JPS6342362A - Production of surface coated steel material - Google Patents
Production of surface coated steel materialInfo
- Publication number
- JPS6342362A JPS6342362A JP61184678A JP18467886A JPS6342362A JP S6342362 A JPS6342362 A JP S6342362A JP 61184678 A JP61184678 A JP 61184678A JP 18467886 A JP18467886 A JP 18467886A JP S6342362 A JPS6342362 A JP S6342362A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- steel
- ion plating
- base material
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 33
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 26
- 239000010959 steel Substances 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010410 layer Substances 0.000 claims abstract description 41
- 238000007733 ion plating Methods 0.000 claims abstract description 24
- 239000011247 coating layer Substances 0.000 claims abstract description 13
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 6
- 230000000737 periodic effect Effects 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 abstract description 18
- 239000002184 metal Substances 0.000 abstract description 18
- 150000002500 ions Chemical class 0.000 abstract description 12
- 150000001875 compounds Chemical class 0.000 abstract description 7
- 238000010891 electric arc Methods 0.000 abstract description 7
- 229910000639 Spring steel Inorganic materials 0.000 abstract description 2
- 229910000746 Structural steel Inorganic materials 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 65
- 239000007789 gas Substances 0.000 description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 17
- 238000005121 nitriding Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 12
- 239000002585 base Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000010849 ion bombardment Methods 0.000 description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- 229910001315 Tool steel Inorganic materials 0.000 description 4
- 238000005256 carbonitriding Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 238000005255 carburizing Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- -1 nitrogen ions Chemical class 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000705 Fe2N Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical group 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は硬質の被覆層を設けた表面被覆鋼材の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to a method for manufacturing a surface-coated steel material provided with a hard coating layer.
（従来の技術）
工具や金型などの鋼材の表面を改質する方法としては、
表面に窒化層、炭化層あるいは炭窒化層（これらを以下
表面硬化層という）を形成して鋼材の表面を硬化する表
面硬化法、およびＰＶＤ法やＣＶＤ法により鋼材の表面
に硬質被膜を形成する方法がある。しかしながら、表面
に硬質被膜を形成した場合には、これらの被膜は脆いた
め剥離が生じ易く、一旦このような剥離が生じると柔ら
かい下地の摩耗が進行するという問題がある。そこで、
その解決法として、これらの表面改質法の複合、すなわ
ち、鋼材の表面を硬化した後に鋼材の表面に硬質被膜を
形成する方法が、特開昭５８−６４３７７号公報に提案
されている。この方法は、真空容器内に高速度工具鋼あ
るいは合金工具鋼の工具母材を保持してグロー放電によ
りその表面に窒化層あるいは炭窒化層を形成した後、引
続き大気から遮断して同一容器内でイオンプレーティン
グ法によって前記窒化層あるいは炭窒化層の上にＩＶａ
族元素あるいはＶａ族元素の炭化物、窒化物および炭窒
化物の１種または２種以上の被覆層を形成することを特
徴とする表面被覆工具の製造方法である。(Conventional technology) As a method for modifying the surface of steel materials such as tools and molds,
A surface hardening method in which the surface of a steel material is hardened by forming a nitrided layer, a carbonized layer, or a carbonitrided layer (hereinafter referred to as a hardened surface layer) on the surface, and a hard coating is formed on the surface of the steel material by a PVD method or a CVD method. There is a way. However, when a hard coating is formed on the surface, these coatings are brittle and are likely to peel off, and once such peeling occurs, there is a problem in that the wear of the soft underlying layer progresses. Therefore,
As a solution to this problem, a combination of these surface modification methods, that is, a method in which a hard coating is formed on the surface of the steel material after the surface of the steel material is hardened, is proposed in JP-A-58-64377. In this method, a tool base material of high-speed tool steel or alloy tool steel is held in a vacuum container and a nitrided or carbonitrided layer is formed on its surface by glow discharge. IVa is deposited on the nitride layer or carbonitride layer by ion plating.
This is a method for manufacturing a surface-coated tool, characterized by forming a coating layer of one or more types of carbides, nitrides, and carbonitrides of group elements or Va group elements.
