JPS6350657B2 - - Google Patents

Info

Publication number
JPS6350657B2
JPS6350657B2 JP56083495A JP8349581A JPS6350657B2 JP S6350657 B2 JPS6350657 B2 JP S6350657B2 JP 56083495 A JP56083495 A JP 56083495A JP 8349581 A JP8349581 A JP 8349581A JP S6350657 B2 JPS6350657 B2 JP S6350657B2
Authority
JP
Japan
Prior art keywords
inspected
mesh
defective
circuit
outputs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56083495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57198852A (en
Inventor
Seikichi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP8349581A priority Critical patent/JPS57198852A/ja
Publication of JPS57198852A publication Critical patent/JPS57198852A/ja
Publication of JPS6350657B2 publication Critical patent/JPS6350657B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8349581A 1981-05-30 1981-05-30 Inspecting device Granted JPS57198852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8349581A JPS57198852A (en) 1981-05-30 1981-05-30 Inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8349581A JPS57198852A (en) 1981-05-30 1981-05-30 Inspecting device

Publications (2)

Publication Number Publication Date
JPS57198852A JPS57198852A (en) 1982-12-06
JPS6350657B2 true JPS6350657B2 (enFirst) 1988-10-11

Family

ID=13804057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8349581A Granted JPS57198852A (en) 1981-05-30 1981-05-30 Inspecting device

Country Status (1)

Country Link
JP (1) JPS57198852A (enFirst)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112605A (en) * 1980-02-12 1981-09-05 Fuji Xerox Co Ltd Detecting method for stain on picture of contour pattern

Also Published As

Publication number Publication date
JPS57198852A (en) 1982-12-06

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