JPS6345735Y2 - - Google Patents

Info

Publication number
JPS6345735Y2
JPS6345735Y2 JP1982176841U JP17684182U JPS6345735Y2 JP S6345735 Y2 JPS6345735 Y2 JP S6345735Y2 JP 1982176841 U JP1982176841 U JP 1982176841U JP 17684182 U JP17684182 U JP 17684182U JP S6345735 Y2 JPS6345735 Y2 JP S6345735Y2
Authority
JP
Japan
Prior art keywords
ion
ion source
sample
ion beam
ionization chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982176841U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5980956U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17684182U priority Critical patent/JPS5980956U/ja
Publication of JPS5980956U publication Critical patent/JPS5980956U/ja
Application granted granted Critical
Publication of JPS6345735Y2 publication Critical patent/JPS6345735Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP17684182U 1982-11-22 1982-11-22 イオン銃 Granted JPS5980956U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17684182U JPS5980956U (ja) 1982-11-22 1982-11-22 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17684182U JPS5980956U (ja) 1982-11-22 1982-11-22 イオン銃

Publications (2)

Publication Number Publication Date
JPS5980956U JPS5980956U (ja) 1984-05-31
JPS6345735Y2 true JPS6345735Y2 (OSRAM) 1988-11-28

Family

ID=30384357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17684182U Granted JPS5980956U (ja) 1982-11-22 1982-11-22 イオン銃

Country Status (1)

Country Link
JP (1) JPS5980956U (OSRAM)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410972A (en) * 1977-06-27 1979-01-26 Mitsubishi Electric Corp Switching device
JPS56149365A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149366A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149371A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149367A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149368A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149370A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash

Also Published As

Publication number Publication date
JPS5980956U (ja) 1984-05-31

Similar Documents

Publication Publication Date Title
US3845305A (en) Microbeam probe apparatus
JPS6213789B2 (OSRAM)
US5008537A (en) Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
JP2001015055A (ja) 荷電粒子ビームカラム
JP2810797B2 (ja) 反射電子顕微鏡
JPS6340241A (ja) イオンビ−ム装置
EP0084850B1 (en) Apparatus for irradiation with charged particle beams
JPS6345735Y2 (OSRAM)
GB966442A (en) Improvements in and relating to electron-emission microscopes
US3946268A (en) Field emission gun improvement
JPH10162769A (ja) イオンビーム加工装置
JPH05152182A (ja) イオン光学描写装置に利用のデユオプラズマトロン型イオン源
US4918358A (en) Apparatus using charged-particle beam
US4020387A (en) Field emission electron gun
US3931519A (en) Field emission electron gun
US4149055A (en) Focusing ion accelerator
JP2618924B2 (ja) 電子ビーム加工装置
JP2637948B2 (ja) ビームプラズマ型イオン銃
US3931517A (en) Field emission electron gun
US4121100A (en) Electron microscope
JP3123850B2 (ja) 直接写像型反射電子顕微鏡
KR840006554A (ko) 음극선관
JPS60121663A (ja) レ−ザ−励起イオン源
JP2637947B2 (ja) ビームプラズマ型イオン銃
JP2004247321A (ja) 走査形電子顕微鏡