JPS6362665A - Precise finishing method with grinding wheel overlapped with supersonic and low frequency vibration - Google Patents

Abstract

PURPOSE:To reduce the grinding force remarkably, by rotating a grinding wheel while vibrating axially and radially with supersonic frequency then rotating or linearly moving a work while advancing/retreating in the cutting direction of the grinding wheel and bringing it into intermittent contact with said grinding wheel. CONSTITUTION:A grinding wheel 15 is vibrated with supersonic frequency (f) and amplitude (as) in the direction of its rotary spindle or an arrow direction 14. Consequently, respective abrasive grain groups move in zigzag at grinding points on a grinding area 17 and abrade each other so as to cut the chips finely. As a result, a pulsating grinding waveform 16 can be produced. Then a table is fed with speed (v)<22piAF and the pulsating grinding force is applied intermittently. Alternatively, a stepping motor is employed and applied with three pulse advance PF, one pulse pause PR, two pulse back PB and one pulse pause PR2, for example, so as to move the table linearly while vibrating thus carrying out grinding work with intermittent grinding force waveform.

Description

[Detailed Description of the Invention] (Field of Industrial Application) The present invention can easily grind rubber, ceramics, etc. that are difficult to grind with conventional grinding methods.
Low frequency vibrations such as ultrasonic vibrations were generated by
CJ 3゜ related to method 1 for precision addition using a whirlpool (prior technology) For precision addition using cutting and grinding tools, the force applied to the workpiece is slightly reduced by −Cb + ¥ 1J method, − ). For example, a milling cutter with the right limit number of blades J for every 10 rotations of a disk rotates at a high speed of 31! '(V) Cutting force is reduced by scraping. A grinding wheel with countless abrasive grains distributed in one rotation circle & 1- is rotated at high speed! By grinding with abrasive grains, the depth of cut per blade is 7 mm.

becomes even smaller, and the force applied to the workpiece is drastically reduced, allowing for dense machining. On the other hand, due to high-speed grinding of about 2000.../' old n, a large amount of grinding is required to reduce the grinding speed of one crop (one grain to seven cold grinders).
J The average IJI cutting temperature is so disgusting that it's 1-¥? This is already well known. Not only is this remarkable heat generation phenomenon caused by the high-speed rotation of the grinding wheel, but the effect of drastically reducing the force acting on a single crop is enormous. The conventional workpiece (Ar1), even if it is mainly made of gold 114, has a heat transfer efficiency of ``,-) (precision fi
It was possible to cut down to 11. .

(Problem that would be solved by invention +, ', t) However,
C and precision machining J today! Theory: Regardless of the presence or absence of technology, new wood products have been developed, including many new materials with poor heat transfer efficiency, such as FRP and ceramics. Therefore, extremely high machining accuracy is required for these processes.1 In order to meet the expectations for precision in these areas, it is necessary to further reduce the grinding force by reducing the average grinding temperature. I need a method Ll”’!A
There was a problem that the precision 6Jl cutting method, which is common for hard and brittle materials, is difficult for soft and b-like materials, metals, and ceramics.

(Means for Solving the Problems) The present invention aims to reduce the average grinding temperature and reduce the grinding force by J, so that it can be processed with the same precision for any material. The purpose of grinding is to make a chord in the axial and/or radial direction of the grinding wheel! FJJ 3
The crop is rotated at 0-, and the grain is moved forward and backward in the cutting direction of the grinding wheel, and the air is rotated or moved in a straight line, and the crop is brought into contact with the calm 11 intermittently through the intermittent pulsed grinding force waveform. (−
(Example) Figure 1 shows the difference between the conventional grinding method and the grinding process. ω[Shows the stiffness waveform. Grinding method [αV in the direction of arrow 3) l! l'
4 Place the rotary grinding wheel 1 on the rotary shaft 2 and make a cut (Give C grinding J grinding wheel 1) The area of the grain is indicated by diagonal lines Ar5
Cutting to C3. Since the abrasive grains are rotating at high speed, ω(
The depth of cut in T+ is only 1 abrasive.
The cuts 2c of J and l become extremely small. This (\'s tσ [rigid force waveform is 111 (the grain's i'i, the speed rotation of the grain and the abrasive grain's bullet/Vl vibration) changes to ☆ in the circumference 1υJ by knowing the interval on the cylindrical surface. 3. Expressing this as a del, the vertical force N of the sea urchin 1 - component force 1 shown in the figure is expressed as the vertical force of 1 crop. Assuming that the spring constant in the direction is Y and the angular fixed frequency is W, it is common to have the relationship η-11JI for u, <<m, so the relationship IJ for the force r-ib'+Iα is The bullet l!1 displacement/UX of the workpiece in the direction of the back force of the workpiece becomes C-.In order to improve the machining accuracy, it is necessary to reduce the displacement A of the workpiece by the middle y. For that purpose, it is necessary to have peace of mind by reducing the force of pressing down on the 40 crops during the calm season.
1-return 3, that is, P7. It is necessary to lower the cutting edge by 3 degrees by slightly reducing the sharpness of the grinding wheel. Car 5 arrow f.

