JPH02175858A - Wear resistant coated steel products and production thereof - Google Patents
Wear resistant coated steel products and production thereofInfo
- Publication number
- JPH02175858A JPH02175858A JP33025688A JP33025688A JPH02175858A JP H02175858 A JPH02175858 A JP H02175858A JP 33025688 A JP33025688 A JP 33025688A JP 33025688 A JP33025688 A JP 33025688A JP H02175858 A JPH02175858 A JP H02175858A
- Authority
- JP
- Japan
- Prior art keywords
- film
- steel material
- coated steel
- steel products
- crn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 45
- 239000010959 steel Substances 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000012495 reaction gas Substances 0.000 claims abstract description 14
- 150000004767 nitrides Chemical class 0.000 claims abstract description 10
- 238000001704 evaporation Methods 0.000 claims abstract description 6
- 238000007733 ion plating Methods 0.000 claims abstract description 6
- 239000013078 crystal Substances 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 33
- 238000000576 coating method Methods 0.000 claims description 27
- 239000011248 coating agent Substances 0.000 claims description 24
- 239000011651 chromium Substances 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000002244 precipitate Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 abstract description 12
- 238000007254 oxidation reaction Methods 0.000 abstract description 12
- 238000001556 precipitation Methods 0.000 abstract description 8
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000001883 metal evaporation Methods 0.000 description 3
- -1 845C Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005482 strain hardening Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910016523 CuKa Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000746 Structural steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、特に耐摩耗性に優れた被膜によって被覆され
た鋼材及びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention particularly relates to a steel material coated with a coating having excellent wear resistance and a method for manufacturing the same.
〔従来の技術及び発明が解決しようとする課題〕例えば
セラミックス被覆を施した切削工具は、母材の靭性と被
膜の耐摩耗性とにより寿命か著しく向上している。又、
高速度工具鋼、熱間加工用工具又は冷間加工用工具等に
おいては、ＰＶＤ法、特にイオンプレーティング法によ
り鋼材にＴｉＮ被膜を形成したものがこの種の硬質被膜
として清及している。このような加工技術の分野におい
ても、作業の省力化、能率化の要請により高速送り。[Prior Art and Problems to be Solved by the Invention] For example, cutting tools coated with ceramics have significantly improved lifespans due to the toughness of the base material and the wear resistance of the coating. or,
In high-speed tool steels, hot working tools, cold working tools, etc., TiN coatings formed on steel materials by PVD methods, particularly ion plating methods, have become widespread as this type of hard coatings. In the field of processing technology, high-speed feed is required to save labor and improve efficiency.
深切込みによる重切削加工の必要性が益々高（なってき
ている。The need for heavy cutting with deep depth of cut is becoming more and more important.
しかしながら、かかる重切削では加工時の温度が著しく
上昇し、このため高温度で酸化され易いＴｉＮ被膜の場
合、耐酸化性及び耐摩耗性等の工具としての性能は不十
分なものになってしまうという問題があった。However, in such heavy cutting, the temperature during machining increases significantly, and as a result, in the case of a TiN coating that is easily oxidized at high temperatures, the performance as a tool such as oxidation resistance and wear resistance becomes insufficient. There was a problem.
本発明はかかる実情に鑑み、特に耐摩耗性を改善し耐酸
化性に優れているこの種被覆鋼材を提供することを目的
とする。In view of the above circumstances, it is an object of the present invention to provide a coated steel material of this type which has particularly improved wear resistance and excellent oxidation resistance.
