JPS6342517Y2 - - Google Patents

Info

Publication number

JPS6342517Y2

JPS6342517Y2 JP1983083165U JP8316583U JPS6342517Y2 JP S6342517 Y2 JPS6342517 Y2 JP S6342517Y2 JP 1983083165 U JP1983083165 U JP 1983083165U JP 8316583 U JP8316583 U JP 8316583U JP S6342517 Y2 JPS6342517 Y2 JP S6342517Y2

Authority

JP

Japan

Prior art keywords

cylindrical

dielectric layer

semiconductor

capacitors

capacitance

Prior art date

1983-05-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000003990 capacitor Substances 0.000 claims description 28
• 239000004065 semiconductor Substances 0.000 claims description 23
• 239000000919 ceramic Substances 0.000 claims description 9
• 239000004020 conductor Substances 0.000 claims description 4
• 239000000463 material Substances 0.000 description 7
• 239000000843 powder Substances 0.000 description 6
• 238000010405 reoxidation reaction Methods 0.000 description 5
• 238000004519 manufacturing process Methods 0.000 description 4
• 230000010354 integration Effects 0.000 description 3
• 239000002994 raw material Substances 0.000 description 3
• 239000004372 Polyvinyl alcohol Substances 0.000 description 2
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000007254 oxidation reaction Methods 0.000 description 2
• 229920002451 polyvinyl alcohol Polymers 0.000 description 2
• 238000002360 preparation method Methods 0.000 description 2
• 229910052709 silver Inorganic materials 0.000 description 2
• 239000004332 silver Substances 0.000 description 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• 229910010413 TiO 2 Inorganic materials 0.000 description 1
• 239000007864 aqueous solution Substances 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 239000003985 ceramic capacitor Substances 0.000 description 1
• 229910010293 ceramic material Inorganic materials 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 239000003989 dielectric material Substances 0.000 description 1
• 239000007772 electrode material Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 230000001590 oxidative effect Effects 0.000 description 1
• 229920003023 plastic Polymers 0.000 description 1
• 238000010298 pulverizing process Methods 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1