JPS6350156U - - Google Patents
Info
- Publication number
- JPS6350156U JPS6350156U JP14497786U JP14497786U JPS6350156U JP S6350156 U JPS6350156 U JP S6350156U JP 14497786 U JP14497786 U JP 14497786U JP 14497786 U JP14497786 U JP 14497786U JP S6350156 U JPS6350156 U JP S6350156U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- beams
- output
- monitor device
- beam semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
Description
第１図は本考案に係るモニタ装置の模式的斜視
図、第２図は本考案に係るモニタ装置を３ビーム
半導体レーザに組合せた状態を示す平面図である
。
１……ウエハ、２ａ，２ｂ，２ｃ……フオトダ
イオード、３ａ，３ｂ，３ｃ……溝、４ａ，４ｃ
……溝、５ａ，５ｂ，５ｃ……ブロツク、６ａ，
６ｂ……遮光壁、１０……３ビーム半導体レーザ
。
FIG. 1 is a schematic perspective view of a monitor device according to the present invention, and FIG. 2 is a plan view showing a state in which the monitor device according to the present invention is combined with a three-beam semiconductor laser. 1...Wafer, 2a, 2b, 2c...Photodiode, 3a, 3b, 3c...Groove, 4a, 4c
...Groove, 5a, 5b, 5c...Block, 6a,
6b... Light shielding wall, 10... 3-beam semiconductor laser.
Claims (1)
をモニタする装置において、 各ビームに対応する位置に設けられ、各ビーム
の出力を検出するビーム数と同数の光検出部と、
各ビームが交錯しないように各ビームの進路間及
び前記光検出部間に設けられた遮光手段とを具備
することを特徴とするマルチビーム半導体レーザ
用モニタ装置。 ２ 前記光検出部と前記遮光手段とが一体に構成
されている実用新案登録請求の範囲第１項記載の
マルチビーム半導体レーザ用モニタ装置。[Claims for Utility Model Registration] 1. A device for monitoring the output of each beam of a multi-beam semiconductor laser, which includes a device that is provided at a position corresponding to each beam and has the same number of photodetectors as the number of beams for detecting the output of each beam. ,
A monitor device for a multi-beam semiconductor laser, comprising a light shielding means provided between the paths of the respective beams and between the photodetecting sections so that the beams do not intersect. 2. A multi-beam semiconductor laser monitor device according to claim 1, wherein the photodetector and the light blocking means are integrally constructed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14497786U JPS6350156U (en) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14497786U JPS6350156U (en) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350156U true JPS6350156U (en) | 1988-04-05 |
Family
ID=31056087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14497786U Pending JPS6350156U (en) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350156U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57173238A (en) * | 1981-04-17 | 1982-10-25 | Matsushita Electric Ind Co Ltd | Optical transmitter |
| JPS61152088A (en) * | 1984-12-26 | 1986-07-10 | Canon Inc | Semiconductor laser |
-
1986
- 1986-09-19 JP JP14497786U patent/JPS6350156U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57173238A (en) * | 1981-04-17 | 1982-10-25 | Matsushita Electric Ind Co Ltd | Optical transmitter |
| JPS61152088A (en) * | 1984-12-26 | 1986-07-10 | Canon Inc | Semiconductor laser |