〔課題を解決するための手段及び作用〕本発明による耐
摩耗性被覆鋼材の製造方法は、金属クロムを蒸発源とし
及び窒素ガス、アンモニアガス又はこれらの混合ガスを
反応ガスとしてイオンプレーティング法により基板とし
ての鋼材上に窒化物被膜を形成する際、特に上記鋼材に
−５０〜−８００■のバイアス電圧を印加すると共に反
応ガスの圧力を１０ Ｘ １０−３Ｔｏｒｒ以上にする
ことにより行なわれる。このような成膜条件下で行うと
、基板としての鋼材自体の特性を維持したまま、結晶構
造として（２２０）面に最大の回折測定強度を有するＣ
ｒＮ単相の析出相から成る被膜を形成することができる
。かかる被膜の膜厚は好ましくは０．２〜２０μｍであ
る。このＣｒＮは耐摩耗性に優れているため高温状態で
の酸化による被膜の脆性化及び摩耗を防止することがで
きるが、更にＣｒＮ被膜中でのＣｒ、Ｎ及びＣｒの析出
を抑制せしめると共に該ＣｒＮの方位配列を（２２０）
面とすることにより耐摩耗性を向上させることができる
。[Means and effects for solving the problem] The method for manufacturing wear-resistant coated steel according to the present invention is to use ion plating method using metallic chromium as an evaporation source and nitrogen gas, ammonia gas, or a mixed gas thereof as a reaction gas. When a nitride film is formed on a steel material as a substrate, it is carried out by applying a bias voltage of -50 to -800 cm to the steel material and increasing the pressure of the reaction gas to 10.times.10@-3 Torr or more. When film formation is carried out under such conditions, C, which has the maximum diffraction measurement intensity on the (220) plane as a crystal structure, maintains the characteristics of the steel material itself as a substrate.
A film consisting of a single rN precipitated phase can be formed. The thickness of such a coating is preferably 0.2 to 20 μm. Since this CrN has excellent wear resistance, it can prevent the film from becoming brittle and wear due to oxidation at high temperatures, but it also suppresses the precipitation of Cr, N, and Cr in the CrN film, and the CrN The orientation array of (220)
By using a flat surface, wear resistance can be improved.
又、かくして得られたＣｒＮ被膜上に又はこの被膜と鋼
材との間に、ｒＶａ族、Ｖａ族又はＶｉａ族の元素の窒
化物、炭化物又は酸化物から成る第二被膜を形成するこ
とにより、これら二つの被膜の重畳効果によって耐酸化
性及び耐摩耗性を更に向上させることができる。In addition, by forming a second coating consisting of a nitride, carbide or oxide of an element of the rVa group, Va group or Via group on the CrN coating thus obtained or between this coating and the steel material, these The oxidation resistance and abrasion resistance can be further improved by the superimposed effect of the two coatings.
以下、本発明による耐摩耗性被覆鋼材の製造方法の第一
実施例を説明する。先づ本発明方法を実施するための装
置として真空アーク放電型のイオンプレーティング装置
を使用し、又、被覆すべき鋼材として切削用ドリル（φ
＝６ｗ、５Ｋ）（５１）及びファレックス摩耗試験用片
（ｓｕｓ３０４）を用いる。そしてこれらの鋼材を有機
溶剤により洗浄後、真空反応槽内にセットし、この真空
反応槽内の圧力をｌ Ｘ Ｉ Ｏ３Ｔｏｒｒ’以上まで
真空にした後、Ｃｒイオン衝撃による洗浄、加熱を行な
ってＣｒＮ披膜の形成を開始する。被膜を形成すべき金
属蒸発源としてＣｒを用いるが、このときの成膜条件は
、反応ガスとして窒素のみを反応槽内に導入し、その圧
力を７０Ｘ １０−３Ｔｏｒｒとする。Hereinafter, a first embodiment of the method for manufacturing a wear-resistant coated steel material according to the present invention will be described. First, a vacuum arc discharge type ion plating device is used as a device for carrying out the method of the present invention, and a cutting drill (φ
=6w, 5K) (51) and Falex wear test piece (sus304). After cleaning these steel materials with an organic solvent, they were placed in a vacuum reaction tank, and the pressure inside the vacuum reaction tank was evacuated to over lXIO3Torr', and then they were cleaned by Cr ion bombardment and heated to produce CrN. Begins formation of the arytenoid. Cr is used as a metal evaporation source to form a film, and the film forming conditions at this time are that only nitrogen is introduced into the reaction tank as a reaction gas, and the pressure is 70×10 −3 Torr.
上記金属蒸発源に７０Ａの電流を流すことによりＣｒタ
ーゲットから真空アーク放電によりＣｒイオンを放出せ
しめ、一方、上記鋼材に対して一３００ｖのバイアス電
圧を印加する。このような条件下で、鋼材表面にＣｒＮ
を生成させるが、約１時間の成膜反応により膜厚が３μ
ｍの被膜が得られた。更に、この被膜のＸ線回折測定の
結果得られた回折チャートによれば、最大の回折強度を
示すピークが被膜結晶の（２２０）面に存在することが
明らかになった。尚、この測定は、グラファイト（ＯＯ
２）モノクロメータを備えたデイフラクトメータを用い
てＣｕＫａ線によって行った。By passing a current of 70 A through the metal evaporation source, Cr ions are released from the Cr target by vacuum arc discharge, while a bias voltage of -300 V is applied to the steel material. Under these conditions, CrN on the steel surface
However, the film thickness was reduced to 3μ by the film formation reaction for about 1 hour.
