JPS6344164B2 - - Google Patents
Info
- Publication number
- JPS6344164B2 JPS6344164B2 JP56131921A JP13192181A JPS6344164B2 JP S6344164 B2 JPS6344164 B2 JP S6344164B2 JP 56131921 A JP56131921 A JP 56131921A JP 13192181 A JP13192181 A JP 13192181A JP S6344164 B2 JPS6344164 B2 JP S6344164B2
- Authority
- JP
- Japan
- Prior art keywords
- paint layer
- thickness
- semi
- change
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56131921A JPS5833106A (ja) | 1981-08-22 | 1981-08-22 | 塗料層の層厚変化量測定装置 |
US06/326,675 US4443106A (en) | 1981-08-22 | 1981-12-01 | Measuring device for measuring the amount of change in thickness of the paint layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56131921A JPS5833106A (ja) | 1981-08-22 | 1981-08-22 | 塗料層の層厚変化量測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5833106A JPS5833106A (ja) | 1983-02-26 |
JPS6344164B2 true JPS6344164B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-09-02 |
Family
ID=15069306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56131921A Granted JPS5833106A (ja) | 1981-08-22 | 1981-08-22 | 塗料層の層厚変化量測定装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4443106A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
JP (1) | JPS5833106A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8328664D0 (en) * | 1983-10-27 | 1983-11-30 | Seetru Ltd | Sight gauge for tall tank reservoirs |
JPS60219744A (ja) * | 1984-04-17 | 1985-11-02 | Canon Inc | 投影露光装置 |
US4679946A (en) * | 1984-05-21 | 1987-07-14 | Therma-Wave, Inc. | Evaluating both thickness and compositional variables in a thin film sample |
DE3435059A1 (de) * | 1984-09-25 | 1986-03-27 | Hoechst Ag, 6230 Frankfurt | Verfahren und vorrichtung zur kontinuierlichen bestimmung der anisotropiezustaende von optisch aktiven materialien |
US4632552A (en) * | 1985-03-06 | 1986-12-30 | At&T Bell Laboratories | Cleaved-coupled-cavity-laser-driven system for measuring small signals |
DE3600346A1 (de) * | 1986-01-08 | 1987-07-09 | Fraunhofer Ges Forschung | Verfahren zur abbildenden laserinterferometrie und laserinterferometer zur durchfuehrung des verfahrens |
US4747683A (en) * | 1986-01-17 | 1988-05-31 | Eye Research Institute Of Retina Foundation | Method and device for in vivo wetting determinations |
US4815856A (en) * | 1986-06-05 | 1989-03-28 | Storage Technology Partners Ii | Method and apparatus for measuring the absolute thickness of dust defocus layers |
US4770536A (en) * | 1986-12-04 | 1988-09-13 | Moshe Golberstein | Reflective photometry instrument |
FR2680414B1 (fr) * | 1991-08-14 | 1995-05-24 | Sofie | Ensemble d'observation et de mesures interferometriques simultanees par laser, en particulier sur des structures a couches minces. |
JPH05133712A (ja) * | 1991-11-12 | 1993-05-28 | Nikon Corp | 表面位置測定装置 |
US5220405A (en) * | 1991-12-20 | 1993-06-15 | International Business Machines Corporation | Interferometer for in situ measurement of thin film thickness changes |
US5659392A (en) * | 1995-03-22 | 1997-08-19 | Eastman Kodak Company | Associated dual interferometric measurement apparatus for determining a physical property of an object |
US5596409A (en) * | 1995-03-22 | 1997-01-21 | Eastman Kodak Company | Associated dual interferometric measurement method for determining a physical property of an object |
US6297648B1 (en) | 1996-08-16 | 2001-10-02 | The Boeing Company | Oscillating cavity paint meter |
DE19926019A1 (de) * | 1999-05-31 | 2000-12-21 | Dieter Steinberg | Verfahren und Schichtdickenmeßgerät zur in situ Überwachung wachsender Schichten |
US8445217B2 (en) | 2007-09-20 | 2013-05-21 | Vanderbilt University | Free solution measurement of molecular interactions by backscattering interferometry |
US9638632B2 (en) * | 2010-06-11 | 2017-05-02 | Vanderbilt University | Multiplexed interferometric detection system and method |
US9562853B2 (en) | 2011-02-22 | 2017-02-07 | Vanderbilt University | Nonaqueous backscattering interferometric methods |
US9273949B2 (en) | 2012-05-11 | 2016-03-01 | Vanderbilt University | Backscattering interferometric methods |
WO2016118812A1 (en) | 2015-01-23 | 2016-07-28 | Vanderbilt University | A robust interferometer and methods of using same |
US10627396B2 (en) | 2016-01-29 | 2020-04-21 | Vanderbilt University | Free-solution response function interferometry |
JP7502328B2 (ja) * | 2019-04-12 | 2024-06-18 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング | プローブ表面のコーティングの検査方法 |
US20220406583A1 (en) * | 2021-06-18 | 2022-12-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deposition system and method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2338129A (en) * | 1941-12-19 | 1944-01-04 | Howard R Moore | Method of determining the rate of drying of coatings |
US3974678A (en) * | 1975-03-05 | 1976-08-17 | Conchemco, Incorporated | Automatic paint cure tester |
JPS5292750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-12-31 | 1977-07-11 |
-
1981
- 1981-08-22 JP JP56131921A patent/JPS5833106A/ja active Granted
- 1981-12-01 US US06/326,675 patent/US4443106A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4443106A (en) | 1984-04-17 |
JPS5833106A (ja) | 1983-02-26 |