Ultrasonic torsional vibration in the direction of a for grinding method V 7c
[Grinding method] Invented a vibration grinding method using σ.

In this method, the grinding force waveform is the Jζ pulse shown in the figure?
The tll national force waveform becomes 6, and the absolute value of the pulse grinding force becomes [-
)゛ Then, the displacement X in the direction of the thrust force is 2.

-Ko naru 3, here, te is the vibration of the grinding wheel. In this case, the effect of reducing the resistance of the first part and the shortening of the action time (due to the effect of making the cut above the first part shallower) makes e'<pi do. In other words, the grinding wheel contact surface (grinding force 1) decreases, and the displacement in the direction of the back force of the work piece 1'1, which is related to machining accuracy x (51) Compared to the displacement of 〒ζ
decreases to d ~ π). Furthermore, as shown in Figure 3, arrow 7
5 If a low vibration of F < f is superimposed in one direction C'-) and grinding is carried out with a grinding force of V < 2 Pi JrJ-! /Ru. Due to the combined effect of the insensitive vibration cutting mechanism and the superimposed vibration cutting mechanism such as zero-level instantaneous vibration single-cutting, the grinding force p r′ of the contact surface of the grinding wheel i decreases,
The displacement X of the workpiece in the direction of the thrust force, which is related to machining accuracy, is further reduced compared to the case of continuous pulse fυ [national power, making it possible to perform detailed grinding. However, these days the grinding method 1αV is 1(10n+, how low speed is less than /min(
', 200 (fiJI cutting speed of 1 m ' min [
σ throat is equal to 7c and 1! ((1) [shaving J, ゛) feed speed of one crop [αv 9 is i speed 1α
A public fish whose grinding efficiency is reduced to about π~5B/)
Therefore, we considered the grinding method by lowering the grinding f1i: 'II 'i in which the characteristics described in 11 are realized.As shown in the 1m1 diagram, the grinding speed is \/3. High speed rotation reel l1 JI grinding rj4 Workpiece speed LσV9
In the direction of arrow 10, which is the same direction as , the low frequency frequency is 1 and the amplitude A<low frequency vibration -, and the low frequency frequency is written as 11 on the right.

-T-L/-c, v<z Grinding is performed by giving the following relationship. Mo1 (The center of rotation O of the stone is on one side amplitude. 6 (O
→01→O→02-→O vibrates as one cycle 3, Fuha 3 ('r' is represented by Tan, J3 is in the sine wave waveform, and it starts to vibrate from Harasada O. As, 1M&'
11. Grind the length between 11.1 and the length of 2 blades, and the vibration speed and C at time 2 on the right when the speed aV of the two crops is equal
] At Jj, jr), the workpiece grinding point and the grindstone begin to separate, and at H:, th, the workpiece grinding point and the grinding wheel start to separate, and at J3, they come into contact again with the 4th crop grinding point and grind a length of 61 teeth between M. Question 3: Repeat this to create an intermittent grinding force waveform as shown? di
It is possible to draw r+'l 1FJt. At point No, the depth of cut 70 per abrasive grain shows the maximum value, and at steel n, ゛ is zero, 4I-3,1'', In, fc becomes zero, and b
Because the conventional high-speed grinding mechanism that pushes the grinding wheel 11 onto the workpiece 2 with a grinding force is difficult, a principal force and a thrust force are still generated.

This) T is the length of the freeing tll (grinding with grains) (, 1 component force Pc 13 il> and thrust force Pt 12
shows a maximum value at point 1, and the approximate waveform shows a tendency for its resistance to decrease.

If this period 1' intermittent 1iJl cutting force waveform is crossed with the pulsed grinding force waveform, the ideal result is obtained.J in Fig. 33, -
) grinding force waveform and J-, each of which has a grinding force waveform of (
11 (In addition to adding force to the grinding length depending on the grain or by regularly changing the cutting depth and cutting the cutting length into pieces and creating a pulsed grinding force waveform with a short action time) do not have.

