JPS6355450U - - Google Patents
Info
- Publication number
- JPS6355450U JPS6355450U JP14770386U JP14770386U JPS6355450U JP S6355450 U JPS6355450 U JP S6355450U JP 14770386 U JP14770386 U JP 14770386U JP 14770386 U JP14770386 U JP 14770386U JP S6355450 U JPS6355450 U JP S6355450U
- Authority
- JP
- Japan
- Prior art keywords
- pyroelectric
- group
- elements
- imaging device
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案の実施例を示す断面図、第３図
は従来例を示す断面図、第２図は第１図、第２図
の等価回路である。
１３：焦電膜（例えばＰＺＴ）、１４：上部電
極（例えばニクロム）、１２：熱絶縁性導体（例
えばニクロムまたは白金ロジウム）、１１：Ａｌ
配線層（１層目）、１６：上部電極（Ａｌ配線層
２層目）。
FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 3 is a sectional view showing a conventional example, and FIG. 2 is an equivalent circuit of FIGS. 1 and 2. 13: Pyroelectric film (e.g. PZT), 14: Upper electrode (e.g. nichrome), 12: Thermally insulating conductor (e.g. nichrome or platinum rhodium), 11: Al
Wiring layer (first layer), 16: upper electrode (second Al wiring layer).
Claims (1)
素子群、蓄積された信号電荷を転送する転送素子
群、および焦電素子により形成した光電変換素子
群を集積した固体撮像素子において、前記焦電性
光電変換素子の下部電極を熱絶縁性電極としたこ
とを特徴とする焦電型モノリシツク赤外線固体撮
像装置。 In a solid-state imaging device in which a group of capacitive elements that accumulate optical information on the main surface of a semiconductor substrate, a group of transfer elements that transfer accumulated signal charges, and a group of photoelectric conversion elements formed by pyroelectric elements are integrated, the pyroelectric A pyroelectric monolithic infrared solid-state imaging device characterized in that a lower electrode of a photoelectric conversion element is a thermally insulating electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770386U JPH051082Y2 (en) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770386U JPH051082Y2 (en) | 1986-09-29 | 1986-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355450U true JPS6355450U (en) | 1988-04-13 |
| JPH051082Y2 JPH051082Y2 (en) | 1993-01-12 |
Family
ID=31061306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14770386U Expired - Lifetime JPH051082Y2 (en) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051082Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0559865U (en) * | 1991-06-18 | 1993-08-06 | 川崎重工業株式会社 | Pyroelectric sensor |
| JP2011179953A (en) * | 2010-03-01 | 2011-09-15 | Rohm Co Ltd | Infrared sensor |
-
1986
- 1986-09-29 JP JP14770386U patent/JPH051082Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0559865U (en) * | 1991-06-18 | 1993-08-06 | 川崎重工業株式会社 | Pyroelectric sensor |
| JP2011179953A (en) * | 2010-03-01 | 2011-09-15 | Rohm Co Ltd | Infrared sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051082Y2 (en) | 1993-01-12 |
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