A coating of m was obtained. Furthermore, according to the diffraction chart obtained as a result of X-ray diffraction measurement of this coating, it was revealed that the peak showing the maximum diffraction intensity was present on the (220) plane of the coating crystal. Note that this measurement was performed using graphite (OO
2) Conducted with CuKa line using a diffractometer equipped with a monochromator.
ここで上述した成膜条件について、蒸発源としての金属
クロムを蒸発させる方法として抵抗加熱。Regarding the film forming conditions described above, resistance heating is used as a method for evaporating metallic chromium as an evaporation source.
電子銃等、又、蒸発した金属クロムをイオン化する方法
としてアーク放電、グロー放電、高周波放電等何れであ
ってもよ（、反応ガスとして窒素の他にアンモニアガス
又はこれらの混合ガスを選択し得るが、特に上記バイア
ス電圧は−５０〜−８００ｖの範囲、又、成膜反応中の
反応ガスの圧力はｌ ＯＸ １０−”Ｔｏｒｒ以上であ
ることが必要である。Any method such as an electron gun, etc., or arc discharge, glow discharge, high frequency discharge, etc. may be used to ionize the vaporized metal chromium (in addition to nitrogen, ammonia gas or a mixed gas thereof may be selected as the reactive gas. However, in particular, it is necessary that the bias voltage be in the range of -50 to -800V, and that the pressure of the reaction gas during the film forming reaction be 1 OX 10-'' Torr or more.
ところで、ＣｒＮは耐酸化性が大きい物質であり、従っ
てこれにより形成された被膜は高温状態での酸化による
脆性化及び摩耗を防止するために優れた効果を発揮する
が、酸化以外の原因による耐摩耗性の点で十分であると
は言えない。これは、ＣｒＮ被膜中におけるＣｒｒＮ又
はＣｒの析出が強度を低下せしめることによるものであ
り、特に本発明において、Ｘ線回折測定によるＣｒｔＮ
又はＣｒに帰属する最大の回折強度がＣｒＮに帰属する
最大の回折強度の５％以上になると被膜強度が著しく低
下することが判明した。かかるＣｒ。By the way, CrN is a substance with high oxidation resistance, and therefore, the coating formed with it exhibits an excellent effect in preventing embrittlement and wear caused by oxidation at high temperatures, but it has a high resistance to oxidation due to causes other than oxidation. It cannot be said that it is sufficient in terms of abrasion resistance. This is because the precipitation of CrrN or Cr in the CrN coating reduces the strength. In particular, in the present invention, CrtN
Alternatively, it has been found that when the maximum diffraction intensity attributable to Cr becomes 5% or more of the maximum diffraction intensity attributable to CrN, the film strength decreases significantly. Such Cr.
Ｎ又はＣｒの析出と成膜条件との関係について例えば上
記成膜条件のうち反応ガスの圧力をｌ０Ｘ１０−３Ｔｏ
ｒｒ未満及びバイアス電圧を−１００〜−８００Ｖとし
た場合にはＣｒＮ被膜中にＣｒ２Ｎの析出が認められる
ようになり、この場合、ＣｒＮ及びＣｒｚＮの混相状態
になる。又、反応ガスの圧力を１０ Ｘ ｌ ０−３Ｔ
ｏｒｒ未満及びバイアス電圧を−ｔｏｏｖ未満とした場
合にはＣｒが析出してＣｒＮ及びＣｒの混相状態になる
。更に、反応ガスの圧力を１０ Ｘ ｌ Ｏ”３Ｔｏｒ
ｒ以上にした場合であってもバイアス電圧を一５０Ｖ未
満にするとＣｒＮ被膜は（２２０）面以外の方位配列を
有する柱状結晶組織になる結果、被膜の耐摩耗性は劣化
してしまう。一方、バイアス電圧を一８００Ｖ以上にす
ると成膜反応中の鋼材の温度が焼鈍温度に達してしまい
鋼材自体の特性を劣化せしめる結果になる。従って、成
膜条件として前述したようにバイアス電圧が−５０〜−
８００ｖの範囲、又、反応ガスの圧力が１０ ｘ ｌ
Ｏ−３Ｔｏｒｒ以上ということになる。Regarding the relationship between the precipitation of N or Cr and the film forming conditions, for example, among the above film forming conditions, the pressure of the reaction gas is 10X10-3To
When the bias voltage is less than rr and the bias voltage is -100 to -800V, precipitation of Cr2N is observed in the CrN film, and in this case, a mixed phase state of CrN and CrzN occurs. Also, the pressure of the reaction gas is 10X l 0-3T
When the bias voltage is less than orr and the bias voltage is less than -toov, Cr is precipitated and a mixed phase state of CrN and Cr occurs. Furthermore, the pressure of the reaction gas was increased to 10 X l O”3 Torr.