First, as shown in Fig. 5, the main shaft of rotation is vibrated in the direction of the arrow 14 with a high frequency f and amplitude cs in the ultrasonic range. J is applied to the direction-packed wave vibration grinding wheel 15 at the grinding point of the grinding area 17 (the movement of each abrasive grain group is the jig IJ). Cut into 4 pieces.

In this way, the puzzle grinding waveform 16 can be avoided. j-Pull feed at its speed +=y
As v<2πcF, only the intermittent pulse rJ1 grinding force waveform is applied, or by using the spacing pulse, for example, 3 pulses forward P', 1 pulse grinding force, 2 pulses backward P3.1 Ppz to Pulsui 4.! Return +++++
By doing so, the 7-pull is vibrated [1
°By performing linear motion, the intermittent grinding force waveform is J,
411 to be deleted.

Another chip shredding method is as shown in Figure 6.
(The stone wheel is oscillated in the radial direction, which is the direction of arrow 18,
Radial ultrasonic vibration with ultra-8 waves of amplitude αr! 11
By regularly changing the abrasive grains and the depth of cut per blade, chips can be avoided and the intermittent pulse cutting force waveform 20 can be obtained. ′
Wear. This method of intermittent cutting requires a pulse width of J, which is better than the method of cutting off the grinding length shown in Fig. 5. i7<
It is possible to reduce the pulse grinding force.3
, The method of grinding in a zigzag pattern as shown in Figure 5 and cutting the grinding length (]-)
! As shown in Fig. 7, which combines the methods of cutting T/ill cutting length by \1 and making the cutting f finer, both the axial and radial directions! With the F tatami double super chord branch IIJ grindstone 21, a similar effect can be obtained, the chips are ultra-fine, the pulse width is shortened, and the pulse grinding force is drastically reduced, making it ideal.
The intermittent pulsed grinding force waveform 22 can be avoided. In this case as well, as explained in FIG. 5, the table feed speed [αY is increased by v(2χ, F2, P1-3, 3 pulses 1), tt! , Next, one pulse body 1L c t! of Pdo1! ,”i (D
i'i ni rur, 2 pulses of PBZ are retreated,
1 pulse body 11 - Repeat the recycle to create an intermittent tσ [rigid force waveform].

The ultrasonic vibration used in the present invention will be explained with reference to Figs. 3 to 10. Set c no, first,
) i, U on Hi (grinding machine main shaft J with stone wheel 19 installed)
J, This is a diagram showing the vibration system in Hinagi 1. 3. Vertical t) When the 1st vibration frequency of the branch vibration is set to 20Kt4z, the width and main axis of the 1st vibration in Nagi There is a series of relationships between diameter and length. For example, if the diameter of the main shaft is 50 mm,
The length of the wave is 13 (l lN1N,
The straightness of the grinding wheel is 165 tnlo, and the width is 10 mm3.By using such a shape, the grinding wheel is moved in the radial direction J) with an M cost of 111M, and the radius is The direction of the ultrasonic vibration grinding wheel 19 can be changed.

41 tax on one shaft of this grinding wheel is (lI (lI) or on the main shaft.
In this case, it can be done by screw connection or bolt tightening using JjJ, JjJ, JjJ, JjJ, JjJ, JjJJJJJJIJIJIJJIJJI JJJ JJJ JJ JIJIJIJIJIJIJIJIDO, and the ultrasonic vibration can be transmitted and covered reliably.

Fig. 9 1ii Axial direction, radial direction Φ pitching ultrasonic vibration U (
It is a figure explaining a stone wheel. As shown in the figure, the width of the grinding wheel is 20 mm, and the other dimensions are the same as those shown in Fig. 8.
Axial and radial direction superimposed compound combined wave vibration grinding wheel 1 that produces ultrasonic vibrations with 3g wave vibration branching, amplitude α3, and amplitude k
You can get 4. For grinding wheel 7j with a small diameter, the longitudinal vibration system allows the axial ultrasonic vibration grinding wheel 3
□ Fig. 10 is a diagram explaining the axial ultrasonic vibration grindstone φ. As shown in the diagram, set the width of the grinding wheel to 101110 mm.
The other shapes and dimensions will be the same as in Figure 8J,-)
1173 sound wave number = 2θ only in the axial direction while sharpening
, amplitude M5=7. pm, it can be an axial ultrasonic vibration grinding wheel 21 that generates ultrasonic vibrations.

