JPS6371141U - - Google Patents

Info

Publication number
JPS6371141U
JPS6371141U JP16390286U JP16390286U JPS6371141U JP S6371141 U JPS6371141 U JP S6371141U JP 16390286 U JP16390286 U JP 16390286U JP 16390286 U JP16390286 U JP 16390286U JP S6371141 U JPS6371141 U JP S6371141U
Authority
JP
Japan
Prior art keywords
suction
vacuum path
path
vacuum
suction collet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16390286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16390286U priority Critical patent/JPS6371141U/ja
Publication of JPS6371141U publication Critical patent/JPS6371141U/ja
Pending legal-status Critical Current

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Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP16390286U 1986-10-24 1986-10-24 Pending JPS6371141U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16390286U JPS6371141U (enrdf_load_stackoverflow) 1986-10-24 1986-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16390286U JPS6371141U (enrdf_load_stackoverflow) 1986-10-24 1986-10-24

Publications (1)

Publication Number Publication Date
JPS6371141U true JPS6371141U (enrdf_load_stackoverflow) 1988-05-13

Family

ID=31092531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16390286U Pending JPS6371141U (enrdf_load_stackoverflow) 1986-10-24 1986-10-24

Country Status (1)

Country Link
JP (1) JPS6371141U (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185387A (ja) * 1989-01-11 1990-07-19 Aloka Co Ltd ビーズ移送装置
JPH10305937A (ja) * 1997-05-02 1998-11-17 Sharp Corp エアー給紙装置
JP2007030139A (ja) * 2005-07-29 2007-02-08 Seiko Instruments Inc 真空チャック
JP2010146927A (ja) * 2008-12-22 2010-07-01 Hitachi High-Technologies Corp 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡
JP2014136263A (ja) * 2013-01-15 2014-07-28 Sinfonia Technology Co Ltd 吸着装置及びこれを備えた搬送装置
JP5610658B1 (ja) * 2014-03-31 2014-10-22 アキム株式会社 ノズル構造及び吸着方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185387A (ja) * 1989-01-11 1990-07-19 Aloka Co Ltd ビーズ移送装置
JPH10305937A (ja) * 1997-05-02 1998-11-17 Sharp Corp エアー給紙装置
JP2007030139A (ja) * 2005-07-29 2007-02-08 Seiko Instruments Inc 真空チャック
JP2010146927A (ja) * 2008-12-22 2010-07-01 Hitachi High-Technologies Corp 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡
JP2014136263A (ja) * 2013-01-15 2014-07-28 Sinfonia Technology Co Ltd 吸着装置及びこれを備えた搬送装置
JP5610658B1 (ja) * 2014-03-31 2014-10-22 アキム株式会社 ノズル構造及び吸着方法

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