JPS6351824B2 - - Google Patents
Info
- Publication number
- JPS6351824B2 JPS6351824B2 JP59221357A JP22135784A JPS6351824B2 JP S6351824 B2 JPS6351824 B2 JP S6351824B2 JP 59221357 A JP59221357 A JP 59221357A JP 22135784 A JP22135784 A JP 22135784A JP S6351824 B2 JPS6351824 B2 JP S6351824B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- polishing
- polished
- elastic force
- force distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 67
- 239000000463 material Substances 0.000 claims description 23
- 238000009826 distribution Methods 0.000 claims description 17
- 238000003825 pressing Methods 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221357A JPS61100358A (ja) | 1984-10-23 | 1984-10-23 | 研摩パツド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221357A JPS61100358A (ja) | 1984-10-23 | 1984-10-23 | 研摩パツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61100358A JPS61100358A (ja) | 1986-05-19 |
| JPS6351824B2 true JPS6351824B2 (zh) | 1988-10-17 |
Family
ID=16765525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59221357A Granted JPS61100358A (ja) | 1984-10-23 | 1984-10-23 | 研摩パツド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61100358A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0347383A (ja) * | 1989-07-13 | 1991-02-28 | Honda Lock Mfg Co Ltd | 自動車用ドアロック装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103768A (ja) * | 1984-10-25 | 1986-05-22 | Olympus Optical Co Ltd | 研摩・研削工具 |
| US6439979B1 (en) | 1992-02-12 | 2002-08-27 | Tokyo Electron Limited | Polishing apparatus and polishing method using the same |
| JP3708167B2 (ja) * | 1995-05-17 | 2005-10-19 | 株式会社荏原製作所 | 研磨布及び該研磨布を備えたポリッシング装置 |
| DE102004003131A1 (de) † | 2004-01-15 | 2005-08-11 | Carl Zeiss | Vorrichtung und Verfahren zum Polieren einer optischen Fläche, optisches Bauelement, sowie Verfahren zum Herstellen eines Polierwerkzeugs |
| JP4933957B2 (ja) * | 2007-05-18 | 2012-05-16 | 住友ゴム工業株式会社 | スポンジたわし |
-
1984
- 1984-10-23 JP JP59221357A patent/JPS61100358A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0347383A (ja) * | 1989-07-13 | 1991-02-28 | Honda Lock Mfg Co Ltd | 自動車用ドアロック装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61100358A (ja) | 1986-05-19 |
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