JPH01132933U - - Google Patents
Info
- Publication number
- JPH01132933U JPH01132933U JP2540988U JP2540988U JPH01132933U JP H01132933 U JPH01132933 U JP H01132933U JP 2540988 U JP2540988 U JP 2540988U JP 2540988 U JP2540988 U JP 2540988U JP H01132933 U JPH01132933 U JP H01132933U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- beam splitter
- sensors arranged
- optical
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Lasers (AREA)
Description
第１図ないし第３図はこの考案の第１実施例に
係り、第１図はエキシマレーザのパワーモニタ装
置の要部の構成図、第２図は全体の概略構成図、
第３図はパワーモニタ装置の制御系の構成を示す
ブロツク図である。第４図は第２実施例に係る制
御系の一部分のブロツク図である。第５図は従来
例の概略構成図である。
ＬＢ……レーザビーム、４ａ，４ｂ，４ｃ……
ビームスプリツタ、５……反射光路変換器、６ａ
，６ｂ，６ｃ……光センサ、７ａ，７ｂ，７ｃ…
…減光用フイルタ、１６……モニタデイスプレイ
、１７……インジケータ。
1 to 3 relate to a first embodiment of this invention, in which FIG. 1 is a block diagram of the main parts of an excimer laser power monitor device, FIG. 2 is a schematic block diagram of the entire structure,
FIG. 3 is a block diagram showing the configuration of the control system of the power monitor device. FIG. 4 is a block diagram of a portion of the control system according to the second embodiment. FIG. 5 is a schematic diagram of a conventional example. LB...Laser beam, 4a, 4b, 4c...
Beam splitter, 5...Reflection optical path converter, 6a
, 6b, 6c... optical sensor, 7a, 7b, 7c...
...Dimmer filter, 16...Monitor display, 17...Indicator.
Claims (1)
する複数のビームスプリツタを取り付けた回転型
の反射光路変換器と、各ビームスプリツタによる
反射光路上に配置された複数の光センサと、各光
センサの前部に各々配置された波長特性が互いに
異なる複数種類の減光用フイルタとを備えたレー
ザのパワーモニタ装置。 A rotary reflective optical path converter equipped with a plurality of beam splitters that set different angles to the optical path of the laser beam, a plurality of optical sensors arranged on the optical path reflected by each beam splitter, and a plurality of optical sensors arranged on the optical path reflected by each beam splitter; A laser power monitoring device equipped with a plurality of types of attenuating filters each having different wavelength characteristics arranged at the front.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540988U JPH01132933U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540988U JPH01132933U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01132933U true JPH01132933U (en) | 1989-09-11 |
Family
ID=31246120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2540988U Pending JPH01132933U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01132933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003204099A (en) * | 2002-01-09 | 2003-07-18 | Nidek Co Ltd | Laser device |
-
1988
- 1988-02-26 JP JP2540988U patent/JPH01132933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003204099A (en) * | 2002-01-09 | 2003-07-18 | Nidek Co Ltd | Laser device |