JPS6350146B2 - - Google Patents

Info

Publication number
JPS6350146B2
JPS6350146B2 JP8004280A JP8004280A JPS6350146B2 JP S6350146 B2 JPS6350146 B2 JP S6350146B2 JP 8004280 A JP8004280 A JP 8004280A JP 8004280 A JP8004280 A JP 8004280A JP S6350146 B2 JPS6350146 B2 JP S6350146B2
Authority
JP
Japan
Prior art keywords
speed
polishing head
polishing
section
speed control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8004280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS578068A (en
Inventor
Toshio Sakata
Kazuaki Mizuno
Takayuki Ooshima
Nobuo Ootsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8004280A priority Critical patent/JPS578068A/ja
Publication of JPS578068A publication Critical patent/JPS578068A/ja
Publication of JPS6350146B2 publication Critical patent/JPS6350146B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP8004280A 1980-06-13 1980-06-13 Disk grinder Granted JPS578068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8004280A JPS578068A (en) 1980-06-13 1980-06-13 Disk grinder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8004280A JPS578068A (en) 1980-06-13 1980-06-13 Disk grinder

Publications (2)

Publication Number Publication Date
JPS578068A JPS578068A (en) 1982-01-16
JPS6350146B2 true JPS6350146B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-06

Family

ID=13707182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8004280A Granted JPS578068A (en) 1980-06-13 1980-06-13 Disk grinder

Country Status (1)

Country Link
JP (1) JPS578068A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311729U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-06-20 1991-02-06

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS601775A (ja) * 1983-06-17 1985-01-07 日産自動車株式会社 ダイオ−ド内蔵コネクタ及びその製造方法
JPS62193765A (ja) * 1986-02-18 1987-08-25 Hitachi Electronics Eng Co Ltd デイスク基板の研摩方法
JPH06306B2 (ja) * 1988-02-10 1994-01-05 キヤノン株式会社 研摩装置
JP6101378B2 (ja) * 2011-03-25 2017-03-22 株式会社荏原製作所 研磨装置
JP5886602B2 (ja) * 2011-03-25 2016-03-16 株式会社荏原製作所 研磨装置および研磨方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311729U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-06-20 1991-02-06

Also Published As

Publication number Publication date
JPS578068A (en) 1982-01-16

Similar Documents

Publication Publication Date Title
US5486129A (en) System and method for real-time control of semiconductor a wafer polishing, and a polishing head
US5088240A (en) Automated rigid-disk finishing system providing in-line process control
JP3649493B2 (ja) ポリッシングの終点決定方法及び装置
JPH0319611B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN1222429A (zh) 用于抛光的带有可膨胀气囊的薄片承载头和倾角控制方法
JPS6350146B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0823936B2 (ja) 磁気記録装置に用いられるハードデイスク基板の表面と裏面をテクスチヤリングする装置
US3289906A (en) Capstan and pressure shoe
US4907106A (en) Head slider driving mechanism for a magnetic disk apparatus
CN1666257A (zh) 具有分别对每个装置设置的数据记录区的磁盘装置
JPH0329547B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH08220625A (ja) 写真用フィルム平面化感光乳剤側支持装置付きフィルム上磁気画像領域記録ヘッド
JPH01140958A (ja) 円板仕上方法およびその装置
JPH0453672A (ja) 薄膜磁気ヘッドの製造方法及び薄膜磁気ヘッドの製造装置
JPH01316160A (ja) ディスクの研摩加工方式
JPH0568770B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3082381B2 (ja) ディスク原盤裏面研磨装置
JPH0729223A (ja) スタンパの製造方法およびスタンパ裏面研磨装置
CN101574789B (zh) 磁头滑块的研磨装置
JPH07110968A (ja) 光ディスク原盤用テープ研磨装置およびその研磨方法
JPS609961Y2 (ja) テープ給送装置
JPS6010870B2 (ja) 薄基板のそり修正装置
JPS62213955A (ja) デイスク基板の研摩装置
JPH0415527B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6219368A (ja) テ−プ加工装置