Even when the bias voltage is set to r or higher, if the bias voltage is lower than -50 V, the CrN film becomes a columnar crystal structure having an orientation other than the (220) plane, resulting in deterioration of the wear resistance of the film. On the other hand, if the bias voltage is set to 1800 V or more, the temperature of the steel material during the film forming reaction will reach the annealing temperature, resulting in deterioration of the characteristics of the steel material itself. Therefore, as mentioned above, the film forming conditions are such that the bias voltage is -50 to -
800v range and reaction gas pressure of 10 x l
This means that it is O-3 Torr or more.
本発明方法ではかかる成膜条件を設定することによりＣ
ｒＮＦ＆膜中におけるＣｒ２Ｎ又はＣｒの析出を抑制す
ることができると共に、ＣｒＮ析出相を（２２０）面配
向にすることができる。従って、本発明方法により得ら
れた被覆鋼材は、鋼材自身の特性を維持したまま耐酸化
性の大きいＣｒＮ・被膜の耐摩耗性が著しく改善されて
いる。そこで、かくして製造した被覆鋼材に対して行っ
た性能試験結果を後述する第一比較例との関係において
説明するが、この第一比較例は反応槽内の窒素ガスの圧
力を５ Ｘ Ｉ ０−３Ｔｏｒｒとして行った以外は本
第−実施例と同様な成膜条件であり、そして形成された
被膜のＸ線回折測定の結果によればＣｒｚＮの析出が認
められた。先づ、鋼材として用いた前記切削用ドリルの
切削試験結果は、本発明の場合切削可能回数即ち、ドリ
ル加工により形成できた穴の個数ｎ＝３７０であるのに
対して第一比較例の場合ｎ＝４であった。尚、このとき
の試験条件は被削材： ＳＣＭ４４０． ドリル回転
数＝１５０Ｏｒｐｍ、送り速度： ０．１５ｗ／ ｒ
ｅ ｖ、切込み深さ：２０＋ｎｎであった。又、同様に
鋼材とじて用いた前記摩耗試験用片のファレックス試験
（ＡＳＴＭ−Ｄ２６７０）結果は、本発明の場合耐久時
間Ｔ＝１９１（秒）であるのに対して第一比較例の場合
Ｔ＝１７（秒）であった。これらの試験結果から明らか
なように本発明方法で得られた被覆鋼材は耐摩耗性が格
段に向上しているが、加うるに前述した如くＣｒ２Ｎ及
びＣｒの析出を抑えたＣｒＮ被膜によって耐酸化性が保
証されていて、従ってこの種の被覆鋼材として優れた特
性を有し、これを用いて形成される切削工具等が実用上
優れた性能を発揮することができる。In the method of the present invention, by setting such film forming conditions, C.
Precipitation of Cr2N or Cr in the rNF&film can be suppressed, and the CrN precipitated phase can be oriented in the (220) plane. Therefore, in the coated steel material obtained by the method of the present invention, the wear resistance of the CrN coating, which has high oxidation resistance, is significantly improved while maintaining the characteristics of the steel material itself. Therefore, the performance test results conducted on the coated steel material manufactured in this way will be explained in relation to the first comparative example described later. In this first comparative example, the pressure of nitrogen gas in the reaction tank was The film forming conditions were the same as in this Example except that the film was formed at 3 Torr, and according to the results of X-ray diffraction measurement of the formed film, precipitation of CrzN was observed. First, the cutting test results of the cutting drill used as the steel material show that in the case of the present invention, the number of possible cuts, that is, the number of holes formed by drilling, is n = 370, whereas in the case of the first comparative example. n=4. The test conditions at this time were: work material: SCM440. Drill rotation speed = 150Orpm, feed rate: 0.15w/r
e v, cutting depth: 20+nn. Furthermore, the Falex test (ASTM-D2670) result of the wear test piece, which was similarly used with steel materials, shows that in the case of the present invention, the durability time T = 191 (seconds), whereas in the case of the first comparative example. T=17 (seconds). As is clear from these test results, the wear resistance of the coated steel obtained by the method of the present invention is significantly improved, but in addition, as mentioned above, the CrN coating suppresses the precipitation of Cr2N and Cr, which improves the oxidation resistance. Therefore, it has excellent properties as this type of coated steel material, and cutting tools etc. formed using it can exhibit excellent performance in practical use.