（発明が解決しようとする問題点）
しかし、上記特開昭５８−６４３７７号公報に記載の方
法では表面硬化法としてはグロー放電を利用する方法、
すなわちイオンを利用する表面硬化法を利用しているが
、この方法に用いられる装置は普及率が低く、維持、運
転のコストが高くつく。一方、その他の公知の表面硬化
法であるガスを用いる方法や熔融塩を利用する方法など
に用いられる装置は、十分普及して技術が成熟しており
、利用が安価ですむが、上記公報の方法はこれらの表面
硬化法は利用することができない欠点がある。(Problems to be Solved by the Invention) However, in the method described in JP-A-58-64377, the surface hardening method uses glow discharge;
That is, a surface hardening method using ions is used, but the equipment used for this method is not widely used, and the maintenance and operation costs are high. On the other hand, the equipment used for other known surface hardening methods, such as the method using gas or the method using molten salt, is widely used and the technology has matured, making it inexpensive to use. The method has the disadvantage that these surface hardening methods cannot be utilized.
また、この方法では表面硬化処理を施した鋼材の表面が
酸化被膜その他によって汚染されるのを防くために一貫
して大気から遮断する必要があるため同一装置で表面硬
化法と次の硬質被膜を形成する方法を行わなければなら
ない。このために装置に導入するガス系が複雑となり、
またその操作も繁雑であるという欠点がある。In addition, in this method, the surface of the steel material subjected to surface hardening treatment must be consistently shielded from the atmosphere to prevent it from being contaminated by oxide film and other substances. must be done in a way that forms the For this reason, the gas system introduced into the equipment becomes complicated.
Another disadvantage is that the operation is complicated.
また、−ａに、鋼材に表面硬化法により処理を施すと多
種類の相が生成するが、これらの相の中には後にイオン
プレーティングにより形成される被膜層の剥離等の原因
になる相も存在ずろ。例えば窒化処理においては表面付
近に窒素の拡散層が生じるが、さらに表面近傍ではε相
と言われる鉄と窒素の化合物相が生じ、さらに最表面に
は多孔質の層が生じる。この多孔質の層は大気に触れる
と酸化され易く、黒化膜となる。これらε相や黒化膜の
ような化合物類が存在する表面にイオンプレーティング
にて硬質膜を形成させても剥離が生じ易くなる。黒化膜
の生成は空気を遮断することにより防止できるが、ε相
を除去することは難しい。したがって母材を表面硬化法
による処理後に大気から遮断したまま直接イオンプレー
ティング法を行なっても不良品が多く出るという問題が
ある。In addition, -a, many types of phases are generated when steel materials are treated by the surface hardening method, and some of these phases may cause peeling of the coating layer later formed by ion plating. Doesn't even exist. For example, in nitriding treatment, a nitrogen diffusion layer is generated near the surface, but further near the surface, a compound phase of iron and nitrogen called the ε phase is generated, and furthermore, a porous layer is generated on the outermost surface. This porous layer is easily oxidized when exposed to the atmosphere, resulting in a blackened film. Even if a hard film is formed by ion plating on a surface where compounds such as the ε phase or blackened film are present, peeling is likely to occur. Although the formation of a blackened film can be prevented by blocking air, it is difficult to remove the ε phase. Therefore, even if the ion plating method is performed directly on the base material while it is shielded from the atmosphere after being treated by the surface hardening method, there is a problem that many defective products will be produced.
そこで、本発明の目的は、いずれの方法により形成され
た表面硬化層にも適用可能であり、しかも該表面硬化層
上に耐久性を有する堅牢な硬質被覆層をイオンプレーテ
ィング法により形成することができる表面被覆鋼材の製
造方法を提供することにある。Therefore, an object of the present invention is to form a durable and robust hard coating layer on the hardened surface layer by ion plating, which is applicable to the hardened surface layer formed by any method. The object of the present invention is to provide a method for manufacturing surface-coated steel materials that can be used to produce surface-coated steel materials.
（問題点を解決するための手段）
本発明は、前記問題点を解決する手段として、表面に窒
化層、炭化層または炭窒化層を形成した鋼母材を金属イ
オンによりボンバードメント処理し、次に、イオンプレ
ーティング法により周期律表ＴＶａＶａ族元素びＶａ族
元素の窒化物、炭化物および炭窒化物から選ばれる１種
または２種以上の被覆層を前記ボンバードメント処理を
施した窒化層、炭化層または炭窒化層の上に形成するこ
とからなる表面被覆鋼材の製造方法を提供するものであ
る。(Means for Solving the Problems) As a means for solving the above-mentioned problems, the present invention bombards a steel base material with a nitrided layer, a carbonized layer, or a carbonitrided layer on its surface with metal ions, and then A nitrided layer, a carbonized layer, which has been subjected to the bombardment treatment, is formed by an ion plating method using one or more types of coating layer selected from nitrides, carbides, and carbonitrides of elements of group TVaVa and group Va of the periodic table. The present invention provides a method for manufacturing a surface-coated steel material, which comprises forming a surface coated steel material on a layer or a carbonitrided layer.
