JPS6355532U - - Google Patents

Info

Publication number
JPS6355532U
JPS6355532U JP14785286U JP14785286U JPS6355532U JP S6355532 U JPS6355532 U JP S6355532U JP 14785286 U JP14785286 U JP 14785286U JP 14785286 U JP14785286 U JP 14785286U JP S6355532 U JPS6355532 U JP S6355532U
Authority
JP
Japan
Prior art keywords
reaction tube
protrusions
sealing plate
supporting
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14785286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143860Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14785286U priority Critical patent/JPH0143860Y2/ja
Publication of JPS6355532U publication Critical patent/JPS6355532U/ja
Application granted granted Critical
Publication of JPH0143860Y2 publication Critical patent/JPH0143860Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP14785286U 1986-09-29 1986-09-29 Expired JPH0143860Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14785286U JPH0143860Y2 (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14785286U JPH0143860Y2 (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Publications (2)

Publication Number Publication Date
JPS6355532U true JPS6355532U (enrdf_load_stackoverflow) 1988-04-14
JPH0143860Y2 JPH0143860Y2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=31061597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14785286U Expired JPH0143860Y2 (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Country Status (1)

Country Link
JP (1) JPH0143860Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Also Published As

Publication number Publication date
JPH0143860Y2 (enrdf_load_stackoverflow) 1989-12-19

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