JPS6451837U - - Google Patents
Info
- Publication number
- JPS6451837U JPS6451837U JP14860787U JP14860787U JPS6451837U JP S6451837 U JPS6451837 U JP S6451837U JP 14860787 U JP14860787 U JP 14860787U JP 14860787 U JP14860787 U JP 14860787U JP S6451837 U JPS6451837 U JP S6451837U
- Authority
- JP
- Japan
- Prior art keywords
- knife edge
- optical disk
- laser beam
- reflector plate
- beam shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
第１図および第２図は本考案のビーム形状測定
装置の一実施例を示す構成図、第３図および第４
図はナイフエツジ法によるビーム形状の測定原理
を示す構成図および波形図である。
１…対物レンズ、１１…サーボ回路、１２…ア
クチユエータ、１３…スピンドルモータ、２…受
光素子、３…ナイフエツジ、４…反射板、４１…
スリツト、４２…ナイフエツジ部。
FIGS. 1 and 2 are block diagrams showing an embodiment of the beam shape measuring device of the present invention, and FIGS.
The figure is a configuration diagram and a waveform diagram showing the principle of beam shape measurement using the knife edge method. DESCRIPTION OF SYMBOLS 1... Objective lens, 11... Servo circuit, 12... Actuator, 13... Spindle motor, 2... Light receiving element, 3... Knife edge, 4... Reflection plate, 41...
Slit, 42...Knife edge part.
Claims (1)
されるレーザ光のビーム形状をナイフエツジ法に
より測定するようにしたビーム形状測定装置にお
いて、光デイスクを回転させるスピンドルモータ
に取り付け可能な円板よりなりレーザ光が照射さ
れる面にフオーカスサーボがかけられる程度の反
射面を有する反射板と、この反射板にナイフエツ
ジ部を形成するように設けられたスリツトとを具
備し、反射板の表面にフオーカスサーボをかけた
状態でこの反射板を回転させ、前記ナイフエツジ
部にレーザ光の照射位置を横切らせるようにして
なるビーム形状測定装置。 In a beam shape measuring device that measures the beam shape of a laser beam irradiated onto an optical disk using the knife edge method in an optical disk inspection device, the laser beam is irradiated using a disc that can be attached to a spindle motor that rotates the optical disk. A reflector plate having a reflective surface to which a focus servo can be applied to the surface to be applied, and a slit provided in the reflector plate to form a knife edge portion, and a focus servo can be applied to the surface of the reflector plate. The beam shape measuring device is constructed by rotating the reflecting plate in a state in which the knife edge portion crosses the irradiation position of the laser beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14860787U JPS6451837U (en) | 1987-09-29 | 1987-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14860787U JPS6451837U (en) | 1987-09-29 | 1987-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451837U true JPS6451837U (en) | 1989-03-30 |
Family
ID=31420079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14860787U Pending JPS6451837U (en) | 1987-09-29 | 1987-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451837U (en) |
-
1987
- 1987-09-29 JP JP14860787U patent/JPS6451837U/ja active Pending