JPS6348138B2 - - Google Patents

Info

Publication number
JPS6348138B2
JPS6348138B2 JP53102052A JP10205278A JPS6348138B2 JP S6348138 B2 JPS6348138 B2 JP S6348138B2 JP 53102052 A JP53102052 A JP 53102052A JP 10205278 A JP10205278 A JP 10205278A JP S6348138 B2 JPS6348138 B2 JP S6348138B2
Authority
JP
Japan
Prior art keywords
fixed
plate
movable
electrode
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53102052A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530113A (en
Inventor
Shigeru Umemura
Akira Tomono
Takeshi Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10205278A priority Critical patent/JPS5530113A/ja
Publication of JPS5530113A publication Critical patent/JPS5530113A/ja
Publication of JPS6348138B2 publication Critical patent/JPS6348138B2/ja
Granted legal-status Critical Current

Links

JP10205278A 1978-08-22 1978-08-22 Electrostatically drive relay Granted JPS5530113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10205278A JPS5530113A (en) 1978-08-22 1978-08-22 Electrostatically drive relay

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10205278A JPS5530113A (en) 1978-08-22 1978-08-22 Electrostatically drive relay

Publications (2)

Publication Number Publication Date
JPS5530113A JPS5530113A (en) 1980-03-03
JPS6348138B2 true JPS6348138B2 (nl) 1988-09-27

Family

ID=14316986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10205278A Granted JPS5530113A (en) 1978-08-22 1978-08-22 Electrostatically drive relay

Country Status (1)

Country Link
JP (1) JPS5530113A (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004512671A (ja) * 2000-05-17 2004-04-22 ゼロックス　コーポレイション フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE965592C (de) * 1952-10-28 1957-06-13 Erich Steingroever Dr Ing Elektrostatisches Relais

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE965592C (de) * 1952-10-28 1957-06-13 Erich Steingroever Dr Ing Elektrostatisches Relais

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004512671A (ja) * 2000-05-17 2004-04-22 ゼロックス　コーポレイション フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法

Also Published As

Publication number Publication date
JPS5530113A (en) 1980-03-03

Similar Documents

Publication Publication Date Title
US5051643A (en) Electrostatically switched integrated relay and capacitor
US6734770B2 (en) Microrelay
US4747670A (en) Electrostatic device and terminal therefor
EP0067883B1 (en) Piezo-electric relay
US7280014B2 (en) Micro-electro-mechanical switch and a method of using and making thereof
US4093883A (en) Piezoelectric multimorph switches
US4570139A (en) Thin-film magnetically operated micromechanical electric switching device
US4978881A (en) Piezoelectric actuator of lamination type
JP3106389B2 (ja) 可変容量コンデンサ
US4205242A (en) Electret bistable system
JP2001143595A (ja) マイクロ・エレクトロメカニカルｒｆスイッチをベースにした折り返しバネとその製造方法
US4112279A (en) Piezoelectric relay construction
US7463126B2 (en) Micro electromechanical switch and method of manufacturing the same
EP0277224A1 (en) Piezoelectric switch
US3978508A (en) Pressure sensitive field effect device
JPS6335092U (nl)
US4506198A (en) Trigger speed control switch
JPS6348138B2 (nl)
JP2002100276A (ja) 微小機械スイッチ
CA1293758C (en) Piezoelectric relay
US6693735B1 (en) MEMS structure with surface potential control
EP1026718B1 (en) Electrostatically controlled micro-relay device
JPH0458429A (ja) 静電リレー
JP2892525B2 (ja) 静電リレー
EP1474817B1 (en) Microswitch with a micro-electromechanical system