JPS6350706A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS6350706A
JPS6350706A JP19615086A JP19615086A JPS6350706A JP S6350706 A JPS6350706 A JP S6350706A JP 19615086 A JP19615086 A JP 19615086A JP 19615086 A JP19615086 A JP 19615086A JP S6350706 A JPS6350706 A JP S6350706A
Authority
JP
Japan
Prior art keywords
refractive index
measured
film thickness
detector
calculated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19615086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466285B2 (enrdf_load_stackoverflow
Inventor
Isao Hishikari
功 菱刈
Toshihiko Ide
敏彦 井手
Kosei Aikawa
相川　孝生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP19615086A priority Critical patent/JPS6350706A/ja
Publication of JPS6350706A publication Critical patent/JPS6350706A/ja
Publication of JPH0466285B2 publication Critical patent/JPH0466285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP19615086A 1986-08-21 1986-08-21 膜厚測定装置 Granted JPS6350706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19615086A JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19615086A JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6350706A true JPS6350706A (ja) 1988-03-03
JPH0466285B2 JPH0466285B2 (enrdf_load_stackoverflow) 1992-10-22

Family

ID=16353041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19615086A Granted JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6350706A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838169A (enrdf_load_stackoverflow) * 1971-09-16 1973-06-05
JPS6176905A (ja) * 1984-09-21 1986-04-19 Oak Seisakusho:Kk 膜厚測定の方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838169A (enrdf_load_stackoverflow) * 1971-09-16 1973-06-05
JPS6176905A (ja) * 1984-09-21 1986-04-19 Oak Seisakusho:Kk 膜厚測定の方法

Also Published As

Publication number Publication date
JPH0466285B2 (enrdf_load_stackoverflow) 1992-10-22

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