本発明の方法に用いられる鋼母材としては、例えば構造
用鋼、ばね鋼、軸受鋼、工具鋼、ステンレス鋼等が挙げ
られる。Examples of the steel base material used in the method of the present invention include structural steel, spring steel, bearing steel, tool steel, and stainless steel.
母材表面に窒化層、炭化層または炭窒化層の表面硬化層
を形成する方法は特に限定されず、公知の表面硬化法、
すなわち熔融塩を用いる方法、ガスを用いる方法あるい
はイオンを用いる方法のどれでも良い。熔融塩を用いる
方法は、一般には塩浴窒化法といわれるもので、ＸＣＮ
、 ＸＣＮ０． ＸＺＣＯ：１ （コこでＸはアルカリ
金属）で示される化合物の熔融浴中に被処理物を浸して
、これら化合物が分解して生じた炭素や窒素を被処理物
中に拡散させるものである。ガスを用いる方法は、−ｇ
にガス窒化および浸炭あるいはガス軟窒化および浸炭と
いわれるもので、ＮＨｆｆやＣＯ等の気相中に被処理物
を入れて加熱し、これらガスの熱分解により生じた炭素
や窒素を被処理物中に拡散させるものである。The method for forming a hardened surface layer such as a nitrided layer, a carbonized layer, or a carbonitrided layer on the surface of the base material is not particularly limited, and may be any known surface hardening method,
That is, any method using molten salt, gas, or ions may be used. The method using molten salt is generally called salt bath nitriding method, and XCN
, XCN0. The workpiece is immersed in a molten bath of a compound represented by XZCO:1 (where X is an alkali metal), and the carbon and nitrogen produced by the decomposition of these compounds are diffused into the workpiece. . The method using gas is -g
This is called gas nitriding and carburizing or gas soft nitriding and carburizing, in which the material to be treated is placed in a gas phase of NHff, CO, etc. and heated, and the carbon and nitrogen produced by thermal decomposition of these gases are removed from the material. It is meant to spread to.
イオンを用いる方法は、−Ｃにイオン窒化あるいは浸炭
といわれるもので、ＮＨ−ｘや炭化水素ガス中で被処理
物と装置容器壁の間に直流電圧を印加し、グロー放電を
起こさせてこれらのガスを分解、イオン化し、生じた炭
素イオンあるいは窒素イオンを電界により被処理物に衝
突させる方法である。The method using ions is called ion nitriding or carburizing of -C, in which a DC voltage is applied between the object to be treated and the wall of the equipment container in NH-x or hydrocarbon gas to cause glow discharge. This is a method in which the gas is decomposed and ionized, and the resulting carbon or nitrogen ions collide with the object to be processed using an electric field.
表面硬化層を形成した母材を次のボンバードメント処理
に供するに当っては、母材を大気から特に遮断する必要
はない。したがって、勿論、母材表面に硬化層を形成し
た後、同一反応容器内でそのまま次工程に供することが
できるが、一旦反応容器から大気中に取出した後に次工
程に供することもできる。表面硬化層の形成を、熔融塩
を用いる方法、またはガスを用いる方法により行なった
場合は、通常、次工程に移る際に大気に触れるることは
避は難いが何ら問題はない。When the base material on which the surface hardened layer is formed is subjected to the next bombardment treatment, there is no particular need to shield the base material from the atmosphere. Therefore, of course, after forming a hardened layer on the surface of the base material, it can be directly subjected to the next process in the same reaction vessel, but it is also possible to once take it out from the reaction vessel into the atmosphere and then subject it to the next process. When the surface hardening layer is formed by a method using a molten salt or a method using a gas, it is usually unavoidable that the layer is exposed to the atmosphere when moving to the next step, but there is no problem.
次にイオンボンバードメント処理およびイオンプレーテ
ィングは通常同一装置で連続して行なうことが好ましく
、公知のいずれのイオンプレーティング装置をも使用す
ることができる。イオンプレーティング装置の構成は、
一般に金属を蒸発させる手段、蒸発した金属をイオン化
する手段、イオン化した金属を電界により加速する手段
および反応性ガスを導入する手段より成る。Next, it is preferable that the ion bombardment treatment and the ion plating be carried out continuously in the same apparatus, and any known ion plating apparatus can be used. The configuration of the ion plating device is
Generally, it consists of means for vaporizing the metal, means for ionizing the vaporized metal, means for accelerating the ionized metal by an electric field, and means for introducing a reactive gas.