Next, various grinding methods according to the present invention using this grinding wheel will be explained. A typical grinding method using the axial ultrasonic vibrating grindstone 17' is illustrated in FIG. For surface grinding, the grinding wheel 14 is rotated in the direction of the arrow, and the workpiece 2 is fed at a feed rate of 1σV <27/'lF.
The workpiece is vibrated in a straight line with f1 or stepping, and the workpiece is moved in a straight line at a feed rate v - (feeding, and the intermittent pulse grinding force waveform obtained by intermittent contact with the grinding wheel is used to produce a flat surface. (σI cutting. Cylindrical (Jl cutting is
While stepping the workpiece 25, the frequency F at J,)
, the amplitude is oscillated to 1. ! The grinding wheel 14 is rotated in the direction of the arrow 1 at the circumferential speed VU and rotational speed at the circumferential speed VU while rotating the grinding wheel 14 in the direction of the arrow 1 at a cutting speed of Iσ1.
ii) Grinding as well] - stepping the crop 26 -
Rini J is the frequency of vibration, and the vibration is with amplitude Δ.
Grinding the grinding wheel 14 at circumferential speed V while avoiding rotational movement 1σ■
(The grindstone for internal grinding is rotated at high speed in the direction of the arrow. 1. The whetstone for small holes can be made using a longitudinal vibration system instead of the bending vibration system described in the main text. 1. To,
The present invention, which uses a longitudinally vibrating axially vibrating grindstone with a small diameter, is applied to the loading of grooves. .

A typical grinding method using the radial ultrasonic vibration grindstone 19 will be explained with reference to FIG. For surface grinding, set the grinding wheel 19 to 0.
1 Rotate in the direction of the arrow at a cutting speed of v, feed the workpiece 2 at a feed rate of y (2), and then move the workpiece in a straight line while vibrating under the conditions of 8H or by stepping [-ta] and feed it at a feed rate of V, intermittently. Surface grinding is performed using an intermittent pulsed grinding force waveform obtained by contacting the grinding wheel 19. Cylindrical grinding is performed by stepping the workpiece 25 at a frequency of F1.
The grinding wheel 19 is rotated at a circumferential speed while being vibrated with an amplitude A and is rotated at a circumferential speed. Internal grinding is similar to cylindrical grinding, where workpiece 2 (5 is
While vibrating at the frequency F and amplitude A using the Twin Pink Tanabata, the machine is rotated at a circumferential speed ■, and the calm wheel 19 is rotated in the direction of the arrow at a cutting speed Iσ for cylindrical grinding. A grinding wheel with a small diameter, such as a small-diameter Okawa, cannot be produced with one rotation per rotation.

A typical grinding method using the axial and radial fIFA wave vibration grinding wheels 21 will be explained with reference to FIG. For surface grinding, the grinding wheel 21 is rotated in the direction of arrow jJ at a grinding speed of approximately 2000 Ill/min 4'1 degree, and the workpiece 2 is fed at a feed rate y.
< Using the intermittent pulsed grinding force waveform obtained by vibrating the workpiece with Z7cAF's row 1 or stepping tanabata, the workpiece is moved straight forward at a feed rate of V, and is intermittently brought into contact with the grinding wheel 21 81. ＞C'lI and page 1 J
f cut. In cylindrical grinding, the workpiece 25 is rotated at a circumferential speed V while avoiding vibrations at a frequency F and an amplitude using a stepping motor, and the grinding wheel 21 is rotated at a grinding speed V in the direction of the arrow to generate a cylindrical grinding force 3. , internal grinding is performed by rotating the workpiece 26 at a frequency of F using a stepping motor, similar to cylindrical grinding.
, the grinding wheel 21 is rotated in the direction of the arrow at a cutting speed of Iσ1 by rotating the grinding wheel 21 in the direction of the arrow at a cutting speed of Iσ1 while rotating the grinding wheel 21 at a circumference of 31i degrees ■ while shaking the grinding wheel 21 at an amplitude of #J and internal grinding.

A grinding wheel with a small diameter for small diameter Okawa [Jl] can be manufactured by increasing the vibration frequency.

Next, a practical example of the present invention will be explained by showing a specific grinding machine. A vibrating circle PgJ grinding machine, denoted by J, will be explained in FIG. 14 and FIG.

