JPS6370144U - - Google Patents
Info
- Publication number
- JPS6370144U JPS6370144U JP16437886U JP16437886U JPS6370144U JP S6370144 U JPS6370144 U JP S6370144U JP 16437886 U JP16437886 U JP 16437886U JP 16437886 U JP16437886 U JP 16437886U JP S6370144 U JPS6370144 U JP S6370144U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- suctioning
- surround
- wall surface
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16437886U JPH039328Y2 (ko) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16437886U JPH039328Y2 (ko) | 1986-10-27 | 1986-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370144U true JPS6370144U (ko) | 1988-05-11 |
| JPH039328Y2 JPH039328Y2 (ko) | 1991-03-08 |
Family
ID=31093445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16437886U Expired JPH039328Y2 (ko) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039328Y2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278551A (ja) * | 1988-09-16 | 1990-03-19 | Dainippon Printing Co Ltd | 印刷機部品用洗浄装置 |
| JPH11102884A (ja) * | 1997-09-29 | 1999-04-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置および周辺部材の洗浄方法 |
-
1986
- 1986-10-27 JP JP16437886U patent/JPH039328Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278551A (ja) * | 1988-09-16 | 1990-03-19 | Dainippon Printing Co Ltd | 印刷機部品用洗浄装置 |
| JPH11102884A (ja) * | 1997-09-29 | 1999-04-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置および周辺部材の洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039328Y2 (ko) | 1991-03-08 |