本発明における金属イオンによるボンバードメント処理
は、次のイオンプレーティングの前処理として行われる
ものであり、金属の蒸発、イオン化、加速を行ない、高
エネルギーを持った金属イオンを硬化層表面に衝突させ
る工程である。イオンボンバードメント処理に用いられ
る金属としては、例えば、次工程で用いる周期律表ＩＶ
ａ族およびＶａ族の元素、Ｆｅ、 Ｃｒ、 Ｎｉ、 Ｇ
ｏ等が挙げられる。The bombardment treatment using metal ions in the present invention is performed as a pretreatment for the next ion plating, and involves evaporating, ionizing, and accelerating the metal, and causing high-energy metal ions to collide with the surface of the hardened layer. It is a process. Examples of metals used in the ion bombardment process include metals from the periodic table IV used in the next process.
Group A and Va group elements, Fe, Cr, Ni, G
Examples include o.
これらは、１種または２種以上使用することができる。These can be used alone or in combination of two or more.
金属の１発およびイオン化の方法は特に制限されず、金
属を蒸発させる方法は、イオンプレーティング装置に備
わった公知の抵抗加熱や電子銃加熱などのどれでもよく
、蒸発した金属のイオン化も公知のアーク放電、グロー
放電、高周波放電、およびイオン化電極を用いる方法や
ホロカソード法などのどれでもよい。ここで、特にアー
ク放電型のイオンプレーティング方式は金属の蒸発とイ
オン化を同時に行なう方式であり、他の方式に比べて金
属のイオン化効率が高いため、本発明のイオンボンバー
ドメント処理に適し、１〜１０分程度で所期の効果が得
られる。There are no particular restrictions on the method of one shot and ionization of the metal, and the method of evaporating the metal may be any known resistance heating or electron gun heating provided in the ion plating apparatus, and the ionization of the evaporated metal may also be performed using any known method. Any method such as arc discharge, glow discharge, high frequency discharge, a method using an ionizing electrode, or a hollow cathode method may be used. Here, in particular, the arc discharge type ion plating method is a method that simultaneously evaporates and ionizes metal, and has a higher metal ionization efficiency than other methods, so it is suitable for the ion bombardment treatment of the present invention. The desired effect can be achieved in about 10 minutes.
イオン化した金属を加速する電界については、電圧の値
として１ｏｏｖから２０００Ｖが好ましく、特に好まし
くは２００■から１５００Ｖの値とする。The voltage value of the electric field for accelerating the ionized metal is preferably 100V to 2000V, particularly preferably 200V to 1500V.
金属イオンによるボンバードメント処理中の雰囲気は原
則としては雰囲気ガスを用いない高真空下で行なうが、
場合によっては１０−’Ｔｏｒｒから１０Ｔｏｒｒの圧
力の雰囲気ガス下で行なってもよい。これらの雰囲気ガ
スの種類としてはＨｅ＋ Ｎｅ＋ Ａｒ＋ ＮＺ＋Ｈ２
あるいは炭化水素などが挙げられ、これらの２種以上の
混合ガスでもよい。これらの雰囲気ガスを用いると、加
速用の電界によるグロー放電によってガスイオンもイオ
ン化し金属イオンと共に硬化層表面に衝突するが、本発
明によるボンバードメント処理の本質的効果は金属イオ
ンによるボンバードメント処理による。The atmosphere during bombardment treatment with metal ions is, in principle, carried out under a high vacuum without using any atmospheric gas.
Depending on the case, it may be carried out under an atmospheric gas pressure of 10-' Torr to 10 Torr. The types of these atmospheric gases are He+ Ne+ Ar+ NZ+H2
Alternatively, hydrocarbons may be used, and a mixed gas of two or more of these gases may be used. When these atmospheric gases are used, the gas ions are also ionized by the glow discharge caused by the accelerating electric field and collide with the surface of the hardened layer together with the metal ions, but the essential effect of the bombardment treatment according to the present invention is due to the bombardment treatment using metal ions. .