2ρI<tb Vertical vertically packed wave electric oscillator 27 -1-輔24
in the tail and axially in the tip, ? 1' radial super & wave vibration U
(Take 21 stones and put 4. Then, put (1? 1 on the 1-axis)
1. Fix the sleeve 28 with silver solder at the vibration node position, and fix the sleeve with two high-precision roller bearings 29. The rolling bearing 29 is fixed in the housing 31 and constitutes the headstock 32 for the grinder.A pulley 30 is attached to the sleeve 28. Attach the slip link 33 (pull it). Place the fludge j-35 on the slip ring 33 so that there is little friction. Connect the plush 35 and the output terminal of the ultrasonic light vibrator 36 and cover it. Headstock 32 A three-phase induction motor 37 for -1-axis rotational drive is attached to the 1-axis 2'
Transmit rotational power to l. Then, rotate the main spindle 24 in the direction of the arrow 3 to rotate the grinding wheel 3, and place this headstock on the grinding machine carriage 38. ■Take the crop 2 to the jack 39 of the grinder.] [No.] Support the other end with the lens 40. The workpiece is oscillated by an electric spinner Tanabata driven by the control unit N and power unit 41 at a frequency of F.-maximum of 12θHt and an amplitude of A-maximum of 0.2.
Use 1 ml and vibrate! Maximum rotational speed is 20O
Set the speed V of r and P claws to avoid rotation. When the carriage 38 is moved relative to this workpiece in the direction of the arrow 7'I2 at the feed rate S, the frequency is f = 20Klh -1.
ρKf4z, radial amplitude cLY, and axial amplitude α are all about 5 μm to 20 μm, superimposed and combined ultrasonic vibration! Precision vibratory cylindrical grinding is performed on the wooden block using a FIII grindstone. The abrasive grains of the grinding wheel are A abrasive grains,
Currently used abrasive grains such as WA abrasive grains, GC abrasive grains, and Nagi abrasive grains CF3N abrasive grains can be used. Work materials include non-metallic industries such as ferrous metals, non-ferrous metals, and rubber.
It is applied to all types of industrial materials such as stone = 1';

Next, the vibratory surface grinder will be explained with reference to Fig. 1 Ci and Fig. 17. A table that covers the surface grinder bed 42 for reciprocating motion / A vibrating j-pull / I / l + step no, one end of which is supported by steel balls to reduce friction and can move linearly in the direction of the table's reciprocating motion. is fixed to the electric-hydraulic vibration drive device 45 which is also fixed on the table 43 via a connecting rod. 47, and can be vibrated at a frequency F=lHHx and an amplitude A-...0.2 mm, for example.

Grinding machine] On the back 51, as in the case of the vibrating cylindrical grinding machine, there is a 2ρKHz vertically packed η wave oscillator 27, a main shaft 2/I, a frequency r, an amplitude η9 in the axial direction of the arrow 14, and a
Ultrasonic vibration is carried out in the radial direction with amplitude (Lr). Rotate in the direction of arrow 3 and increase the grinding speed to about 2000.
+n/min.

Second, a slip ring 33 is attached to the shaft (the excitation voltage from the ultrasonic light oscillator 36 is applied to the rotating vibrator through a plush 355. A cover 48 and a cover 48 are attached to the rotating vibrator 27 and the grinding wheel, respectively. Install 52 for safety a
3゜In this way, grinding wheel 2 having the shape and dimensions shown in FIG.
1 with the same frequency "-・λθKH2, amplitude 1 in the radial direction
．． ．． :j-p,, axial amplitude 9m/rho is used to avoid ultrasonic vibrations and at the same time smoothly rotate at high speed. According to the present invention, precision surface grinding is performed.

In the case of surface grinding as well as cylindrical grinding, the present invention can be applied to all types of abrasive grains and workpieces, and in particular, it is possible to improve the grindability of materials such as rubber and ceramics that are simply rotated at high speed. - Demonstrates revolutionary precision surface grinding effects on crops with light.

Note that the groove may be ground by ultrasonically vibrating the small-diameter grindstone only in the axial direction.

(Effects) The practical effects of the present invention will be explained. 1st 14th
Cylindrical grinding will be explained using diagrams.

