JPS6341156U - - Google Patents

Info

Publication number
JPS6341156U
JPS6341156U JP1986135959U JP13595986U JPS6341156U JP S6341156 U JPS6341156 U JP S6341156U JP 1986135959 U JP1986135959 U JP 1986135959U JP 13595986 U JP13595986 U JP 13595986U JP S6341156 U JPS6341156 U JP S6341156U
Authority
JP
Japan
Prior art keywords
wafer
thickness
sides
linear side
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986135959U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518758Y2 (US20100268047A1-20101021-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986135959U priority Critical patent/JPH0518758Y2/ja
Publication of JPS6341156U publication Critical patent/JPS6341156U/ja
Application granted granted Critical
Publication of JPH0518758Y2 publication Critical patent/JPH0518758Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986135959U 1986-09-04 1986-09-04 Expired - Lifetime JPH0518758Y2 (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986135959U JPH0518758Y2 (US20100268047A1-20101021-C00003.png) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986135959U JPH0518758Y2 (US20100268047A1-20101021-C00003.png) 1986-09-04 1986-09-04

Publications (2)

Publication Number Publication Date
JPS6341156U true JPS6341156U (US20100268047A1-20101021-C00003.png) 1988-03-17
JPH0518758Y2 JPH0518758Y2 (US20100268047A1-20101021-C00003.png) 1993-05-18

Family

ID=31038632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986135959U Expired - Lifetime JPH0518758Y2 (US20100268047A1-20101021-C00003.png) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPH0518758Y2 (US20100268047A1-20101021-C00003.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917441U (ja) * 1982-07-23 1984-02-02 日東電工株式会社 フオトマスク

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917441B2 (ja) * 1975-02-26 1984-04-21 豊田工機株式会社 測定装置を備えた工具台送り制御装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917441U (ja) * 1982-07-23 1984-02-02 日東電工株式会社 フオトマスク

Also Published As

Publication number Publication date
JPH0518758Y2 (US20100268047A1-20101021-C00003.png) 1993-05-18

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