尚、上記実施例において被膜の膜厚を３μｍとしたが、
この膜厚は好ましくは０．２〜２０μｍの範囲であれば
良い。即ち、０．２μｍ未満の膜厚では薄過ぎるために
十分な耐摩耗性が確保されず、又、２０μｍ以上の膜厚
になるとＣｒＮ成膜内の残留圧縮応力のために割れが発
生し易くなって、やはり耐摩耗性が劣化してしまう。In addition, although the film thickness of the coating was set to 3 μm in the above example,
The thickness of this film is preferably in the range of 0.2 to 20 μm. That is, if the film thickness is less than 0.2 μm, it is too thin and sufficient wear resistance cannot be ensured, and if the film thickness is 20 μm or more, cracks are likely to occur due to residual compressive stress in the CrN film. However, the wear resistance deteriorates as well.
次に第二実施例を説明するが、この例では、先づ金属蒸
発源としてＴｉを用いて反応ガスとじての窒素ガスの圧
力を３０ Ｘ Ｉ Ｏ−３Ｔｏｒｒとし、池の成膜条件
は第一実施例と同様な条件で膜厚が２μｍの第−成膜と
してのＴｉＮ被膜が鋼材表面に形成される。そして、更
にこのＴｉＮ被膜上に、ターゲットをＣ「として膜厚が
１μｍの第二被膜としてのＣｒＮ被膜を形成する。この
例ではＴｉＮ被膜及びＣｒＮ被膜から成る複層構造の被
膜を有する被覆鋼材が得られるが、第一実施例で説明し
た切削試験及びファレックス試験結果を示せば、前者と
してｎ＝４０７、後者としてＴ＝ １０７（秒）である
。一方、本実施例に対して行った第二比較例では、バイ
アス電圧を一２５Ｖに設定した以外は第一実施例と全く
同様な条件で被膜を形成したが、この場合の被膜のＸ線
回折１）１）＋定の結果によれば方位配列は（２００）
配向になっていた。Next, a second example will be described. In this example, first, Ti is used as a metal evaporation source, the pressure of nitrogen gas as a reaction gas is set to 30 X I O-3 Torr, and the film formation conditions of the pond are set as follows. A TiN film having a thickness of 2 μm as the first film is formed on the surface of the steel material under the same conditions as in the first embodiment. Then, a CrN film as a second film with a film thickness of 1 μm is further formed on this TiN film using a target of C. However, the results of the cutting test and Falex test explained in the first example show that n = 407 (seconds) for the former and T = 107 (seconds) for the latter. In the second comparative example, a film was formed under the same conditions as in the first example except that the bias voltage was set to -25V, but according to the results of X-ray diffraction of the film in this case, The orientation array is (200)
It was oriented.
又、この第二比較例の試験結果は、切削試験としてｎ＝
２．ファレックス試験としてＴ＝７（秒）である。本発
明の場合、上記のように被膜を複層構造にしたことによ
り、夫々の層の被膜の長所を有効に利用することに成功
している。Moreover, the test results of this second comparative example are as follows: n=
2. T=7 (seconds) for Falex test. In the case of the present invention, by forming the coating into a multilayer structure as described above, it is possible to effectively utilize the advantages of each layer of the coating.
尚、上記第二実施例におけるＴｉＮ被膜の代わりに、Ｉ
Ｖａ族、Ｖａ族又はＶＩａ族の元素の窒化物。Incidentally, instead of the TiN film in the second embodiment, I
Nitride of an element of group Va, group Va or group VIa.
