JPS6360832B2 - - Google Patents

Info

Publication number
JPS6360832B2
JPS6360832B2 JP58184483A JP18448383A JPS6360832B2 JP S6360832 B2 JPS6360832 B2 JP S6360832B2 JP 58184483 A JP58184483 A JP 58184483A JP 18448383 A JP18448383 A JP 18448383A JP S6360832 B2 JPS6360832 B2 JP S6360832B2
Authority
JP
Japan
Prior art keywords
electrode
surrounding electrode
surface treatment
substrate
header assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58184483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6077974A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18448383A priority Critical patent/JPS6077974A/ja
Publication of JPS6077974A publication Critical patent/JPS6077974A/ja
Publication of JPS6360832B2 publication Critical patent/JPS6360832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP18448383A 1983-10-04 1983-10-04 表面処理装置 Granted JPS6077974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18448383A JPS6077974A (ja) 1983-10-04 1983-10-04 表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18448383A JPS6077974A (ja) 1983-10-04 1983-10-04 表面処理装置

Publications (2)

Publication Number Publication Date
JPS6077974A JPS6077974A (ja) 1985-05-02
JPS6360832B2 true JPS6360832B2 (enExample) 1988-11-25

Family

ID=16153959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18448383A Granted JPS6077974A (ja) 1983-10-04 1983-10-04 表面処理装置

Country Status (1)

Country Link
JP (1) JPS6077974A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2328221A (en) * 1997-08-15 1999-02-17 Univ Brunel Surface treatment of titanium alloys

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184485A (ja) * 1982-04-22 1983-10-27 大同特殊鋼株式会社 スクラツプの予熱方法

Also Published As

Publication number Publication date
JPS6077974A (ja) 1985-05-02

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