) * | 1988-03-16 | 1989-09-20 | Fujitsu Ltd | Light delay generator |
| JPH0651238A (en) * | 1991-09-30 | 1994-02-25 | Semiconductor Energy Lab Co Ltd | Laser |
| JP2005148550A (en) * | 2003-11-18 | 2005-06-09 | Gigaphoton Inc | Optical pulse expander and discharge exciting gas laser device for exposure |
| CN106936062A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of pulse broadening device, pulse stretching laser anneal device and method for annealing |
-
1986
- 1986-09-16 JP JP21770586A patent/JPS6371824A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234819A (en) * | 1988-03-16 | 1989-09-20 | Fujitsu Ltd | Light delay generator |
| JPH0651238A (en) * | 1991-09-30 | 1994-02-25 | Semiconductor Energy Lab Co Ltd | Laser |
| JP2005148550A (en) * | 2003-11-18 | 2005-06-09 | Gigaphoton Inc | Optical pulse expander and discharge exciting gas laser device for exposure |
| CN106936062A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of pulse broadening device, pulse stretching laser anneal device and method for annealing |
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