JPS6361139U - - Google Patents

Info

Publication number
JPS6361139U
JPS6361139U JP15474886U JP15474886U JPS6361139U JP S6361139 U JPS6361139 U JP S6361139U JP 15474886 U JP15474886 U JP 15474886U JP 15474886 U JP15474886 U JP 15474886U JP S6361139 U JPS6361139 U JP S6361139U
Authority
JP
Japan
Prior art keywords
substrate
frame
lifting
base frame
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15474886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325404Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15474886U priority Critical patent/JPH0325404Y2/ja
Priority to US07/106,584 priority patent/US4846623A/en
Publication of JPS6361139U publication Critical patent/JPS6361139U/ja
Application granted granted Critical
Publication of JPH0325404Y2 publication Critical patent/JPH0325404Y2/ja
Expired legal-status Critical Current

Links

JP15474886U 1986-10-08 1986-10-08 Expired JPH0325404Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15474886U JPH0325404Y2 (enrdf_load_stackoverflow) 1986-10-08 1986-10-08
US07/106,584 US4846623A (en) 1986-10-08 1987-10-08 Wafer transferring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15474886U JPH0325404Y2 (enrdf_load_stackoverflow) 1986-10-08 1986-10-08

Publications (2)

Publication Number Publication Date
JPS6361139U true JPS6361139U (enrdf_load_stackoverflow) 1988-04-22
JPH0325404Y2 JPH0325404Y2 (enrdf_load_stackoverflow) 1991-06-03

Family

ID=31074830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15474886U Expired JPH0325404Y2 (enrdf_load_stackoverflow) 1986-10-08 1986-10-08

Country Status (1)

Country Link
JP (1) JPH0325404Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0325404Y2 (enrdf_load_stackoverflow) 1991-06-03

Similar Documents

Publication Publication Date Title
JPS6361139U (enrdf_load_stackoverflow)
JP2539911Y2 (ja) 自動基板裁断装置における清掃兼用搬送機
JPH0144413Y2 (enrdf_load_stackoverflow)
JPH06334393A (ja) プリント基板保持方法及びその装置
JPH0438521Y2 (enrdf_load_stackoverflow)
JPS62195450U (enrdf_load_stackoverflow)
JP2584247Y2 (ja) 工作物の搬送位置決め装置
JPS5828716Y2 (ja) ワ−クの供給セツト装置
JPH0451475Y2 (enrdf_load_stackoverflow)
JPH027906U (enrdf_load_stackoverflow)
JPS588536U (ja) 組立て作業ラインからの被搬送物搬出装置
JPS59165740U (ja) 板状材料供給装置
JPH0793334B2 (ja) 電子部品の組立装置
JPS60169235U (ja) エアテーブル
JPS60159716U (ja) 垂直ベルトコンベヤ−に対する水平ベルトコンベヤ−からの被搬送物移送装置
JPS58134232U (ja) プレス機械の材料供給装置
JPS625144U (enrdf_load_stackoverflow)
JPH01134625U (enrdf_load_stackoverflow)
JPS63119523U (enrdf_load_stackoverflow)
JPS6215421U (enrdf_load_stackoverflow)
JPH0474256B2 (enrdf_load_stackoverflow)
JPS59167682U (ja) 部品供給装置
JPS645791A (en) Substrate processing equipment
JPS61110622U (enrdf_load_stackoverflow)
JPH0437138U (enrdf_load_stackoverflow)