次に、ＩＶａ族すなわちＴｉ、 Ｚｒ、 ＨｆおよびＶ
ａ族すなわちＶ、 Ｎｂ、 Ｔａの炭化物、窒化物およ
び炭窒化物の１種または２種以上の被覆層がイオンプレ
ーティング法によりイオンボンバードメント処理後の表
面に形成される。このイオンプレーティング法は公知の
もので、金属を蒸発させる方法や蒸発した金属をイオン
化する方法は、前記したイオンボンバードメント処理に
おいて述べたと同様の方法でよいが、他の、イオン化し
た金属を加速する方法や反応性ガスを４人する方法は前
記したイオンボンバードメント処理における方法と相違
する。即ち、イオン化した金属を加速する電界としては
電圧の値として５０Ｖから７００Ｖが好ましく、さらに
好ましくは１００Ｖから５００Ｖの値とする。反応性ガ
スとしては、イオンプレーティング法にて炭化物や窒化
物を生成させるための反応性ガス、すなわち、Ｎ、、Ｎ
Ｈ，、炭化水素類あるいは炭素と窒素を含んだ有機化合
物、例えば（Ｃｔｌｌ）Ｊなどである。反応性ガスの圧
力としては、用いる反応性ガスの種類により異なるが、
一般に１０−３〜１ＱＴｏｒｒの圧力で行なえる。Next, group IVa i.e. Ti, Zr, Hf and V
A coating layer of one or more types of carbides, nitrides, and carbonitrides of Group A, that is, V, Nb, and Ta, is formed on the surface after the ion bombardment treatment by an ion plating method. This ion plating method is a well-known method, and the method of vaporizing the metal and the method of ionizing the vaporized metal may be the same as that described in the ion bombardment process, but other ionized metals may be accelerated. The method of applying reactive gas and the method of using four reactive gases are different from the method in the ion bombardment process described above. That is, the voltage value of the electric field for accelerating the ionized metal is preferably 50V to 700V, more preferably 100V to 500V. Reactive gases include reactive gases for generating carbides and nitrides in the ion plating method, i.e., N, N,
H, hydrocarbons or organic compounds containing carbon and nitrogen, such as (Ctll)J. The pressure of the reactive gas varies depending on the type of reactive gas used, but
Generally, it can be carried out at a pressure of 10-3 to 1 QTorr.
イオンプレーティング法により形成される硬質被覆層の
厚さは、０．１〜１０μｍが好ましく、通常１〜５μｍ
に形成すればよい。The thickness of the hard coating layer formed by the ion plating method is preferably 0.1 to 10 μm, and usually 1 to 5 μm.
It should be formed as follows.
鋼母材表面に表面硬化法により窒化層、炭化層または炭
窒化層の表面硬化層を形成し、さらにこれらの層を大気
に接触させることにより、母材表面にはこれら表面硬化
層のほかに、母材金属成分と炭素および／または窒素と
からなる他の化合物類（例えば、前記の鉄と窒素からな
るε相）や酸化物が生成する。本発明の方法によると、
金属イオンによるイオンボンバードメント処理により、
表面硬化層がスパッタリングされ、前記副生したε相等
の化合物類や酸化物が除去され、これらによる悪影響が
除かれるものと考えられる。また、さらに、ボンバード
メント処理により、高い運動エネルギーを持った金属イ
オンが被処理物に衝突することにより金属イオンが被処
理物内部に打ち込まれ、後工程のイオンプレーティング
により形成される硬質被膜との密着性をアンカー効果に
より高めるものと考えられる。また、高エネルギーの金
属イオンが被処理物に衝突することにより運動エヱルギ
ーが熱エネルギーに転化して前工程の表面硬化処理によ
り生じた拡散層を再度加熱することにより、さらに深部
にまで広げて表面近傍の高硬度領域を広げるものと推定
される。By forming a hardened surface layer such as a nitrided layer, a carbonized layer, or a carbonitrided layer on the surface of the steel base material using a surface hardening method, and then bringing these layers into contact with the atmosphere, a , other compounds (for example, the above-mentioned ε phase consisting of iron and nitrogen) and oxides are formed which are composed of the base metal component and carbon and/or nitrogen. According to the method of the invention,
Through ion bombardment treatment with metal ions,
It is thought that the surface hardening layer is sputtered and the by-produced compounds such as ε phase and oxides and oxides are removed, and the adverse effects caused by these are eliminated. In addition, through bombardment treatment, metal ions with high kinetic energy collide with the workpiece, and the metal ions are driven into the workpiece, forming a hard coating formed by ion plating in the subsequent process. It is thought that this improves the adhesion due to the anchor effect. In addition, when high-energy metal ions collide with the workpiece, kinetic energy is converted into thermal energy, which reheats the diffusion layer created by the surface hardening treatment in the previous process, spreading it deeper into the surface. It is estimated that this will expand the nearby high hardness region.
以下、本発明を実施例により説明する。 The present invention will be explained below using examples.
