JPS6370143U - - Google Patents
Info
- Publication number
- JPS6370143U JPS6370143U JP16517286U JP16517286U JPS6370143U JP S6370143 U JPS6370143 U JP S6370143U JP 16517286 U JP16517286 U JP 16517286U JP 16517286 U JP16517286 U JP 16517286U JP S6370143 U JPS6370143 U JP S6370143U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- inner tube
- semiconductor wafers
- gas
- outer tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16517286U JPS6370143U (fr) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16517286U JPS6370143U (fr) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370143U true JPS6370143U (fr) | 1988-05-11 |
Family
ID=31094962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16517286U Pending JPS6370143U (fr) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370143U (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551130A (en) * | 1978-06-19 | 1980-01-07 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Furnace core pipe for manufacturing semiconductor |
| JPS58154227A (ja) * | 1982-03-09 | 1983-09-13 | Matsushita Electronics Corp | 半導体基板の拡散処理方法 |
-
1986
- 1986-10-27 JP JP16517286U patent/JPS6370143U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551130A (en) * | 1978-06-19 | 1980-01-07 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Furnace core pipe for manufacturing semiconductor |
| JPS58154227A (ja) * | 1982-03-09 | 1983-09-13 | Matsushita Electronics Corp | 半導体基板の拡散処理方法 |