炭化物又は酸化物から成る第一被膜を形成してもよ（、
そして第一被膜と第二被膜との形成順序を入れ替えて両
波膜を形成することもできるが、これら何れの場合にお
いても上記と同様な復層構造による効果は得られる。A first coating of carbide or oxide may be formed (
It is also possible to form a double-wave film by changing the order of formation of the first film and the second film, but in either case, the same effect of the multi-layered structure as described above can be obtained.
第三実施例において、第一被膜として、ターゲットにＺ
ｒを使用して窒素ガスの圧力を３０×１０−３Ｔｏｒｒ
とし、他の成膜条件は第一実施例と同様な条件で膜厚が
２μｍのＺｒＮ被膜を形成し、第二被膜としてターゲッ
トにＣｒを使用して同様に膜厚が１μｍのＣｒＮ被膜を
形成することにより複層構造の被膜による被覆鋼材が製
造される。In the third embodiment, Z is applied to the target as the first coating.
Increase the pressure of nitrogen gas to 30 x 10-3 Torr using
A ZrN film with a thickness of 2 μm was formed under the same conditions as in the first example, and a CrN film with a thickness of 1 μm was similarly formed as the second film using Cr as the target. By doing so, a coated steel material with a multi-layered coating is manufactured.
方、第三比較例において、ターゲットにＴｉを使用して
窒素ガス圧力３０ Ｘ ｌ Ｏ−３Ｔｏｒｒ、バイアス
電圧−３００ｖの条件により鋼材表面上に３μｍの膜厚
のＴｉＮ被膜が形成される。更に上記と同様な切削試験
及びファレックス試験結果を示せば、本第三実施例の場
合にはｎ＝２９１． Ｔ＝９１（秒）であるのに対して
第三比較例の場合にはｎ＝１４５．Ｔ＝２１ （秒）
であった。On the other hand, in the third comparative example, a TiN film with a thickness of 3 μm is formed on the surface of the steel material using Ti as a target under conditions of a nitrogen gas pressure of 30 X l O-3 Torr and a bias voltage of -300 V. Furthermore, the same cutting test and Falex test results as above show that n=291. T=91 (seconds), whereas n=145 in the case of the third comparative example. T=21 (seconds)
Met.
成膜を複層構造として形成する際の第一被膜と第二被膜
との組合せは、上記第二実施例及び第三実施例に限らず
、更に具体的な例及びそれらの場合の上述したのと同様
な試験結果を次の表に示す。The combination of the first film and the second film when forming a multilayer structure is not limited to the above-mentioned second and third embodiments, but also includes more specific examples and the above-mentioned combinations in those cases. Similar test results are shown in the table below.
尚、表中のＣｒＮは単相で（２２０）配向になっている
。Note that CrN in the table is a single phase with (220) orientation.
表
上記各実施例において被膜を形成されるべき鋼材として
その他に例えば、５１５Ｃ等の肌焼鋼。In addition to the steel material on which the coating is to be formed in each of the above-mentioned examples, for example, case hardening steel such as 515C is used.
８４５Ｃ等の構造用鋼、５ＵＰＩＯ等のばね鋼。Structural steel such as 845C, spring steel such as 5UPIO.
５ＵＪ２等の軸受鋼、ＳＡＣＭＩ等の窒化鋼、５ＫＤ６
等の熱間加工用工具ｍ、５ＫＤ１）等の冷間加工用工具
鋼、５Ｋ８５１等の高速度鋼、 ５ＪＪＳ３０１等の
耐熱鋼及びＳＵＳ・１）０等の耐食耐酸鋼などの種々の
ものに対して本発明を適用し１辱る。Bearing steel such as 5UJ2, nitriding steel such as SACMI, 5KD6
For hot working tools such as m, cold working tool steels such as 5KD1), high speed steels such as 5K851, heat resistant steels such as 5JJS301, and corrosion and acid resistant steels such as SUS・1)0. Applying the present invention is a shame.
上述したように本発明によれば、この種の被Ｎ鋼材とし
て耐摩耗性を大幅に改善すると共に優れた耐酸化性を保
証することができ、更にかかる鋼材を工具等の材料とし
て用いる場合にはその性能寿命等を著しく向上せしめ得
る等の利点がある。As described above, according to the present invention, it is possible to significantly improve the wear resistance of this type of N steel material and ensure excellent oxidation resistance, and furthermore, when using such steel material as a material for tools etc. has the advantage that its performance life etc. can be significantly improved.