実施例
高速度工具鋼５ＫＨ−５１（ＪＩＳ Ｇ ４４０３）の
材質で、直径２５ｍ＋ｎ、長さ５０ｍｍのシリンダ状部
材（試料１）を、イオン窒化装置内で処理温度５７０°
Ｃ、ガス組成Ｎ２／ｌ＋２＝１、全圧６ Ｔｏｒｒの条
件下でイオン窒化した（試料２）。装置から大気中に取
り出したところ、部材の表面は黒化膜で覆われるに至っ
た。Example A cylindrical member (sample 1) made of high-speed tool steel 5KH-51 (JIS G 4403) and having a diameter of 25 m+n and a length of 50 mm was treated in an ion nitriding apparatus at a temperature of 570°.
C, ion nitriding was performed under the conditions of gas composition N2/l+2=1 and total pressure of 6 Torr (Sample 2). When taken out of the device into the atmosphere, the surface of the member was covered with a blackened film.
この試料２について、断面を光学顕微鏡で観察したとこ
ろ、第２図に示す顕微鏡写真（ｘ ８００）のとおり最
表面のごく薄い黒化膜の下にε相（八）の存在が認めら
れた（Ｘ線回折によりＦｅ２Ｎ、 Ｆｅ、Ｎからなるε
相を確認した）。When the cross section of this sample 2 was observed with an optical microscope, the presence of ε phase (8) was observed under the extremely thin blackened film on the outermost surface, as shown in the micrograph (x 800) shown in Figure 2. ε consisting of Fe2N, Fe, and N was determined by X-ray diffraction.
phase was confirmed).
窒化層を形成した試料２を、次にアーク放電型イオンプ
レーティング装置にて１０−’Ｔｏｒｒの真空下、チタ
ン金属陰極と器壁の陽極の間に約３０Ｖの電圧を印加し
てアーク放電を生起させ、陰極のチタン表面の微小な点
でチタンの蒸発およびイオン化を起こさせた。このとき
の放電により流れた電流は約５ＯＡであった。次に、バ
イアス電圧を１０００ Ｖに設定し、チタンイオンによ
るボンバードメント処理を２分間行なった。更に、チタ
ン蒸発ｇの放を状態は前工程のボンバードメント処理と
同一の条件にしたまま、バイアス電圧を４００Ｖに下げ
、反応性ガスとして窒素を１０−”Ｔｏｒｒ導入して窒
化チタンの被覆を２μｍ形成させた（試料３）。Sample 2 on which the nitrided layer was formed was then subjected to arc discharge by applying a voltage of about 30 V between the titanium metal cathode and the anode on the chamber wall under a vacuum of 10-' Torr using an arc discharge type ion plating device. This caused evaporation and ionization of titanium at minute points on the titanium surface of the cathode. The current flowing due to the discharge at this time was about 5OA. Next, the bias voltage was set to 1000 V, and bombardment treatment with titanium ions was performed for 2 minutes. Furthermore, the bias voltage was lowered to 400V, nitrogen was introduced as a reactive gas at 10-'' Torr, and the coating of titanium nitride was coated with a thickness of 2 μm, while keeping the release of titanium evaporated under the same conditions as in the previous bombardment process. (Sample 3).
ボンバードメント処理前の試料２は黒化膜で覆われてい
たにもかかわらず、剥離の無い均一な窒化チタンの被覆
が得られた。窒化チタン層で被覆した試料３の断面を前
記と同様にして、観察したところ、第１図に示す光学顕
１故鏡写真（ｘ８００）のとおり窒化チタンの被膜（Ｂ
）の下にはε相及び黒化膜の存在は認められなかった（
Ｘ線回折により、ε相の不存在及びＴｉＮ被覆を確認し
た）。Even though sample 2 before bombardment treatment was covered with a blackened film, a uniform titanium nitride coating without peeling was obtained. When the cross section of sample 3 coated with the titanium nitride layer was observed in the same manner as described above, it was found that the titanium nitride coating (B
) The presence of ε phase and blackened film was not observed under (
The absence of an ε phase and the TiN coating were confirmed by X-ray diffraction).
実施例で用いた試料１．２および３について、荷重２５
ｇでのビッカース硬度を測定した。表１に結果を示す。For samples 1.2 and 3 used in the example, a load of 25
The Vickers hardness in g was measured. Table 1 shows the results.
表 １
比較例１
実施例での試料２について表面に生じた黒化膜をパフ研
磨により取り除いた。この試料について別途断面観察を
行なったところ、黒化膜は除かれていたがε相の存在は
認められた。Table 1 Comparative Example 1 The blackened film formed on the surface of Sample 2 in Example was removed by puff polishing. A separate cross-sectional observation of this sample revealed that the blackened film had been removed, but the presence of the ε phase was observed.
