JPS6348004B2 - - Google Patents

Info

Publication number
JPS6348004B2
JPS6348004B2 JP15545881A JP15545881A JPS6348004B2 JP S6348004 B2 JPS6348004 B2 JP S6348004B2 JP 15545881 A JP15545881 A JP 15545881A JP 15545881 A JP15545881 A JP 15545881A JP S6348004 B2 JPS6348004 B2 JP S6348004B2
Authority
JP
Japan
Prior art keywords
vibrator
ultrasonic
cell
light
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15545881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5855805A (ja
Inventor
Koichiro Myagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP15545881A priority Critical patent/JPS5855805A/ja
Publication of JPS5855805A publication Critical patent/JPS5855805A/ja
Publication of JPS6348004B2 publication Critical patent/JPS6348004B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP15545881A 1981-09-30 1981-09-30 微少変位測定装置 Granted JPS5855805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15545881A JPS5855805A (ja) 1981-09-30 1981-09-30 微少変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15545881A JPS5855805A (ja) 1981-09-30 1981-09-30 微少変位測定装置

Publications (2)

Publication Number Publication Date
JPS5855805A JPS5855805A (ja) 1983-04-02
JPS6348004B2 true JPS6348004B2 (enrdf_load_stackoverflow) 1988-09-27

Family

ID=15606481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15545881A Granted JPS5855805A (ja) 1981-09-30 1981-09-30 微少変位測定装置

Country Status (1)

Country Link
JP (1) JPS5855805A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614510U (ja) * 1992-07-03 1994-02-25 オサメ工業株式会社 空気圧式揺動アクチュエータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614510U (ja) * 1992-07-03 1994-02-25 オサメ工業株式会社 空気圧式揺動アクチュエータ

Also Published As

Publication number Publication date
JPS5855805A (ja) 1983-04-02

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