JPS6341116U - - Google Patents
Info
- Publication number
- JPS6341116U JPS6341116U JP1986135101U JP13510186U JPS6341116U JP S6341116 U JPS6341116 U JP S6341116U JP 1986135101 U JP1986135101 U JP 1986135101U JP 13510186 U JP13510186 U JP 13510186U JP S6341116 U JPS6341116 U JP S6341116U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- circuit
- attenuator
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000009966 trimming Methods 0.000 claims 1
Description
図は本考案の一実施例の側面図である。
１……入射レーザ光、２……ビームエキスパン
ダ、３……拡大平行レーザ光、４……反射レーザ
光、５……レーザ光、６……反射レーザ光、７…
…レーザ光、８……ミラー、９……集光レンズ、
１０……被加工物、１１，１２，１３……減衰ミ
ラー、１４，１５，１６……減衰ミラー、１７，
１８……検出器、１９……コントローラ、２０…
…表示器、２１，２２……連結具、２３，２４…
…ロータリーソレノイド、２５，２６……ドライ
ブ回路、２７……コンピユータ、２８，２９……
シヤフト。
The figure is a side view of one embodiment of the present invention. 1... Incident laser beam, 2... Beam expander, 3... Expanded parallel laser beam, 4... Reflected laser beam, 5... Laser beam, 6... Reflected laser beam, 7...
...Laser beam, 8...Mirror, 9...Condensing lens,
10... Workpiece, 11, 12, 13... Attenuation mirror, 14, 15, 16... Attenuation mirror, 17,
18...detector, 19...controller, 20...
...Indicator, 21, 22...Connector, 23, 24...
...Rotary solenoid, 25, 26... Drive circuit, 27... Computer, 28, 29...
Shaft.
Claims (1)
光線を照射して切削し、回路特性や抵抗値を調整
するレーザトリミング装置の前記レーザ光線の光
路上に配置される反射形のレーザ光減衰器に於い
て、前記減衰ミラーからの反射光の電力を測定す
る検出器を具備したことを特徴とするレーザ光減
衰器。 A reflective laser attenuator placed on the optical path of the laser beam of a laser trimming device that cuts the circuit part or substrate-like resistor of a hybrid integrated circuit by irradiating it with a laser beam to adjust the circuit characteristics and resistance value. A laser light attenuator characterized in that it comprises a detector that measures the power of the reflected light from the attenuation mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986135101U JPS6341116U (en) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986135101U JPS6341116U (en) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6341116U true JPS6341116U (en) | 1988-03-17 |
Family
ID=31036969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986135101U Pending JPS6341116U (en) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341116U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146387A (en) * | 1987-12-02 | 1989-06-08 | Tokyo Electron Ltd | Production device for semiconductor |
-
1986
- 1986-09-02 JP JP1986135101U patent/JPS6341116U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146387A (en) * | 1987-12-02 | 1989-06-08 | Tokyo Electron Ltd | Production device for semiconductor |