JPS6359539B2 - - Google Patents
Info
- Publication number
- JPS6359539B2 JPS6359539B2 JP14608881A JP14608881A JPS6359539B2 JP S6359539 B2 JPS6359539 B2 JP S6359539B2 JP 14608881 A JP14608881 A JP 14608881A JP 14608881 A JP14608881 A JP 14608881A JP S6359539 B2 JPS6359539 B2 JP S6359539B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- groove
- silicon
- polycrystalline silicon
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14608881A JPS5848436A (ja) | 1981-09-18 | 1981-09-18 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14608881A JPS5848436A (ja) | 1981-09-18 | 1981-09-18 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5848436A JPS5848436A (ja) | 1983-03-22 |
| JPS6359539B2 true JPS6359539B2 (cs) | 1988-11-21 |
Family
ID=15399852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14608881A Granted JPS5848436A (ja) | 1981-09-18 | 1981-09-18 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5848436A (cs) |
-
1981
- 1981-09-18 JP JP14608881A patent/JPS5848436A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5848436A (ja) | 1983-03-22 |
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