JPS6365083A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6365083A
JPS6365083A JP20691386A JP20691386A JPS6365083A JP S6365083 A JPS6365083 A JP S6365083A JP 20691386 A JP20691386 A JP 20691386A JP 20691386 A JP20691386 A JP 20691386A JP S6365083 A JPS6365083 A JP S6365083A
Authority
JP
Japan
Prior art keywords
substrate
inert gas
susceptor
heater
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20691386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210864B2 (enExample
Inventor
Takayuki Oba
隆之 大場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP20691386A priority Critical patent/JPS6365083A/ja
Publication of JPS6365083A publication Critical patent/JPS6365083A/ja
Publication of JPH0210864B2 publication Critical patent/JPH0210864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP20691386A 1986-09-04 1986-09-04 気相成長装置 Granted JPS6365083A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20691386A JPS6365083A (ja) 1986-09-04 1986-09-04 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20691386A JPS6365083A (ja) 1986-09-04 1986-09-04 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6365083A true JPS6365083A (ja) 1988-03-23
JPH0210864B2 JPH0210864B2 (enExample) 1990-03-09

Family

ID=16531153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20691386A Granted JPS6365083A (ja) 1986-09-04 1986-09-04 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6365083A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382035A (ja) * 1989-08-24 1991-04-08 Nec Corp ウェハー加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382035A (ja) * 1989-08-24 1991-04-08 Nec Corp ウェハー加熱装置

Also Published As

Publication number Publication date
JPH0210864B2 (enExample) 1990-03-09

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