Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
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Filing date
Publication date
Application filed by RIKENfiledCriticalRIKEN
Priority to JP57140768ApriorityCriticalpatent/JPS5931546A/ja
Publication of JPS5931546ApublicationCriticalpatent/JPS5931546A/ja
Publication of JPS6355744B2publicationCriticalpatent/JPS6355744B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/10—Lenses
H01J37/12—Lenses electrostatic
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Particle Formation And Scattering Control In Inkjet Printers
(AREA)