この窒化後に黒化膜を除去した試料を、アーク放電型イ
オンプレーティング装置内で、チタン蒸発源は点火しな
い状態で、計ガスを１０−”Ｔｏｒｒｉ人し、バイアス
電圧１ｏｏｏｖにてガスイオンによるボンバードメント
処理を１０分間行なった後、実施例と同様に窒化チタン
の被覆を行なったが、処理後の被膜には剥離が生じてい
た。この試料にはε相の存在が認められた。The sample from which the blackened film had been removed after nitriding was bombarded with gas ions at a bias voltage of 100V in an arc discharge type ion plating device, with the titanium evaporation source not ignited, and with a meter gas of 10 mm. After 10 minutes of treatment, a titanium nitride coating was performed in the same manner as in the example, but peeling occurred in the coating after treatment.The presence of an ε phase was observed in this sample.
比較例２
実施例での試料１をアーク放電型イオンプレーティング
装置に入れ、実施例と同一条件でイオン窒化を行なった
。その後、容器から試料を出さずに引き続いて排気を行
ない比較例１と同様にＡｒガスイオンによるボンバード
メント処理を行なった後、実施例と同様な窒化チタンの
被覆を行なったが、処理後の被膜には剥離が認められた
。この試料は外観上は剥離した部分に多孔質層は認めら
れなかったが、断面組織観察ではε相が認められた。Comparative Example 2 Sample 1 in Example was placed in an arc discharge type ion plating apparatus, and ion nitriding was performed under the same conditions as in Example. After that, the container was continuously evacuated without taking out the sample, and bombardment treatment with Ar gas ions was performed in the same manner as in Comparative Example 1. After that, titanium nitride coating was performed in the same manner as in the example, but the coating after treatment was Peeling was observed. In this sample, no porous layer was observed in the peeled part, but an ε phase was observed in cross-sectional microstructural observation.
本発明によると、鋼母材表面の窒化、炭化または炭窒化
による表面硬化効果と、ｒＶａ族またはＶａ族元素の窒
化物、炭化物または炭窒化物からなる硬質被覆層の効果
が複合的に良好に得られ、堅牢かつ耐久性のある表面被
覆鋼材を製造することができる。また、本発明の方法で
は、窒化、炭化または炭窒化の表面硬化工程と次のイオ
ンボンバードメント処理およびイオンプレーティングを
同一反応装置内で連続して行なう必要はなく、使用装置
の複雑化を避けることができ作業の簡便化上有利である
。According to the present invention, the surface hardening effect of the nitriding, carbonitriding, or carbonitriding of the surface of the steel base material and the effect of the hard coating layer made of nitride, carbide, or carbonitride of rVa group or Va group elements are effectively combined. As a result, a robust and durable surface-coated steel material can be produced. Furthermore, in the method of the present invention, it is not necessary to perform the surface hardening process of nitriding, carbonitriding, or carbonitriding, and the subsequent ion bombardment treatment and ion plating in the same reactor, thereby avoiding the complexity of the equipment used. This is advantageous in terms of simplifying the work.
第１図は、本発明の方法により窒化チタン被覆層を表面
に形成した部材の断面の光学顕微鏡写真（Ｘ８００）で
ある。
第２図は、表面をイオン窒化後火気中に取出した部材の
断面の光学顕微鏡写真（ｘ８００）である。
代理人 弁理士 岩見谷 周 志
手続ネ甫正書（方式）
昭和６１年ｒｔ月１７日
１、事件の表示
昭和６１年 特許側 第１８４６７８号２、発明の名称
表面被覆鋼材の製造方法
３、補正をする者
事件との関係 特許出願人
住 所 東京都港区新橋５丁目１１番３号４、代理人
５、補正命令の日付
昭和６１年１０月８日（発送臼１０月２８日）゛７．補
正の内容
（１１明細書第７頁第３行の「触れるる」を、「触れる
」と訂正する。
（２）同第１５真下から３行目及び第１６頁第１行の「
部材の断面」を、いずれも、「部材の表面部の金属組織
を示す該部材の断面」と補正する。FIG. 1 is an optical micrograph (X800) of a cross section of a member whose surface is coated with a titanium nitride coating layer by the method of the present invention. FIG. 2 is an optical micrograph (x800) of a cross section of a member whose surface was taken out into a flame after ion nitriding. Agent Patent Attorney Zhou Iwamiya Procedure Neho (Method) RT 17, 1985 1, Indication of the case 1984 Patent side No. 184678 2, Name of the invention Method for manufacturing surface coated steel materials 3, Amendment Relationship with the case of a person who does ．． Contents of the amendment (“touch” in the third line of page 7 of the specification is corrected to “touch”.
