JPS6350554B2 - - Google Patents
Info
- Publication number
- JPS6350554B2 JPS6350554B2 JP56004344A JP434481A JPS6350554B2 JP S6350554 B2 JPS6350554 B2 JP S6350554B2 JP 56004344 A JP56004344 A JP 56004344A JP 434481 A JP434481 A JP 434481A JP S6350554 B2 JPS6350554 B2 JP S6350554B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- chevron
- radiation
- cryopump
- room temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP434481A JPS57119186A (en) | 1981-01-14 | 1981-01-14 | Cryo pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP434481A JPS57119186A (en) | 1981-01-14 | 1981-01-14 | Cryo pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57119186A JPS57119186A (en) | 1982-07-24 |
| JPS6350554B2 true JPS6350554B2 (cg-RX-API-DMAC7.html) | 1988-10-11 |
Family
ID=11581804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP434481A Granted JPS57119186A (en) | 1981-01-14 | 1981-01-14 | Cryo pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57119186A (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123775A (ja) * | 1984-11-20 | 1986-06-11 | Toshiba Corp | クライオポンプ |
| JPH074671U (ja) * | 1993-06-17 | 1995-01-24 | 三洋工業株式会社 | 波反り防止用フローリング材 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543219A (en) * | 1978-09-18 | 1980-03-27 | Aisin Seiki Co Ltd | Cryopump |
-
1981
- 1981-01-14 JP JP434481A patent/JPS57119186A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57119186A (en) | 1982-07-24 |
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