JPS6349235U - - Google Patents
Info
- Publication number
- JPS6349235U JPS6349235U JP14238786U JP14238786U JPS6349235U JP S6349235 U JPS6349235 U JP S6349235U JP 14238786 U JP14238786 U JP 14238786U JP 14238786 U JP14238786 U JP 14238786U JP S6349235 U JPS6349235 U JP S6349235U
- Authority
- JP
- Japan
- Prior art keywords
- fixed cover
- serves
- axis direction
- guide member
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案装置を例示する一部を断面にし
た平面図である。
１…マルチダイボンダ、２ａ，２ｂ，２ｃ…チ
ツプ、３…基板、４…移動ステージ、５…Ｘテー
ブル、６…Ｙテーブル、７…半固定カバー、８…
固定カバー。
FIG. 1 is a partially sectional plan view illustrating the device of the present invention. 1...Multi die bonder, 2a, 2b, 2c...chip, 3...substrate, 4...movement stage, 5...X table, 6...Y table, 7...semi-fixed cover, 8...
Fixed cover.
Claims (1)
させるＸテーブルおよびＹテーブルと、前記基板
ステージの上方に配設された半固定カバーおよび
固定カバーとからなり、不活性ガス噴出部材を装
着した前記半固定カバーを、チツプのボンデイン
グ孔を有し且つガイド部材を兼ねる前記固定カバ
ーのＹ軸方向に沿つて移動自在に支承したことを
特徴とするマルチダイボンダ。 It consists of an A multi-die bonder characterized in that a fixed cover is supported movably along the Y-axis direction of the fixed cover, which has a chip bonding hole and also serves as a guide member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14238786U JPH037949Y2 (en) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14238786U JPH037949Y2 (en) | 1986-09-17 | 1986-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6349235U true JPS6349235U (en) | 1988-04-04 |
| JPH037949Y2 JPH037949Y2 (en) | 1991-02-27 |
Family
ID=31051077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14238786U Expired JPH037949Y2 (en) | 1986-09-17 | 1986-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037949Y2 (en) |
-
1986
- 1986-09-17 JP JP14238786U patent/JPH037949Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037949Y2 (en) | 1991-02-27 |