"A cross section of a member" is corrected to "a cross section of the member showing the metallographic structure of the surface portion of the member."
Claims (1)
材を金属イオンによりボンバードメント処理し、次に、
イオンプレーティング法により周期律表IVａ族元素およ
びＶａ族元素の窒化物、炭化物および炭窒化物から選ば
れる１種または２種以上の被覆層を前記のボンバードメ
ント処理を施した窒化層、炭化層または炭窒化層の上に
形成することからなる表面被覆鋼材の製造方法。A steel base material with a nitrided, carbonized, or carbonitrided layer formed on its surface is bombarded with metal ions, and then
A nitrided layer or a carbonized layer in which one or more types of coating layers selected from nitrides, carbides, and carbonitrides of group IVa elements and group Va elements of the periodic table are subjected to the bombardment treatment using an ion plating method. Alternatively, a method for producing a surface-coated steel material comprising forming the coating on a carbonitrided layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61184678A JPH062937B2 (en) | 1986-08-06 | 1986-08-06 | Method for manufacturing surface-coated steel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61184678A JPH062937B2 (en) | 1986-08-06 | 1986-08-06 | Method for manufacturing surface-coated steel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6342362A true JPS6342362A (en) | 1988-02-23 |
| JPH062937B2 JPH062937B2 (en) | 1994-01-12 |
Family
ID=16157447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61184678A Expired - Lifetime JPH062937B2 (en) | 1986-08-06 | 1986-08-06 | Method for manufacturing surface-coated steel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062937B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02125861A (en) * | 1988-11-01 | 1990-05-14 | Shinko Seiki Co Ltd | Formation of coating film on surface of material to be treated |
| JPH02175858A (en) * | 1988-12-27 | 1990-07-09 | Sumitomo Metal Mining Co Ltd | Wear resistant coated steel products and production thereof |
| JPH04103755A (en) * | 1990-08-23 | 1992-04-06 | Sumitomo Metal Mining Co Ltd | Surface coated steel product and its production |
| US5534083A (en) * | 1994-05-04 | 1996-07-09 | Hyundai Motor Co., Ltd. | Method for producing a reinforcing stainless steel wire-aluminum alloy composite structure and a product thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139072U (en) * | 1984-08-13 | 1986-03-12 | 征則 佐藤 | scissors with cutter knife |
| JPS61170473U (en) * | 1985-04-10 | 1986-10-22 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT385058B (en) * | 1946-07-17 | 1988-02-10 | Vni Instrument Inst | METHOD FOR MOUNTING CUTTING TOOLS |
| JPS52111891A (en) * | 1976-03-18 | 1977-09-19 | Honda Motor Co Ltd | Method of surface treatment of metal |
| JPS5772605A (en) * | 1980-10-22 | 1982-05-07 | Tonan Kinzoku Kogyo Kk | Production of hard watch band |
| JPS58500068A (en) * | 1981-01-26 | 1983-01-13 | ブセソユズニイ ナウチノ−イススレドバテルスキイ インストルメンタルニイ インステイチユ−ト | Multilayer coating for metal cutting tools |
| JPS5831078A (en) * | 1981-08-20 | 1983-02-23 | Yoichi Murayama | Method and device for pretreatment of film substrate |
-
1986
- 1986-08-06 JP JP61184678A patent/JPH062937B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139072U (en) * | 1984-08-13 | 1986-03-12 | 征則 佐藤 | scissors with cutter knife |
| JPS61170473U (en) * | 1985-04-10 | 1986-10-22 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02125861A (en) * | 1988-11-01 | 1990-05-14 | Shinko Seiki Co Ltd | Formation of coating film on surface of material to be treated |
| JPH0784642B2 (en) * | 1988-11-01 | 1995-09-13 | 神港精機株式会社 | Method for forming a film on the surface of an object to be treated |
| JPH02175858A (en) * | 1988-12-27 | 1990-07-09 | Sumitomo Metal Mining Co Ltd | Wear resistant coated steel products and production thereof |
| JPH04103755A (en) * | 1990-08-23 | 1992-04-06 | Sumitomo Metal Mining Co Ltd | Surface coated steel product and its production |
| US5534083A (en) * | 1994-05-04 | 1996-07-09 | Hyundai Motor Co., Ltd. | Method for producing a reinforcing stainless steel wire-aluminum alloy composite structure and a product thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062937B2 (en) | 1994-01-12 |
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