JPS63114023U - - Google Patents

Info

Publication number
JPS63114023U
JPS63114023U JP500287U JP500287U JPS63114023U JP S63114023 U JPS63114023 U JP S63114023U JP 500287 U JP500287 U JP 500287U JP 500287 U JP500287 U JP 500287U JP S63114023 U JPS63114023 U JP S63114023U
Authority
JP
Japan
Prior art keywords
temperature part
low
means disposed
reactor
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP500287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP500287U priority Critical patent/JPS63114023U/ja
Publication of JPS63114023U publication Critical patent/JPS63114023U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP500287U 1987-01-16 1987-01-16 Pending JPS63114023U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP500287U JPS63114023U (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP500287U JPS63114023U (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Publications (1)

Publication Number Publication Date
JPS63114023U true JPS63114023U (enrdf_load_stackoverflow) 1988-07-22

Family

ID=30786180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP500287U Pending JPS63114023U (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Country Status (1)

Country Link
JP (1) JPS63114023U (enrdf_load_stackoverflow)

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