JPS6342724B2 - - Google Patents
Info
- Publication number
- JPS6342724B2 JPS6342724B2 JP2962082A JP2962082A JPS6342724B2 JP S6342724 B2 JPS6342724 B2 JP S6342724B2 JP 2962082 A JP2962082 A JP 2962082A JP 2962082 A JP2962082 A JP 2962082A JP S6342724 B2 JPS6342724 B2 JP S6342724B2
- Authority
- JP
- Japan
- Prior art keywords
- address
- image sensor
- counter
- flatness
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 35
- 238000012937 correction Methods 0.000 claims description 26
- 238000012545 processing Methods 0.000 claims description 18
- 238000012360 testing method Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 21
- 238000004364 calculation method Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000000007 visual effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962082A JPS58146805A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
| US06/449,733 US4627733A (en) | 1981-12-25 | 1982-12-14 | Flatness measuring apparatus |
| DE19823247238 DE3247238A1 (de) | 1981-12-25 | 1982-12-21 | Ebenheitsmessgeraet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962082A JPS58146805A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58146805A JPS58146805A (ja) | 1983-09-01 |
| JPS6342724B2 true JPS6342724B2 (de) | 1988-08-25 |
Family
ID=12281122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2962082A Granted JPS58146805A (ja) | 1981-12-25 | 1982-02-24 | 平面度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146805A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3869527A1 (de) | 2020-02-18 | 2021-08-25 | Schaltbau GmbH | Schaltgerät mit zumindest zwei miteinander kommunizierenden löschbereichen |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197555A (ja) * | 1984-10-19 | 1986-05-16 | Tokyo Optical Co Ltd | 表面検査装置 |
-
1982
- 1982-02-24 JP JP2962082A patent/JPS58146805A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3869527A1 (de) | 2020-02-18 | 2021-08-25 | Schaltbau GmbH | Schaltgerät mit zumindest zwei miteinander kommunizierenden löschbereichen |
| US11615929B2 (en) | 2020-02-18 | 2023-03-28 | Schaltbau Gmbh | Switching device with at least two intercommunicating extinguishing areas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58146805A (ja) | 1983-09-01 |
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