JPS6352425B2 - - Google Patents

Info

Publication number
JPS6352425B2
JPS6352425B2 JP58057913A JP5791383A JPS6352425B2 JP S6352425 B2 JPS6352425 B2 JP S6352425B2 JP 58057913 A JP58057913 A JP 58057913A JP 5791383 A JP5791383 A JP 5791383A JP S6352425 B2 JPS6352425 B2 JP S6352425B2
Authority
JP
Japan
Prior art keywords
sample
movement
drive
worm
tilt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58057913A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59184442A (ja
Inventor
Shigeru Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP58057913A priority Critical patent/JPS59184442A/ja
Publication of JPS59184442A publication Critical patent/JPS59184442A/ja
Publication of JPS6352425B2 publication Critical patent/JPS6352425B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58057913A 1983-04-04 1983-04-04 電子線機器のゴニオメ−タステ−ジ Granted JPS59184442A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58057913A JPS59184442A (ja) 1983-04-04 1983-04-04 電子線機器のゴニオメ−タステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58057913A JPS59184442A (ja) 1983-04-04 1983-04-04 電子線機器のゴニオメ−タステ−ジ

Publications (2)

Publication Number Publication Date
JPS59184442A JPS59184442A (ja) 1984-10-19
JPS6352425B2 true JPS6352425B2 (enrdf_load_stackoverflow) 1988-10-19

Family

ID=13069228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58057913A Granted JPS59184442A (ja) 1983-04-04 1983-04-04 電子線機器のゴニオメ−タステ−ジ

Country Status (1)

Country Link
JP (1) JPS59184442A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3133307B2 (ja) * 1989-10-13 2001-02-05 株式会社日立製作所 電子顕微鏡
JP5220469B2 (ja) * 2008-04-24 2013-06-26 日本電子株式会社 荷電粒子ビーム装置の試料装置
JP2011154920A (ja) * 2010-01-28 2011-08-11 Hitachi High-Technologies Corp イオンミリング装置，試料加工方法，加工装置、および試料駆動機構
JP5480110B2 (ja) * 2010-11-22 2014-04-23 株式会社日立ハイテクノロジーズ イオンミリング装置及びイオンミリング加工方法
JP6975415B2 (ja) * 2017-06-02 2021-12-01 国立研究開発法人物質・材料研究機構 試料冷却装置
US11538652B2 (en) 2019-11-15 2022-12-27 Fei Company Systems and methods of hysteresis compensation
US11244805B2 (en) * 2019-11-15 2022-02-08 Fei Company Electron microscope stage
US11562877B2 (en) 2019-11-15 2023-01-24 Fei Company Systems and methods of clamp compensation

Also Published As

Publication number Publication date
JPS59184442A (ja) 1984-10-19

Similar Documents

Publication Publication Date Title
US4990050A (en) Wrist mechanism
CA1256508A (en) Industrial robot for welding and cutting by means of a laser beam
JPS6352425B2 (enrdf_load_stackoverflow)
JPS6234485B2 (enrdf_load_stackoverflow)
GB2115778A (en) Mechanical actuators
US4406525A (en) Light beam scanning device
US20160256952A1 (en) Automatic welding machine
EP1101139B1 (de) Operationsmikroskop-stativ für x-y-verschiebung
KR20200145377A (ko) 슬레이브 장치 및 이를 제어하는 방법
US4710092A (en) Industrial robot having two gimbal-ring type arranged swinging axes
JPH07178684A (ja) ロボットアーム
JPH11119114A (ja) 顕微鏡の載物ステージ用同軸駆動装置
JPS6116167B2 (enrdf_load_stackoverflow)
JPH0241605Y2 (enrdf_load_stackoverflow)
US3179260A (en) Micromanipulator
US4818068A (en) Slit apparatus
DE19633398A1 (de) Einstellmechanismus für das Feinsteuerverhältnis in einem Feinsteuerhebel
JP2638946B2 (ja) 位置決め装置
GB2116142A (en) Wrist mechanisms for manipulator apparatus
JPH0256890B2 (enrdf_load_stackoverflow)
JPS645744B2 (enrdf_load_stackoverflow)
CN216731729U (zh) 角度摆放装置
WO2022196832A1 (ja) ロボット装置、傾き調整装置
JP4907203B2 (ja) アイピースの瞳間隔調節装置
JPS6297788A (ja) レ−ザ加工装置