JPS6359529B2 - - Google Patents

Info

Publication number
JPS6359529B2
JPS6359529B2 JP57119373A JP11937382A JPS6359529B2 JP S6359529 B2 JPS6359529 B2 JP S6359529B2 JP 57119373 A JP57119373 A JP 57119373A JP 11937382 A JP11937382 A JP 11937382A JP S6359529 B2 JPS6359529 B2 JP S6359529B2
Authority
JP
Japan
Prior art keywords
substrate holder
storage chamber
melt
epitaxial growth
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57119373A
Other languages
English (en)
Japanese (ja)
Other versions
JPS599913A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57119373A priority Critical patent/JPS599913A/ja
Publication of JPS599913A publication Critical patent/JPS599913A/ja
Publication of JPS6359529B2 publication Critical patent/JPS6359529B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/263—

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP57119373A 1982-07-07 1982-07-07 液相エピタキシヤル成長装置 Granted JPS599913A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119373A JPS599913A (ja) 1982-07-07 1982-07-07 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119373A JPS599913A (ja) 1982-07-07 1982-07-07 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS599913A JPS599913A (ja) 1984-01-19
JPS6359529B2 true JPS6359529B2 (show.php) 1988-11-21

Family

ID=14759898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119373A Granted JPS599913A (ja) 1982-07-07 1982-07-07 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS599913A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09299129A (ja) * 1996-05-09 1997-11-25 Roosutobiifu Kamakurayama:Kk 荷物運搬具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109698064B (zh) * 2019-01-08 2020-10-16 重庆华虹仪表有限公司 提高低压互感器生产效率的注料模具及其应用工艺

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09299129A (ja) * 1996-05-09 1997-11-25 Roosutobiifu Kamakurayama:Kk 荷物運搬具

Also Published As

Publication number Publication date
JPS599913A (ja) 1984-01-19

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