JPS635229B2 - - Google Patents

Info

Publication number
JPS635229B2
JPS635229B2 JP4181883A JP4181883A JPS635229B2 JP S635229 B2 JPS635229 B2 JP S635229B2 JP 4181883 A JP4181883 A JP 4181883A JP 4181883 A JP4181883 A JP 4181883A JP S635229 B2 JPS635229 B2 JP S635229B2
Authority
JP
Japan
Prior art keywords
industrial robot
reaction force
workbench
tip
hand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4181883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169789A (ja
Inventor
Hisao Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4181883A priority Critical patent/JPS59169789A/ja
Publication of JPS59169789A publication Critical patent/JPS59169789A/ja
Publication of JPS635229B2 publication Critical patent/JPS635229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Manipulator (AREA)
JP4181883A 1983-03-14 1983-03-14 産業用ロボツトのハンド装置 Granted JPS59169789A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4181883A JPS59169789A (ja) 1983-03-14 1983-03-14 産業用ロボツトのハンド装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4181883A JPS59169789A (ja) 1983-03-14 1983-03-14 産業用ロボツトのハンド装置

Publications (2)

Publication Number Publication Date
JPS59169789A JPS59169789A (ja) 1984-09-25
JPS635229B2 true JPS635229B2 (enrdf_load_stackoverflow) 1988-02-02

Family

ID=12618878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4181883A Granted JPS59169789A (ja) 1983-03-14 1983-03-14 産業用ロボツトのハンド装置

Country Status (1)

Country Link
JP (1) JPS59169789A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180129393A (ko) * 2017-05-26 2018-12-05 한국생산기술연구원 사파이어 웨이퍼의 표면처리 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136740A (ja) * 1984-12-03 1986-06-24 Fujitsu Ten Ltd 圧入機

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942289A (ja) * 1982-09-02 1984-03-08 ぺんてる株式会社 圧入作業用ロボツト

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180129393A (ko) * 2017-05-26 2018-12-05 한국생산기술연구원 사파이어 웨이퍼의 표면처리 방법

Also Published As

Publication number Publication date
JPS59169789A (ja) 1984-09-25

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