JPS6345735Y2 - - Google Patents
Info
- Publication number
- JPS6345735Y2 JPS6345735Y2 JP1982176841U JP17684182U JPS6345735Y2 JP S6345735 Y2 JPS6345735 Y2 JP S6345735Y2 JP 1982176841 U JP1982176841 U JP 1982176841U JP 17684182 U JP17684182 U JP 17684182U JP S6345735 Y2 JPS6345735 Y2 JP S6345735Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ion source
- sample
- ion beam
- ionization chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 description 42
- 238000000992 sputter etching Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 4
- 238000005211 surface analysis Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17684182U JPS5980956U (ja) | 1982-11-22 | 1982-11-22 | イオン銃 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17684182U JPS5980956U (ja) | 1982-11-22 | 1982-11-22 | イオン銃 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5980956U JPS5980956U (ja) | 1984-05-31 |
| JPS6345735Y2 true JPS6345735Y2 (ko) | 1988-11-28 |
Family
ID=30384357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17684182U Granted JPS5980956U (ja) | 1982-11-22 | 1982-11-22 | イオン銃 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5980956U (ko) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410972A (en) * | 1977-06-27 | 1979-01-26 | Mitsubishi Electric Corp | Switching device |
| JPS56149368A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149371A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149370A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149365A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149367A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149366A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
-
1982
- 1982-11-22 JP JP17684182U patent/JPS5980956U/ja active Granted
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410972A (en) * | 1977-06-27 | 1979-01-26 | Mitsubishi Electric Corp | Switching device |
| JPS56149368A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149371A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149370A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149365A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149367A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
| JPS56149366A (en) * | 1980-04-21 | 1981-11-19 | Kawasaki Heavy Ind Ltd | Manufacture of hardened body chiefly based on coal ash |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5980956U (ja) | 1984-05-31 |
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