Using a 20<Hz vertical ultrasonic type flexural transducer, a J7-Shind grinding wheel #200 was applied to the shape shown in Fig. 10.
,＾s剟／ρ)b) □Using ultrasonic vibration, the grinding speed■
= Nose of A''/Ah5, diameter 10m1111 length 1
0011111 series innoi 1 ~ small id round bar 1)
F11 pulse, PR6 pulse, Hi, 1 pulse, PK 5
Control with pulse 611 L to know 7' = fo) lx and vibrate y = /, f 7? Rotate at L/Sata and reduce the vibration of the workpiece from 1 to 0.25111 m in the cutting length per Noicle to obtain a depth of cut of 10 μm! In addition, by carrying out vibratory cylindrical grinding according to the present invention,
Grinding r, 'ti without producing abnormal grinding noise.
(Extend tool life without avoiding instantaneous abnormal light heat that generates sparks near the JEi, without lifting the workpiece, and with extremely small grinding resistance, ゛Surface roughness θ,
? 7 meter tide R2 le 屹, circularity ρ, t, p, cylindricity +00
Succeeded in precision cylindrical processing of 1 μm per tnm)
,.

In the surface grinding shown in FIG. 16, the diamond grinding wheel 200 with the shape and dimensions shown in FIG.
h to the nurse ρ using a vertically packed wave electric oscillator /4. ,(
1, tsuj) Chord branch swing φυsa U in 夙・灼中/ρ〃wan,
With ω1 cutting 115 v = 8oo rn /min, the end face of a blind IX product with a diameter of 4nv was shaken at a number of “-/ρρ/i
x, amplitude A -0.2 ro 11n, vibrating groove, depth of cut 0.
In order to carry out the present invention by giving llIm and feeding at a feed rate of V=2, the conventional grinding speed is 10 to 1.
We succeeded in reducing the flatness of a piece that was not flat due to a 5 μm indentation.

It goes without saying that the same result can be obtained by applying low-frequency vibrations to the object as described above. 1.

[Brief explanation of drawings]

Figure 1 is a model diagram showing the conventional grinding mechanism and the Iσ1 cutting force waveform, Figure 2 is a model diagram of the vibration grinding group 4 (■ and U Fig. 4 is a model diagram explaining the tatami vibration Iσ1 grinding force waveform and grinding force waveform.
Fig. 3) Grinding group composition and intermittent grinding force waveform when low-frequency vibration is caused by low-frequency vibration in the speed direction of the object with low frequency FJ3J and amplitude A, Figure 3) This is an explanatory diagram of the intermittent pulsed grinding force waveform generated by the self-sufficient T3 wave vibration of axis 1,
Fig. 6 is an explanatory diagram of the ultrasonic vibration grinding wheel in the radial direction and a finer intermittent pulsed grinding force waveform, and Fig. 7 is an illustration of the ultrasonic vibration grinding wheel cutting in the axis direction and radius lj direction. J'45'
44 (Fine II to reduce pulse grinding force and pulse width b
'J、Ci Intermittent pulse grinding force waveform explanation diagram, Figure E] '1' Diameter 1 Figure 9 is a front view of the first embodiment of the shape of the axial chord branching l1lJ honing method.
Figure 0 is a front view of an example of the shape of an axial and radial ultrasonic vibration grindstone (1) method, and Figure 11 is an axial direction Jf37'I-wave vibration grindstone for carrying out the present invention. surface grinding method,
Figure 12 is an explanatory diagram of the cylindrical grinding method and internal grinding method. 13th
The figure is an explanatory diagram of the tooth surface grinding method, cylindrical grinding method, and internal grinding method in which the present invention is carried out using axial and radial ultrasonic vibration grindstones. Figure 14 is an example of a cylindrical grinder carrying out the present invention. FIG. 15 is a plan view, FIG. 15 is a side view of the same, FIG. 16 is a front view of an embodiment of a surface grinding machine that performs wood cutting, and FIG. 17 is a side view of the same. 6... Pulse grinding force waveform, 8.16, 20.22...
・Intermittent pulse grinding force waveform, 15... Axial direction ultrasonic vibration grinding wheel, 19... Pa 1 (radial wave vibration grinding wheel, 21... Axial direction, radial force surface chord branch vibration IJJ grinding Grinding wheel, 27... Vertical ultrasonic vibrator, 3G... Ultrasonic oscillation, 40... Pulse smoke, 4G, i... Electric oil pot vibration drive device. ρ 10th section

Claims (1)

[Claims] The grinding wheel is rotated by ultrasonic vibration in the axial direction and/or radial direction, and the workpiece is moved forward and backward in the cutting direction of the grinding wheel while being rotated or linearly moved to intermittently contact the grinding wheel to generate intermittent pulses. A precision finishing method using a grinding wheel that combines ultrasonic vibrations and low-frequency vibrations that generate a grinding force waveform to finely shred chips.