Claims (4)
測定の最大強度を有する結晶構造をした窒化物被膜によ
り被覆された耐摩耗性被覆鋼材。(1) A wear-resistant coated steel material coated with a nitride film having a crystal structure consisting of a single CrN precipitate phase and having the maximum intensity in diffraction measurements on the (220) plane.
あることを特徴とする特許請求の範囲（１）に記載の耐
摩耗性被覆鋼材。(2) The wear-resistant coated steel material according to claim (1), wherein the CrN single-phase coating has a thickness of 0.2 to 20 μm.
族、Ｖａ族又はVIａ族の元素の窒化物、炭化物又は酸化
物から成る被膜が形成されていることを特徴とする特許
請求の範囲（１）に記載の耐摩耗性被覆鋼材。(3) Between or on the CrN single-phase coating, IVa
The wear-resistant coated steel material according to claim (1), characterized in that a coating consisting of a nitride, carbide, or oxide of an element of group Va, group VIa, or group VIa is formed.
アガス又はこれらの混合ガスを反応ガスとしてイオンプ
レーティング法により基板としての鋼材上に窒化物被膜
を形成する方法において、上記鋼材に−５０〜−８００
Ｖのバイアス電圧を印加し、上記反応ガスの圧力を１０
×１０＾−＾３Ｔｏｒｒ以上にして行うことを特徴とす
る耐摩耗性被覆鋼材の製造方法。(4) In a method of forming a nitride film on a steel material as a substrate by an ion plating method using metallic chromium as an evaporation source and nitrogen gas, ammonia gas, or a mixed gas thereof as a reaction gas, the steel material is coated with -50 to -800
A bias voltage of V is applied, and the pressure of the reaction gas is increased to 10
A method for manufacturing a wear-resistant coated steel material, characterized in that the manufacturing method is carried out at a pressure of 10^-^3 Torr or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33025688A JPH02175858A (en) | 1988-12-27 | 1988-12-27 | Wear resistant coated steel products and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33025688A JPH02175858A (en) | 1988-12-27 | 1988-12-27 | Wear resistant coated steel products and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02175858A true JPH02175858A (en) | 1990-07-09 |
Family
ID=18230607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33025688A Pending JPH02175858A (en) | 1988-12-27 | 1988-12-27 | Wear resistant coated steel products and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02175858A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04135107A (en) * | 1990-09-27 | 1992-05-08 | Kanefusa Kk | Wood planing cutter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51120985A (en) * | 1975-04-15 | 1976-10-22 | Nachi Fujikoshi Corp | Method of ion plating a metal surface |
| JPS6319590A (en) * | 1986-07-14 | 1988-01-27 | 財団法人 電力中央研究所 | Fuel-rod coating tube for nuclear reactor |
| JPS6324055A (en) * | 1986-07-17 | 1988-02-01 | Kawasaki Steel Corp | Method for coating ornament with film having high adhesion and homogeneity |
| JPS6342362A (en) * | 1986-08-06 | 1988-02-23 | Sumitomo Metal Mining Co Ltd | Production of surface coated steel material |
| JPH02129360A (en) * | 1988-11-07 | 1990-05-17 | Sumitomo Metal Mining Co Ltd | Corrosion-resistant and wear-resistant coated steel and its manufacture |
-
1988
- 1988-12-27 JP JP33025688A patent/JPH02175858A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51120985A (en) * | 1975-04-15 | 1976-10-22 | Nachi Fujikoshi Corp | Method of ion plating a metal surface |
| JPS6319590A (en) * | 1986-07-14 | 1988-01-27 | 財団法人 電力中央研究所 | Fuel-rod coating tube for nuclear reactor |
| JPS6324055A (en) * | 1986-07-17 | 1988-02-01 | Kawasaki Steel Corp | Method for coating ornament with film having high adhesion and homogeneity |
| JPS6342362A (en) * | 1986-08-06 | 1988-02-23 | Sumitomo Metal Mining Co Ltd | Production of surface coated steel material |
| JPH02129360A (en) * | 1988-11-07 | 1990-05-17 | Sumitomo Metal Mining Co Ltd | Corrosion-resistant and wear-resistant coated steel and its manufacture |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04135107A (en) * | 1990-09-27 | 1992-05-08 | Kanefusa Kk | Wood planing cutter |
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