JPS6365252U - - Google Patents

Info

Publication number
JPS6365252U
JPS6365252U JP16096786U JP16096786U JPS6365252U JP S6365252 U JPS6365252 U JP S6365252U JP 16096786 U JP16096786 U JP 16096786U JP 16096786 U JP16096786 U JP 16096786U JP S6365252 U JPS6365252 U JP S6365252U
Authority
JP
Japan
Prior art keywords
filter
side wall
chamber
chamber side
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16096786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546283Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986160967U priority Critical patent/JPH0546283Y2/ja
Publication of JPS6365252U publication Critical patent/JPS6365252U/ja
Application granted granted Critical
Publication of JPH0546283Y2 publication Critical patent/JPH0546283Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP1986160967U 1986-10-20 1986-10-20 Expired - Lifetime JPH0546283Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986160967U JPH0546283Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986160967U JPH0546283Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Publications (2)

Publication Number Publication Date
JPS6365252U true JPS6365252U (enrdf_load_stackoverflow) 1988-04-30
JPH0546283Y2 JPH0546283Y2 (enrdf_load_stackoverflow) 1993-12-03

Family

ID=31086849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986160967U Expired - Lifetime JPH0546283Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPH0546283Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109477A (en) * 1977-03-07 1978-09-25 Toshiba Corp Mounting method of semiconductor element
JPS56162644U (enrdf_load_stackoverflow) * 1980-04-30 1981-12-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109477A (en) * 1977-03-07 1978-09-25 Toshiba Corp Mounting method of semiconductor element
JPS56162644U (enrdf_load_stackoverflow) * 1980-04-30 1981-12-03

Also Published As

Publication number Publication date
JPH0546283Y2 (enrdf_load_stackoverflow) 1993-12-03

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