JPS6342111Y2 - - Google Patents
Info
- Publication number
- JPS6342111Y2 JPS6342111Y2 JP13180384U JP13180384U JPS6342111Y2 JP S6342111 Y2 JPS6342111 Y2 JP S6342111Y2 JP 13180384 U JP13180384 U JP 13180384U JP 13180384 U JP13180384 U JP 13180384U JP S6342111 Y2 JPS6342111 Y2 JP S6342111Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- vacuum
- furnace
- nitrogen gas
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 19
- 238000010791 quenching Methods 0.000 claims description 12
- 230000000171 quenching effect Effects 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 25
- 229910001873 dinitrogen Inorganic materials 0.000 description 25
- 239000007789 gas Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13180384U JPS6147058U (ja) | 1984-08-29 | 1984-08-29 | 真空焼入れ炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13180384U JPS6147058U (ja) | 1984-08-29 | 1984-08-29 | 真空焼入れ炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6147058U JPS6147058U (ja) | 1986-03-29 |
| JPS6342111Y2 true JPS6342111Y2 (en:Method) | 1988-11-04 |
Family
ID=30690377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13180384U Granted JPS6147058U (ja) | 1984-08-29 | 1984-08-29 | 真空焼入れ炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6147058U (en:Method) |
-
1984
- 1984-08-29 JP JP13180384U patent/JPS6147058U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6147058U (ja) | 1986-03-29 |
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